Browsing by author "Romo Negreira, Ainhoa"
Now showing items 1-20 of 24
-
Can carbon nanotubes be preserved during FIB preparation of TEM samples?
Ke, Xiaoxing; Bals, Sara; Van Tenderloo, Gustaaf; Romo Negreira, Ainhoa; Hantschel, Thomas; Bender, Hugo (2008) -
Carbon nanotubes grown in contact holes for nano electronic applications: how to prepare TEM samples by FIB?
Ke, Xiaoxing; Bals, Sara; Romo Negreira, Ainhoa; Hantschel, Thomas; Bender, Hugo; Van Tendeloo, Gustaaf (2008-09) -
Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers
Gronheid, Roel; Singh, Arjun; Chan, BT; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd; Romo Negreira, Ainhoa; Somervell, Mark; Tahara, Shigeru; Nafus, Kathleen (2012) -
Electrochemical tailoring of catalyst nanoparticles for CNT spactial-dimension control
Romo Negreira, Ainhoa; Cott, Daire; De Gendt, Stefan; Maex, Karen; Heyns, Marc; Vereecken, Philippe (2010) -
Enabling the integration of carbon nanotubes (CNTs) into silicon technology using electrochemistry
Romo Negreira, Ainhoa (2011-05) -
Evaluation of integration schemes for contact-hole grapho-epitaxy DSA: a study of substrate and template affinity control
Romo Negreira, Ainhoa; Younkin, Todd; Gronheid, Roel; Demuynck, Steven; Vandenbroeck, Nadia; Seo, Takehito; Guerrero, Douglas; Parnell, Doni; Muramatsu, Makoto; Shinichiro, Kawakami; Takashi, Yamauchi; Nafus, Kathleen; Somervell, Mark (2014) -
From 2D to 3D: FIB sample preparation for carbon nanotube interconnects
Ke, Xiaoxing; Bals, Sarah; Romo Negreira, Ainhoa; Cott, Daire; Hantschel, Thomas; Bender, Hugo; Van Tendeloo, Gustaaf (2010) -
Growth and characterization of horizontally suspended CNTs across TiN electrode gaps
Santini, Claudia; Cott, Daire; Romo Negreira, Ainhoa; Capraro, Bernard; Riva Sanseverino, Stefano; De Gendt, Stefan; Groeseneken, Guido; Vereecken, Philippe (2010) -
Growth and electrical characterization of horizontally aligned CNTs
Santini, Claudia; Cott, Daire; Romo Negreira, Ainhoa; Riva SanSeverino, S.; De Gendt, Stefan; Vereecken, Philippe (2009) -
Growth and integration of high-density CNT for advanced interconnects
Vereecken, Philippe; Cott, Daire; Chiodarelli, Nicolo; Romo Negreira, Ainhoa; Verhulst, Anne; Hantschel, Thomas; Richard, Olivier; Groeseneken, Guido; Heyns, Marc; De Gendt, Stefan (2008) -
Growth and integration of high-density CNT for BEOL interconnects
Romo Negreira, Ainhoa; Cott, Daire; Verhulst, Anne; Cruz Esconjaurequi, Santiago; Chiodarelli, Nicolo; Ek Weis, Johan; Whelan, Caroline; Groeseneken, Guido; Heyns, Marc; De Gendt, Stefan; Vereecken, Philippe (2008) -
High density aligned CNT Arrays
Cott, Daire; Vereecken, Philippe; Romo Negreira, Ainhoa; Esconjauregui, Santiago Cruz; Griffiths, Hefin; Groeseneken, Guido (2007) -
Integration of carbon nanotubes for advanced interconnects
Chiodarelli, Nicolo; Esconjauregui, Santiago Cruz; Romo Negreira, Ainhoa; Cott, Daire; Ek Weis, Johan; Richard, Olivier; Whelan, Caroline; Hantschel, Thomas; Groeseneken, Guido; De Gendt, Stefan; Vereecken, Philippe (2008) -
Integration of CNT/Cu hybrid interconnects for BEOL: new possibilities for ECD
Vereecken, Philippe; Chiodarelli, Nicolo; Romo Negreira, Ainhoa; Santini, Claudia; Peys, Nick; Cott, Daire; van der Veen, Marleen; Verhulst, Anne; Arstila, Kai; Groeseneken, Guido; Heyns, Marc; De Gendt, Stefan (2009) -
Optimization and upscaling of spin coating with organosilane monolayers for low-k pore sealing
Sun, Yiting; Romo Negreira, Ainhoa; Meersschaut, Johan; Hoflijk, Ilse; Vaesen, Inge; Conard, Thierry; Struyf, Herbert; Tokei, Zsolt; Boemmels, Juergen; Moinpour, Mansour; De Feyter, Steven; Armini, Silvia (2017) -
Optimization of multi-walled carbon nanotube-metal contacts by electrical stressing
Ryan, Peter M.; Verhulst, Anne; Cott, Daire; Romo Negreira, Ainhoa; Hantschel, Thomas; Boland, John J. (2010) -
Process sensitivities in exemplary chemo-epitaxy directed self-assembly integration
Rincon Delgadillo, Paulina; Gronheid, Roel; Lin, Guanyan; Cao, Yi; Romo Negreira, Ainhoa; Somervell, Mark; Nafus, Kathleen; Nealey, Paul (2013) -
Progress in directed self-assembly hole shrink applications
Younkin, Todd; Gronheid, Roel; Rincon Delgadillo, Paulina; Chan, BT; Vandenbroeck, Nadia; Demuynck, Steven; Romo Negreira, Ainhoa; Parnell, Doni; Nafus, Kathleen; Tahara, Shigeru; Somervell, Mark (2013) -
Readying directed self-assembly for patterning in semiconductor manufacturing
Gronheid, Roel; Chan, BT; Pathangi Sriraman, Hari; Van Den Heuvel, Dieter; MKuppuswamy, Vijaya Kumar; Doise, Jan; Bekaert, Joost; Rincon Delgadillo, Paulina; Nealey, Paul; Cao, Yi; Her, YoungJun; Sayan, Safak; Parnell, Doni; Romo Negreira, Ainhoa; Somervell, Mark (2014) -
Rectification of EUV-patterned contact holes using directed self-assembly
Gronheid, Roel; Singh, Arjun; Younkin, Todd; Rincon Delgadillo, Paulina; Nealey, Paul; Chan, BT; Nafus, Kathleen; Romo Negreira, Ainhoa; Somervell, Mark (2013)