Browsing by author "Alay, Josep Lluis"
Now showing items 1-18 of 18
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A fundamental multitechnique of SIMS depth profiling
Vandervorst, Wilfried; Brijs, Bert; Bender, Hugo; Alay, Josep Lluis; De Coster, Walter (1994) -
An ESCA study on ion beam induced oxidation of GaAs
Osiceanu, Petre; Alay, Josep Lluis (1995) -
An ESCA study on ion beam induced oxidation of Si
Osiceanu, Petre; Alay, Josep Lluis; De Coster, Walter (1995) -
Contributions from electron tunneling and local bond breaking to the positive secondary ion yields
Alay, Josep Lluis; Vandervorst, Wilfried (1994) -
Degradation of clean Si-surfaces due to storage in clean (?) wafer boxes
Storm, Wolfgang; Vandervorst, Wilfried; Alay, Josep Lluis; Meuris, Marc; Opdebeeck, Ann; Heyns, Marc; Polleunis, C.; Bertrand, P. (1994) -
Depth profiling with oxygen beams
Vandervorst, Wilfried; Alay, Josep Lluis; Brijs, Bert; De Coster, Walter; Elst, Kathy (1994) -
HREM characterization of oxygen ion beam sputtered epitaxial CoSi2
Bender, Hugo; De Coster, Walter; Brijs, Bert; Alay, Josep Lluis; Vandervorst, Wilfried (1994) -
In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials
De Coster, Walter; Brijs, Bert; Deleu, Jeroen; Alay, Josep Lluis; Vandervorst, Wilfried (1996) -
Ion beam mixing and oxidation of a Si/Ge-multilayer under oxygen bombardment
De Coster, Walter; Brijs, Bert; Osiceanu, Petre; Alay, Josep Lluis; Caymax, Matty; Vandervorst, Wilfried (1994) -
Ion-beam induced oxidation of GaAs and AlGaAs
Alay, Josep Lluis; Vandervorst, Wilfried; Bender, Hugo (1995) -
Model for the emission of Si+ ions during oxygen bombardment of Si(100) surfaces
Alay, Josep Lluis; Vandervorst, Wilfried (1994) -
Modifications in the Si valence band after ion-beam-induced oxidation
Alay, Josep Lluis; Vandervorst, Wilfried (1994) -
On the altered layer formation in III-V compounds
Alay, Josep Lluis; Vandervorst, Wilfried (1994) -
Optimization of reactive ion etching of Al0.48In0.52As in CH4/H2 by the experimental design method
Carpi, Enio; Van Hove, Marleen; Alay, Josep Lluis; Van Rossum, Marc (1995) -
RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys
De Coster, Walter; Brijs, Bert; Bender, Hugo; Alay, Josep Lluis; Vandervorst, Wilfried (1994) -
Sputtering phenomena of CoSi2 under low energy oxygen bombardment
Brijs, Bert; De Coster, Walter; Bender, Hugo; Alay, Josep Lluis; Osiceanu, Petre; Vandervorst, Wilfried (1994) -
Study of the altered layer formation under oxygen bombardment in combination with flooding
Elst, Kathy; Vandervorst, Wilfried; Bender, Hugo; Alay, Josep Lluis (1994) -
UV/ozone pre-treatment on organic contaminated wafer for complete oxide removal in HF vapour cleaning
Li, Li; Alay, Josep Lluis; Mertens, Paul; Meuris, Marc; Vandervorst, Wilfried; Heyns, Marc; De Blank, Rene; Schuivens, Eugene (1994)