Browsing by author "Lauwers, A."
Now showing items 1-20 of 20
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A low thermal budget pre metal dielectric stack using PECVD and HDP processing
Schaekers, Marc; De Jaeger, Brice; Sleeckx, Erik; Debusschere, Ingrid; Van Hove, Marleen; Lauwers, A.; Hauf, H. (2001) -
A manufacturable process to improve thermal stability of 0.25-µm cobalt silicided poly gate
Wang, Qingfeng; Lauwers, A.; Deweerdt, Bruno; Verbeeck, Rita; Loosen, Fred; Maex, Karen (1995) -
A reliability study of titanium silicide lines using micro-raman spectroscopy and electron microscopy
De Wolf, Ingrid; Howard, Dave; Rasras, Mahmoud; Lauwers, A.; Maex, Karen; Groeseneken, Guido; Maes, Herman (1997) -
A reliability study of titanium silicide lines using micro-Raman spectroscopy and electron microscopy
De Wolf, Ingrid; Howard, Dave; Rasras, Mahmoud; Lauwers, A.; Maex, Karen; Groeseneken, Guido; Maes, Herman (1997) -
Comparative study of Ni-silicide and Co-silicide for sub 0.25 μm technologies
Lauwers, A.; Besser, Paul; Gutt, T.; Satta, Alessandra; de Potter de ten Broeck, Muriel; Lindsay, Richard; Roelandts, Nico; Loosen, Fred; Stucchi, Michele; Vrancken, Christa; Deweerdt, Bruno; Maex, Karen (1999) -
Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies
Lauwers, A.; Besser, Paul; Gutt, T.; Satta, Alessandra; de Potter de ten Broeck, Muriel; Lindsay, Richard; Roelandts, Nico; Loosen, Fred; Jin, S.; Bender, Hugo; Stucchi, Michele; Vrancken, Evi; Deweerdt, Bruno; Maex, Karen (2000) -
Effect of implantation oxide on the silicidation of narrow diffused and poly-lines
Naem, Abdalla; Lauwers, A.; de Potter de ten Broeck, Muriel; Maex, Karen (1997) -
Electrical performance and scalability of Ni-monosilicide towards sub 0.13 μm technologies
Lauwers, A.; de Potter de ten Broeck, Muriel; Lindsay, Richard; Steegen, An; Roelandts, Nico; Lossen, F.; Vrancken, Christa; Maex, Karen (2001) -
Electrical transport in (100)CoSi2/Si contacts
Lauwers, A.; Kyllesbech Larsen, K.; Van Hove, Marleen; Verbeeck, Rita; Maex, Karen; Van Rossum, Marc; Vercaemst, A.; Van Meirhaeghe, R.; Cardon, F. (1995) -
Electronic Transport in Metallic Iron Disilicide
Kyllesbech Larsen, K.; Van Hove, Marleen; Lauwers, A.; Donaton, R. A.; Maex, Karen; Van Rossum, Marc (1994) -
Growth of epitaxial b-FeSi2 on (100) silicon using Fe-Ti-Si diffusion couples
Kyllesbech Larsen, K.; Tavares, J.; Bender, Hugo; Donaton, R. A.; Lauwers, A.; Maex, Karen (1995) -
In situ transmission electron microscopy study of Ni silicide phases formed on (001) Si active lines
Teodorescu, V.; Nistor, Leona; Bender, Hugo; Steegen, An; Lauwers, A.; Maex, Karen; Van Landuyt, J. (2001) -
In situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substrates
Ghica, C.; Nistor, Leona; Bender, Hugo; Steegen, An; Lauwers, A.; Maex, Karen; Van Landuyt, J. (2001) -
L-shape spacer architecture for low cost, high performance CMOS
Augendre, Emmanuel; Perello, Carles; Vandamme, Ewout; Pochet, Sandrine; Rooyackers, Rita; Beckx, Stephan; de Potter de ten Broeck, Muriel; Lauwers, A.; Badenes, Gonçal (2001) -
Materials aspects, electrical performance, and scalability of Ni-silicide towards sub-0.13μm technologies
Lauwers, A.; Steegen, An; de Potter de ten Broeck, Muriel; Lindsay, Richard; Satta, Alessandra; Bender, Hugo; Maex, Karen (2001) -
Optimized thermal processing for Ti-Capped CoSi2 for 0.13 μm technology
Lindsay, Richard; Lauwers, A.; de Potter de ten Broeck, Muriel; Roelandts, Nico; Vrancken, Christa; Maex, Karen (2001) -
Optimized thermal processing for Ti-capped CoSi2 for 0.13μm technology
Lindsay, Richard; Lauwers, A.; de Potter de ten Broeck, Muriel; Roelandts, Nico; Vrancken, Christa; Maex, Karen (2000) -
Orientation-dependent stress build-up during the formation of epitaxial CoSi2
Steegen, An; Detavernier, C.; Lauwers, A.; Maex, Karen; Van Meirhaeghe, R. L.; Cardon, F. (2001) -
Self-aligned CoSi2 for 0.18mm and below
Maex, Karen; Lauwers, A.; Besser, Paul; Kondoh, Eiichi; de Potter de ten Broeck, Muriel; Steegen, An (1999) -
Silicide induced pattern density and orientation dependent transconductance in MOS transistors
Steegen, An; Stucchi, Michele; Lauwers, A.; Maex, Karen (1999)