Browsing by author "Verbist, Agnes"

A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS

Scheurle, A.; Fuchs, T.; Kehr, K.; Leinenbach, C.; Kronmueller, S.; Arias, A.; Ceballos, J.; Lagos, M.A.; Mora, J.-M.; Munoz, J.M.; Ragel, A.; Ramos, J.; Van Aerde, Steven; Spengler, J.; Mehta, Anshu; Verbist, Agnes; Du Bois, Bert; Witvrouw, Ann (2007-01)

A comparison between wet HF etching and vapor HF etching for sacrificial oxide removal

Witvrouw, Ann; Du Bois, Bert; De Moor, Piet; Verbist, Agnes; Van Hoof, Chris; Bender, Hugo; Baert, Kris (2000)

A multi-axial strain gage with octagonal shape

Van Gerwen, Peter; Slater, Tim; Verbist, Agnes; Beullens, Danny; Baert, Kris (1996)

A new way to selectively remove Si islands from polycrystalline silicon seed layers made by aluminium-induced crystallization

Van Gestel, Dries; Gordon, Ivan; Verbist, Agnes; Carnel, Lodewijk; Beaucarne, Guy; Poortmans, Jef (2008)

A novel process for fabricating slender and compliant suspended poly Si micro-mechanical structures with sub-micron gap spacing

Pamidighantam, Sayanu; Laureyn, Wim; Salah, Ahmed; Verbist, Agnes; Tilmans, Harrie (2002)

A wafer-level poly-SiGe-based thin film packaging technology demonstrated on a SOI-based high-Q MEM resonator

Helin, Philippe; Verbist, Agnes; De Coster, Jeroen; Guo, Bin; Severi, Simone; Witvrouw, Ann; Haspeslagh, Luc; Tilmans, Harrie; Naito, Yasuyuki; Onishi, K. (2011)

Above-IC generic poly-SiGe thin film wafer level packaging and MEM device technology: application to accelerometers

Guo, Bin; Wen, Lianggong; Helin, Philippe; Claes, Gert; Verbist, Agnes; Van Hoof, Rita; Du Bois, Bert; De Coster, Jeroen; De Wolf, Ingrid; Shahar, Abdul Hadi; Li, Yunlong; Cui, Hushan; Lux, Marcel; Vereecke, Guy; Tilmans, Harrie; Haspeslagh, Luc; Decoutere, Stefaan; Osman, Haris; Puers, Bob; Severi, Simone; Witvrouw, Ann (2011)

CMOS foundry-based micromachining

Tilmans, Harrie; Baert, Kris; Verbist, Agnes; Puers, Bob (1995)

CMOS foundry-based micromachining

Tilmans, Harrie; Baert, Kris; Verbist, Agnes; Puers, Bob (1996)

Consistent analytical model for single and dual thickness capacitive micromachined ultrasound transducers (cMUT)

Rottenberg, Xavier; Erismis, Mehmet Akif; Czarnecki, Piotr; Helin, Philippe; Verbist, Agnes; Tilmans, Harrie (2012)

Engineering of acoustic meta-materials with application to MEMS BAW resonators

Rottenberg, Xavier; Jansen, Roelof; Verheyen, Peter; Van Hoof, Rita; Verbist, Agnes; Tilmans, Harrie (2011-06)

Fabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGe

Van Barel, Greg; Van Hoof, Rita; Du Bois, Bert; Verbist, Agnes; Witvrouw, Ann (2007-03)

HF etching of Si-oxides and Si-nitrides for surface micromachining

Du Bois, Bert; Vereecke, Guy; Witvrouw, Ann; De Moor, Piet; Van Hoof, Chris; De Caussemaeker, Ann; Verbist, Agnes (2001)

Highly reliable and extremely stable SiGe micro-mirrors

Gromova, Maria; Haspeslagh, Luc; Verbist, Agnes; Du Bois, Bert; Van Hoof, Rita; Eyckens, Brenda; Sijmus, Bram; De Wolf, Ingrid; Simons, Veerle; Muller, Philippe; Lauwagie, Tom; Willegems, Myriam; Locorotondo, Sabrina; Boullart, Werner; Baert, Kris; Witvrouw, Ann (2007-01)