Browsing by author "Surdeanu, Radu"

A comparison of spike, flash, SPER and laser annealing for 45nm CMOS

Lindsay, Richard; Pawlak, Bartek; Kittl, Jorge; Henson, Kirklen; Torregiani, Cristina; Giangrandi, Simone; Surdeanu, Radu; Vandervorst, Wilfried; Mayur, A.; Ross, J.; McCoy, S.; Gelpey, J.; Elliott, K.; Pagès, Xavier; Satta, Alessandra; Lauwers, Anne; Stolk, P.; Maex, Karen (2003)

A practical baseline process for advanced CMOS devices research

Ponomarev, Youri; Loo, Josine; Rittersma, Chris; Lander, Rob; Hooker, Jacob; Doornbos, Gerben; Surdeanu, Radu; Cubaynes, Florence; Dachs, Charles; Kubicek, Stefan; Henson, Kirklen; Lindsay, Richard (2003)

Advanced PMOS device architecture for highly-doped ultra-shallow junctions

Surdeanu, Radu; Pawlak, Bartek; Lindsay, Richard; Van Dal, Mark; Doornbos, Gerben; Dachs, C.J.J.; Ponomarev, Youri; Loo, Josine; Cubaynes, Florence; Henson, Kirklen; Verheijen, M.A.; Kaiser, M.; Pagès, Xavier; Stolk, Peter; Jurczak, Gosia (2004)

Channel engineering and junction overlap issues for ultra-shallow junctions formed by SPER in the 45 nm CMOS technology node

Severi, Simone; Henson, Kirklen; Lindsay, Richard; Lauwers, Anne; Pawlak, Bartek; Surdeanu, Radu; De Meyer, Kristin (2004-04)

Chemical and electrical dopant evolution during solid phase epitaxial regrowth

Pawlak, Bartek; Lindsay, Richard; Vandervorst, Wilfried; Kittl, Jorge; Surdeanu, Radu; Duffy, Ray; Stolk, P. (2003)

Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth

Pawlak, Bartek; Lindsay, Richard; Surdeanu, Radu; Dieu, Bjorn; Geenen, Luc; Hoflijk, Ilse; Richard, Olivier; Duffy, Ray; Clarysse, Trudo; Brijs, Bert; Vandervorst, Wilfried (2004)

CMOS device optimisation for mixed-signal technologies

Stolk, Peter; Tuinhout, Hans; Duffy, Ray; Augendre, Emmanuel; Bellefroid, L. P.; Bolt, M. J. B.; Croon, Jeroen; Dachs, Charles; Huisman, F. R. J.; Moonen, A. J.; Ponomarev, Youri; Roes, R. F. M.; Da Rold, Martina; Seevinck, E.; Sreerambhatla, K. N.; Surdeanu, Radu; Velghe, Rudolf; Vertregt, M.; Webster, M. N.; van Winkelhoff, N. K. J.; Zegers-Van Duijnhoven, A. T. A. (2001)

CMOS scaling beyond the 90 nm CMOS technology node: shallow junction and integration challenges

Dachs, Charles; Surdeanu, Radu; Pawlak, Bartek; Doornbos, Gerben; Duffy, R.; Heringa, Anco; Ponomarev, Youri; Venezia, Vincent; Van Dal, Mark; Stolk, P.; Lindsay, Richard; Henson, Kirklen; Dieu, B.; Geenen, Luc; Hoflijk, Ilse; Richard, Olivier; Clarysse, Trudo; Brijs, Bert; Vandervorst, Wilfried; Pagès, Xavier (2003)

Demonstration of asymmetric gate-oxide thickness four-terminal FinFETs having flexible threshold voltage and good subthreshold slope

Masahara, Meishoku; Surdeanu, Radu; Witters, Liesbeth; Doornbos, Gerben; Nguyen Hoang, Viet; Van den Bosch, Geert; Vrancken, Christa; Devriendt, Katia; Neuilly, Francois; Kunnen, Eddy; Jurczak, Gosia; Biesemans, Serge (2007-03)

Evidence on the mechanism of boron deactivation in Ge-preamorphized ultrashallow junctions

Pawlak, Bartek; Surdeanu, Radu; Colombeau, B.; Smith, A.J.; Cowern, N.E.B.; Lindsay, Richard; Vandervorst, Wilfried; Brijs, Bert; Richard, Olivier; Cristiano, F. (2004)

Experimental investigation of optimum gate workfunction for CMOS four-terminal muligate MOSFETs (MUGFETs)

Masahara, Meishoku; Surdeanu, Radu; Witters, Liesbeth; Doornbos, Gerben; Nguyen Hoang, Viet; Van den Bosch, Geert; Vrancken, Christa; Jurczak, Gosia; Biesemans, Serge (2007)

Four-terminal FinFET device technology

Masahara, Meishoku; Endo, K.; Liu, Y.X.; O'uchi, S.; Matsukawa, T.; Surdeanu, Radu; Witters, Liesbeth; Doornbos, Gerben; Nguyen Hoang, Viet; Van den Bosch, Geert; Vrancken, Christa; Jurczak, Gosia; Biesemans, Serge; Suzuki, E. (2007)

Independent double-gate FinFets with asymmetric gate stacks

Masahara, Meishoku; Surdeanu, Radu; Witters, Liesbeth; Doornbos, Gerben; Nguyen Hoang, Viet; Van den Bosch, Geert; Vrancken, Christa; Devriendt, Katia; Neuilly, Francois; Kunnen, Eddy; Suzuki, E.; Jurczak, Gosia; Biesemans, Serge (2007)

Integrating diffusionless anneals into advanced CMOS technologies

Surdeanu, Radu; Lindsay, Richard; Severi, Simone; Satta, Alessandra; Pawlak, Bartek; Lauwers, Anne; Dachs, C.J.J.; Henson, Kirklen; McCoy, S.; Gelpey, J.C. (2004)

Integration challenges of SPER junctions for the 45 nm technology node

Severi, Simone; Richard, Lindsay; Henson, Kirklen; Pawlak, Bartek; Satta, Alessandra; Duffy, Ray; Surdeanu, Radu (2004)

Integration of low and high temperature junction anneals for 45nm CMOS

Lindsay, Richard; Pawlak, Bartek; Henson, Kirklen; Satta, Alessandra; Severi, Simone; Lauwers, Anne; Surdeanu, Radu; McCoy, S.; Gelpey, J.; Pagès, Xavier; Maex, Karen (2004)

Laser annealing for ultra-shallow junction formation in advanced CMOS

Surdeanu, Radu; Ponomarev, Youri; Cerutti, R.; Pawlak, Bartek; Nanver, L.K.; Hoflijk, Ilse; Stolk, Peter; Dachs, Charles; Verheijen, M.A.; Kaiser, M.; Hopstaken, M.J.P.; van Berkum, J.G.M.; Roozeboom, F.; Lindsay, Richard (2002)

Leakage optimatisation of ultra-shallow junctions formed by solid phase epitaxial regrowth (SPER)

Lindsay, Richard; Pawlak, Bartek; Kittl, Jorge; Henson, Kirklen; Giangrandi, Simone; Duffy, Ray; Surdeanu, Radu; Vandervorst, Wilfried; Pagès, Xavier; Van der Jeugd, Kees; Stolk, P.; Maex, Karen (2003)

Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth

Lindsay, Richard; Henson, Kirklen; Vandervorst, Wilfried; Maex, Karen; Pawlak, Bartek; Duffy, Ray; Surdeanu, Radu; Stolk, Peter; Kittl, Jorge; Giangrandi, Simone; Pagès, Xavier; Van der Jeugd, Kees (2004)

Minimization of the MuGFET contact resistance by integration of NiSi contacts on epitaxially raised source/drain regions

Dixit, Abhisek; Rooyackers, Rita; Leys, Frederik; Kaiser, Monja; Weemaes, R.; Ferain, Isabelle; De Keersgieter, An; Collaert, Nadine; Surdeanu, Radu; Goodwin, Michael; Zimmerman, Paul; Loo, Roger; Caymax, Matty; Jurczak, Gosia; Biesemans, Serge; De Meyer, Kristin (2005)