Browsing by author "Alves Donaton, Ricardo"
Now showing items 1-20 of 27
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A BEEM study of PtSi Schottky contacts on ion-milled Si
Ru, Guo-Ping; Detavernier, C.; Alves Donaton, Ricardo; Blondeel, A.; Clauws, P.; Van Meirhaeghe, R. L.; Cardon, F.; Maex, Karen; Qu, X. P.; Zhu, S. Y.; Li, Bing-Zong (1999) -
Characterization and integration in Cu damascene structures of AURORA, an inorganic low-k dielectric
Alves Donaton, Ricardo; Coenegrachts, Bart; Sleeckx, Erik; Schaekers, Marc; Sophie, Guus; Matsuki, N.; Baklanov, Mikhaïl; Struyf, Herbert; Lepage, Muriel; Vanhaelemeersch, Serge; Beyer, Gerald; Stucchi, Michele; De Roest, David; Maex, Karen (2001) -
Characterization and integration of a new Si-O-C film deposited by CVD
Alves Donaton, Ricardo; Struyf, Herbert; Lepage, Muriel; Coenegrachts, Bart; Stucchi, Michele; De Roest, David; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen; Gaillard, F.; Xia, L. Q.; Lim, T. H.; Gotuaco, M.; Yieh, E.; Van Autryve, Luc (2001) -
Characterization of ultra-thin PtSi films for infrared detectors
Bender, Hugo; Roussel, Philippe; Kolodinski, Sabine; Torres Jacome, Alfonso; Alves Donaton, Ricardo; Maex, Karen; van der Sluis, P. (1996) -
CoSi2Si1-xGx-interfaces for Schottky barrier infrared detectors with extended detection regime
Kolodinski, Sabine; Alves Donaton, Ricardo; Roca, Elisenda; Caymax, Matty; Maex, Karen (1995) -
Elimination of HF-last cleaning related CoSi2 defects formation
Zou, Gang; Jonckx, Franky; Alves Donaton, Ricardo; Kuper, Werner; Maex, Karen; Mertens, Paul; Meuris, Marc; Heyns, Marc; Locke, Klaus; Korac, M.; Schild, R. (1994) -
Etching of CoSi2 in HF-based solutions
Alves Donaton, Ricardo; Lokere, K.; Verbeeck, Rita; Maex, Karen (1995) -
Focused ion beam analysis of organic low-k dielectrics
Bender, Hugo; Alves Donaton, Ricardo (2000) -
Formation of CoSi2 on strained Si0.8Ge0.2 using a sacrificial Si layer
Alves Donaton, Ricardo; Kolodinski, Sabine; Caymax, Matty; Roussel, Philippe; Bender, Hugo; Brijs, Bert; Maex, Karen (1995) -
Influence of SiGe thickness on the Co/SiGe/Si solid state reaction
Alves Donaton, Ricardo; Jin, S.; Bender, Hugo; Maex, Karen; Vantomme, Andre; Langouche, G. (1999) -
Limitation of HF-based chemistry for deep-submicron contact hole cleaning on silicides
Baklanov, Mikhaïl; Kondoh, Eiichi; Alves Donaton, Ricardo; Vanhaelemeersch, Serge; Maex, Karen (1998) -
Mechanical analysis of a SiLK/Cu dual damascene interconnect system
Waeterloos, Joost; Shaffer, E.; Stokich, T.; Alves Donaton, Ricardo; Maex, Karen (2001) -
Micro-characterisation of Pt silicides prepared on (100) silicon
Jin, S.; Bender, Hugo; Alves Donaton, Ricardo; Maex, Karen (1997) -
Microstructural studies by transmission electron microscopy of the formation of ultrathin PtSi layers with novel silicidation processes
Jin, S.; Bender, Hugo; Alves Donaton, Ricardo; Maex, Karen (1999) -
New approaches for formation of ultra-thin PtSi layers for infrared applications
Alves Donaton, Ricardo; Jin, S.; Bender, Hugo; Zagrebnov, Maxim; Baert, Kris; Maex, Karen; Vantomme, Andre; Langouche, G. (1998) -
New approaches for formation of ultra-thin PtSi layers for infrared applications
Alves Donaton, Ricardo; Jin, S.; Bender, Hugo; Zagrebnov, Maxim; Baert, Kris; Maex, Karen; Vantomme, Andre; Langouche, G. (1998) -
New process for controlled formation of ultra-thin PtSi films for infra-red detector applications
Torres Jacome, Alfonso; Kolodinski, Sabine; Alves Donaton, Ricardo; Maex, Karen; Roussel, Philippe; Bender, Hugo (1995) -
New technique for forming continuous, smooth and uniform ultrathin (3nm) PtSi layers
Alves Donaton, Ricardo; Jin, S.; Bender, Hugo; Conard, Thierry; De Wolf, Ingrid; Maex, Karen; Vantomme, Andre; Langouche, G. (1999) -
Nondestructive characterization of thin silicides using x-ray reflectivity
Detavernier, C.; De Gryse, R.; Van Meirhaeghe, R. L.; Cardon, F.; Ru, Guo-Ping; Qu, Xin-Ping; Li, Bing-Zong; Alves Donaton, Ricardo; Maex, Karen (2000) -
Physical and electrical characterization of silsesquioxane-based ultra-low k dielectric films
Alves Donaton, Ricardo; Iacopi, Francesca; Baklanov, Mikhaïl; Shamiryan, Denis; Coenegrachts, Bart; Struyf, Herbert; Lepage, Muriel; Meuris, Marc; Van Hove, Marleen; Gray, William; Meynen, Herman; De Roest, David; Vanhaelemeersch, Serge; Maex, Karen (2000)