Browsing by author "Van Elshocht, Sven"
Now showing items 21-40 of 408
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ALD La-based oxides for Vt-tuning in high-k/metal gate stacks
Swerts, Johan; Fedorenko, Yanina; Maes, Jan; Tois, E.; Delabie, Annelies; Ragnarsson, Lars-Ake; Yu, HongYu; Nyns, Laura; Adelmann, Christoph; Van Elshocht, Sven (2007) -
ALD strontium titanates and their characterization
Popovici, Mihaela Ioana; Van Elshocht, Sven; Tomida, Kazuyuki; Menou, Nicolas; Swerts, Johan; Pawlak, Malgorzata; Kaczer, Ben; Kim, Min-Soo; Brijs, Bert; Favia, Paola; Conard, Thierry; Franquet, Alexis; Moussa, Alain; Debusschere, Ingrid; Altimime, Laith; Kittl, Jorge (2010) -
Alternative high-k dielectrics for semiconductor applications
Van Elshocht, Sven; Adelmann, Christoph; Clima, Sergiu; Pourtois, Geoffrey; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Lehnen, Peer; Meersschaut, Johan; Menou, Nicolas; Popovici, Mihaela Ioana; Richard, Olivier; Schram, Tom; Wang, Xin Peng; Hardy, An; Dewulf, Daan; van Bael, M.K.; Blomberg, T.; Pieereux, D.; Swerts, J.; Maes, J.W.; Wouters, Dirk; De Gendt, Stefan; Kittl, Jorge (2008) -
Alternative high-k dielectrics for semiconductor applications
Van Elshocht, Sven; Adelmann, Christoph; Clima, Sergiu; Pourtois, Geoffrey; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Lehnen, Peer; Meersschaut, Johan; Menou, Nicolas; Popovici, Mihaela Ioana; Richard, Olivier; Schram, Tom; Wang, Xin Peng; Hardy, An; Dewulf, Daan; Van Bael, Marlies; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Maes, Jan; Wouters, Dirk; De Gendt, Stefan; Kittl, Jorge (2009) -
Alternative metals for advanced interconnects
Adelmann, Christoph; Wen, Liang Gong; Peter, Antony; Siew, Yong Kong; Dutta, Shibesh; Croes, Kristof; Swerts, Johan; Popovici, Mihaela Ioana; Sankaran, Kiroubanand; Pourtois, Geoffrey; Van Elshocht, Sven; Boemmels, Juergen; Tokei, Zsolt (2014-10) -
Alternative metals for advanced interconnects
Adelmann, Christoph; Wen, Liang Gong; Peter, Antony; Siew, Yong Kong; Croes, Kristof; Swerts, Johan; Popovici, Mihaela Ioana; Sankaran, Kiroubanand; Pourtois, Geoffrey; Van Elshocht, Sven; Boemmels, Juergen; Tokei, Zsolt (2014) -
Alternative metals: from ab initio screening to calibrated narrow line models
Adelmann, Christoph; Sankaran, Kiroubanand; Dutta, Shibesh; Gupta, Anshul; Kundu, Shreya; Jamieson, Geraldine; Moors, Kristof; Pinna, Nicolo; Ciofi, Ivan; Van Elshocht, Sven; Boemmels, Juergen; Boccardi, Guillaume; Wilson, Chris; Pourtois, Geoffrey; Tokei, Zsolt (2018) -
Aluminium oxide atomic layer deposition on semiconductor substrates
Delabie, Annelies; Sioncke, Sonja; Rip, Jens; Van Elshocht, Sven; Pourtois, Geoffrey; Mueller, Matthias; Beckhoff, Burkhard; Pierloot, Kristine (2011) -
Anomalous positive-bias temperature instability of high-k/metal gate nMOSFET devices with Dy2O3 capping
O'Connor, Robert; Chang, Vincent; Pantisano, Luigi; Ragnarsson, Lars-Ake; Aoulaiche, Marc; O'Sullivan, Barry; Adelmann, Christoph; Van Elshocht, Sven; Lehnen, Peer; Yu, HongYu; Groeseneken, Guido (2008) -
Aqueous chemical solution deposition and characterization of ultrathin high-k dielectric metal oxide films
Hardy, An; Van Elshocht, Sven; Van Bael, Marlies; D'Haen, Jan; Douheret, Olivier; De Gendt, Stefan; Adelmann, Christoph; Caymax, Matty; Conard, Thierry; Witters, Thomas; D'Olieslaeger, Marc; Heyns, Marc; Mullens, J (2007) -
Aqueous chemical solution deposition of LuFeO3 thin films in view of energy storage applications
Gielis, Sven; Peys, Nick; Dewulf, Daan; De Dobbelaere, C.; Pavlovic, N.; Damm, H.; Van Elshocht, Sven; De Gendt, Stefan; Vereecken, Philippe; Hardy, An; Van Bael, Marlies (2011) -
Aqueous chemical solution deposition of LuFeO3 thin high-k films
Gielis, Sven; Peys, Nick; Dewulf, D.; Pavlovic, N.; Van Elshocht, Sven; De Gendt, Stefan; Hardy, An; Van Bael, Marlies (2012) -
Aqueous chemical solution deposition of ultrathin high-k dielectric metal oxide films
Hardy, An; Van Elshocht, Sven; Van Bael, Marlies; D'Haen, Jan; Douheret, O.; De Gendt, Stefan; Adelmann, Christoph; Caymax, Matty; Conard, Thierry; Witters, Thomas; D'Olieslaeger, Marc; Heyns, Marc; Mullens, J. (2007) -
Aqueous chemical solution deposition of ultrathin lanthanide oxide dielectric films
Hardy, An; Van Elshocht, Sven; D'Haen, Jan; Douheret, Olivier; De Gendt, Stefan; Adelmann, Christoph; Caymax, Matty; Conard, Thierry; Witters, Thomas; Bender, Hugo; Richard, Olivier; Heyns, Marc; D'Olieslaeger, Marc; Van Bael, Marlies; Mullens, J. (2007) -
Aqueous chemical solution deposition: a fast screening method for alternative high-k materials applied to Nd2O3 as a case study
Van Elshocht, Sven; Hardy, An; Witters, Thomas; Adelmann, Christoph; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Franquet, Alexis; Richard, Olivier; Van Bael, Marlies; Mullens, J.; Heyns, Marc (2007) -
Aqueous solution–gel preparation of ultrathin ZrO2 films for gate dielectric application
Hardy, An; Van Elshocht, Sven; Adelmann, Christoph; Conard, Thierry; Franquet, Alexis; Douheret, Olivier; Haeldermans, Ilse; D'Haen, Jan; De Gendt, Stefan; Caymax, Matty; Heyns, Marc; D'Olieslaeger, Marc; Van Bael, Marlies; Mullens, J. (2008) -
Area selective atomic layer deposition: a bottom-up approach for patterning
Delabie, Annelies; Soethoudt, Job; Tomczak, Yoann; Briggs, Basoene; Chan, BT; Tokei, Zsolt; Van Elshocht, Sven; Altamirano Sanchez, Efrain; Stevens, Eric; Parsons, Gregory, N (2018) -
Atomic layer deposited Gd-doped HfO2 thin films: from high-k dielectrics to ferroelectrics
Adelmann, Christoph; Ragnarsson, Lars-Ake; Moussa, Alain; Woicik, Joseph; Mueller, Stefan; Schoeder, Uwe; Afanasiev, Valeri; Van Elshocht, Sven (2012) -
Atomic layer deposition as an enabling technology for fabrication of germanium MOS transistor
Eneman, Geert; Delabie, Annelies; Van Elshocht, Sven; De Jaeger, Brice; Nicholas, Gareth; Martens, Koen; Brunco, David; Zimmerman, Paul; Houssa, Michel; Pourtois, Geoffrey; Kaczer, Ben; Leys, Frederik; Winderickx, Gillis; Huyghebaert, Cedric; Terzieva, Valentina; Loo, Roger; Caymax, Matty; Meuris, Marc; Heyns, Marc (2007) -
Atomic layer deposition of 2D transition metal dichalogenides
Delabie, Annelies; Caymax, Matty; Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Bender, Hugo; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Barla, Kathy; Radu, Iuliana; Thean, Aaron (2015-10)