Browsing by author "Petry, Jasmine"
Now showing items 1-20 of 42
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Band gap of ALCVD mixed oxide AlZrO and HfAlO measured by XPS
Petry, Jasmine; Vandervorst, Wilfried; Conard, Thierry (2003) -
Breakdown spots on ultra-thin (EOT<1.5nm) HfO2/SiO2 stacks observed with enhanced - CAFM
Blasco, X.; Nafria, M.; Aymerich, X.; Petry, Jasmine; Vandervorst, Wilfried (2005) -
C-AFM Characterization of the dependance of AlHfOx electrical behaviour on post deposition annealing temperature
Blasco, X.; Petry, Jasmine; Nafria, M.; Aymerich, X.; Vandervorst, Wilfried (2003) -
Characterization of high-k films grown by atomic layer deposition
Vandervorst, Wilfried; Conard, Thierry; Petry, Jasmine; Brijs, Bert; Bender, Hugo; Richard, Olivier; Caymax, Matty; De Gendt, Stefan; Green, Martin; Cartier, Eduard; Copel, M. (2002) -
Comparison of electric properties of ultra-thin thermal and plasma nitrided silicon oxides with different post-deposition treatments using C-AFM
Polspoel, Wouter; Vandervorst, Wilfried; Petry, Jasmine; Conard, Thierry; Benedetti, Alessandro (2005) -
Composition and growth kinetics of the interfacial layer for MOCVD HfO2 layers on Si substrates
Van Elshocht, Sven; Caymax, Matty; De Gendt, Stefan; Conard, Thierry; Petry, Jasmine; Date, Lucien; Pique, Didier; Heyns, Marc (2004-03) -
Critical metrology for ultrathin high k dielectrics
Vandervorst, Wilfried; Brijs, Bert; Bender, Hugo; Conard, Thierry; Petry, Jasmine; Richard, Olivier; Blasco, X.; Nafría, M. (2003) -
Effect of degas before metal gate deposition on the threshold voltage
Petry, Jasmine; Xiong, K.; Ragnarsson, Lars-Ake; Singanamalla, Raghunath; Hooker, Jacob (2007) -
Effect of N2 anneal on thin HfO2 layers studied by C-AFM
Petry, Jasmine; Vandervorst, Wilfried; Blasco, X. (2004) -
Effect of N2 annealing on AlxZryOz oxide
Petry, Jasmine; Richard, Olivier; Vandervorst, Wilfried; Conard, Thierry; Chen, Jerry; Cosnier, Vincent (2002) -
Effect of N2 annealing on AlZrO oxide
Petry, Jasmine; Richard, Olivier; Vandervorst, Wilfried; Conard, Thierry; Chen, Jerry; Cosnier, Vincent (2003) -
Electrical characterization of high-dielectric-constant/SiO2 metal-oxide-semiconductor gate stacks by a conductive atomic force microscope
Blasco, X.; Porti, M.; Nafria, M.; Petry, Jasmine; Vandervorst, Wilfried (2005) -
Fabrication of conductive AFM probes and their use in microelectronics
Fouchier, Marc; Alvarez, David; Eyben, Pierre; Duhayon, Natasja; Petry, Jasmine; Drijbooms, Chris (2003) -
GAFM characterization of the dependence of HfAlOx electrical behavior on post-deposition annealing temperature
Blasco, X.; Petry, Jasmine; Nafria, M.; Aymerich, X.; Richard, Olivier; Vandervorst, Wilfried (2004) -
Gatestacks for scalable high-performance FinFETs
Vellianitis, Georgios; Van Dal, Mark; Witters, Liesbeth; Curatola, Gilberto; Doornbos, Gerben; Collaert, Nadine; Jonville, C.; Torregiani, Cristina; Lai, Li-Shyue; Petry, Jasmine; Pawlak, Bartek; Duffy, Ray; Demand, Marc; Beckx, Stephan; Mertens, Sofie; Delabie, Annelies; Vandeweyer, Tom; Delvaux, Christie; Leys, Frederik; Hikavyy, Andriy; Rooyackers, Rita; Kaiser, M.; Weemaes, R.G.R.; Voogt, F.; Roberts, H.; Donnet, D.; Biesemans, Serge; Jurczak, Gosia; Lander, Rob (2007) -
Growth and physical properties of MOCVD-deposited hafnium oxide films and their properties on silicon
Van Elshocht, Sven; Caymax, Matty; De Gendt, Stefan; Conard, Thierry; Petry, Jasmine; Claes, Martine; Witters, Thomas; Zhao, Chao; Brijs, Bert; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried; Carter, Richard; Kluth, Jon; Daté, L.; Pique, D.; Heyns, Marc (2003) -
High resolution electrical characterization of advanced CMOS devices
Eyben, Pierre; Petry, Jasmine; Janssens, Tom; Fukutome, H.; Vandervorst, Wilfried (2004) -
Impact of incorporated Al on the TiN/HfO2 interface effective work function
Ka, Xiong; Robertson, John; Pourtois, Geoffrey; Petry, Jasmine; Müller, Markus (2008) -
Issues, achievements and challenges towards integration of high-k dielectrics
Caymax, Matty; De Gendt, Stefan; Vandervorst, Wilfried; Heyns, Marc; Bender, Hugo; Carter, Richard; Conard, Thierry; Degraeve, Robin; Groeseneken, Guido; Kubicek, Stefan; Lujan, Guilherme; Pantisano, Luigi; Petry, Jasmine; Röhr, Erika; Van Elshocht, Sven; Zhao, Chao; Cartier, Eduard; Chen, Jerry; Cosnier, Vincent; Jang, Se Aug; Kaushik, Vidya; Kerber, Andreas; Kluth, Jon; Lin, S.; Tsai, Wilman; Young, Edward; Manabe, Y. (2002) -
Issues, achievements and challenges towards intergration of high-k dielectrics
Heyns, Marc; Bender, Hugo; Caymax, Matty; Carter, R; Claes, Martine; Conard, Thierry; Boullart, Werner; De Gendt, Stefan; Degraeve, Robin; Deweerd, Wim; Groeseneken, Guido; Houssa, Michel; Kubicek, Stefan; Lujan, Guilherme; Nohira, H.; Pantisano, Luigi; Petry, Jasmine; Röhr, Erika; Vandervorst, Wilfried; Van Elshocht, Sven; Xu, Zhen; Zhao, Chao; Cartier, E.; Chen, J.; Cosnier, V.; Green, M.; Jang, S.E.; Kaushik, Vidya; Kerber, A.; Kluth, J.; Lin, S.; Tsai, Wilman; Young, Edward; Manabe, Y. (2002)