Browsing by author "Guo, Bin"
Now showing items 1-13 of 13
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A CMOS compatible polycrystalline silicon-germanium based piezoresistive pressure sensor
Gonzalez, Pilar; Guo, Bin; Severi, Simone; De Meyer, Kristin; Witvrouw, Ann (2011) -
A wafer-level poly-SiGe-based thin film packaging technology demonstrated on a SOI-based high-Q MEM resonator
Helin, Philippe; Verbist, Agnes; De Coster, Jeroen; Guo, Bin; Severi, Simone; Witvrouw, Ann; Haspeslagh, Luc; Tilmans, Harrie; Naito, Yasuyuki; Onishi, K. (2011) -
Above-IC generic poly-SiGe thin film wafer level packaging and MEM device technology: application to accelerometers
Guo, Bin; Wen, Lianggong; Helin, Philippe; Claes, Gert; Verbist, Agnes; Van Hoof, Rita; Du Bois, Bert; De Coster, Jeroen; De Wolf, Ingrid; Shahar, Abdul Hadi; Li, Yunlong; Cui, Hushan; Lux, Marcel; Vereecke, Guy; Tilmans, Harrie; Haspeslagh, Luc; Decoutere, Stefaan; Osman, Haris; Puers, Bob; Severi, Simone; Witvrouw, Ann (2011) -
CMOS compatible polycrystalline silicon-germanium based pressure sensors
Gonzalez, Pilar; Guo, Bin; Rakowski, Michal; De Meyer, Kristin; Witvrouw, Ann (2012) -
Development, optimization and evaluation of a CF4 pre-treatment process to remove unwanted interfacial layers in stacks of CVD and PECVD polycrystalline silicon-germanium for MEMS applications
Bryce, George; Severi, Simone; Van Hoof, Rita; Guo, Bin; Kunnen, Eddy; Witvrouw, Ann; Decoutere, Stefaan (2010) -
Development, optimization and evaluation of a CF4 pretreatment process to remove unwanted interfacial layers in stacks of CVD and PECVD polycrystalline silicon-germanium for MEMS applications
Bryce, George; Severi, Simone; Van Hoof, Rita; Guo, Bin; Kunnen, Eddy; Witvrouw, Ann; Decoutere, Stefaan (2010) -
High-Q torsional mode Si triangular beam resonators encapsulated using SiGe thin film
Naito, Yasuyuki; Helin, Philippe; Nakamura, K.; De Coster, Jeroen; Guo, Bin; Haspeslagh, Luc; Onishi, K.; Tilmans, Harrie (2010) -
Improvement of PECVD silicon–germanium crystallization for CMOS compatible MEMS applications
Guo, Bin; Severi, Simone; Bryce, George; Claes, Gert; Van Hoof, Rita; Du Bois, Bert; Haspeslagh, Luc; Witvrouw, Ann; Decoutere, Stefaan (2010) -
Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS
Wang, Bo; Tanaka, Shuji; Guo, Bin; Vereecke, Guy; Severi, Simone; Witvrouw, Ann; Wevers, Martine; De Wolf, Ingrid (2011) -
Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS
Wang, Bo; Tanaka, Shuji; Guo, Bin; Vereecke, Guy; Severi, Simone; Witvrouw, Ann; Wevers, Martine; De Wolf, Ingrid (2012) -
Poly-SiGe-based MEMS thin-film encapsulation
Guo, Bin; Wang, Bo; Wen, Lianggong; Helin, Philippe; Claes, Gert; De Coster, Jeroen; Du Bois, Bert; Verbist, Agnes; Van Hoof, Rita; Vereecke, Guy; Haspeslagh, Luc; Tilmans, Harrie; Decoutere, Stefaan; Osman, Haris; Puers, Bob; De Wolf, Ingrid; Tanaka, Shuji; Severi, Simone; Witvrouw, Ann (2012) -
Sealing of poly-SiGe surface micromachined cavities for MEMS-above-CMOS applications
Gonzalez, Pilar; Guo, Bin; Varela Pedreira, Olalla; Severi, Simone; De Meyer, Kristin; Witvrouw, Ann (2011) -
Thin film encapsulated SiGe accelerometer for MEMS above IC integration
Wen, Liangong; Guo, Bin; Haspeslagh, Luc; Severi, Simone; Witvrouw, Ann; Puers, Bob (2011)