Browsing by author "Wang, Xin Peng"
Now showing items 1-20 of 30
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0.5 nm EOT low leakage ALD SrTiO3 on TiN MIM capacitors for DRAM applications
Menou, Nicolas; Wang, Xin Peng; Kaczer, Ben; Polspoel, Wouter; Popovici, Mihaela Ioana; Opsomer, Karl; Pawlak, Malgorzata; Knaepen, W.; Detavernier, C.; Blomberg, T.; Pierreux, D.; Swerts, Johan; Maes, Jan; Favia, Paola; Bender, Hugo; Brijs, Bert; Vandervorst, Wilfried; Van Elshocht, Sven; Wouters, Dirk; Biesemans, Serge; Kittl, Jorge (2008) -
A fast and reliable method used to investigate the size-dependent retention lifetime of a phase-change line cell
Goux, Ludovic; Hurkx, Fred; Wang, Xin Peng; Delhougne, Romain; Attenborough, Karen; Gravesteijn, Dirk; Wouters, Dirk; Perez Gonzalez, Jesus (2011) -
A novel method for extracting the temperature-dependent crystal-growth parameters in fast-growth phase-change memories
Goux, Ludovic; Hurkx, Fred; Wang, Xin Peng; Delhougne, Romain; Attenborough, Karen; Gravesteijn, Dirk; Wouters, Dirk; Perez Gonzalez, Jesus (2010) -
Alternative high-k dielectrics for semiconductor applications
Van Elshocht, Sven; Adelmann, Christoph; Clima, Sergiu; Pourtois, Geoffrey; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Lehnen, Peer; Meersschaut, Johan; Menou, Nicolas; Popovici, Mihaela Ioana; Richard, Olivier; Schram, Tom; Wang, Xin Peng; Hardy, An; Dewulf, Daan; van Bael, M.K.; Blomberg, T.; Pieereux, D.; Swerts, J.; Maes, J.W.; Wouters, Dirk; De Gendt, Stefan; Kittl, Jorge (2008) -
Alternative high-k dielectrics for semiconductor applications
Van Elshocht, Sven; Adelmann, Christoph; Clima, Sergiu; Pourtois, Geoffrey; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Lehnen, Peer; Meersschaut, Johan; Menou, Nicolas; Popovici, Mihaela Ioana; Richard, Olivier; Schram, Tom; Wang, Xin Peng; Hardy, An; Dewulf, Daan; Van Bael, Marlies; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Maes, Jan; Wouters, Dirk; De Gendt, Stefan; Kittl, Jorge (2009) -
Atomic layer deposition of hafnium titanates dielectric layers
Popovici, Mihaela Ioana; Delabie, Annelies; Van Elshocht, Sven; Menou, Nicolas; Wang, Xin Peng; Wouters, Dirk; Kittl, Jorge; Swerts, Johan; Knaepen, W.; Detavernier, Christophe (2008) -
Bipolar switching characteristics and scalability in NiO layers made by thermal oxidation of Ni
Goux, Ludovic; Polspoel, Wouter; Lisoni, Judit; Chen, Yangyin; Pantisano, Luigi; Wang, Xin Peng; Vandervorst, Wilfried; Jurczak, Gosia; Wouters, Dirk (2010) -
Crystallization study of thin ZrO2 ALD films on Al203 and on TiN for DRAM MIMCAP applications
Pawlak, Malgorzata; Menou, Nicolas; Wang, Xin Peng; Dilliway, G.; Pierreux, D.; Fischer, P.; Vos, Rita; Hoyer, R.; Kittl, Jorge; Wouters, Dirk; Biesemans, Serge (2008) -
Effect of anodic interface layers on the unipolar switching of HfO2-based resistive RAM
Wang, Xin Peng; Chen, Yangyin; Pantisano, Luigi; Goux, Ludovic; Jurczak, Gosia; Groeseneken, Guido; Wouters, Dirk (2010) -
Effect of deposition and anneal temperature on batch-ALD deposited ZrO2/Al2O3/ZrO2 films for DRAM MIM capacitor applications
Dilliway, G.; Pierreux, D.; Fischer, P.; Menou, Nicolas; Pawlak, Malgorzata; Wang, Xin Peng; Wouters, Dirk (2008) -
Electrical properties of low-VT metal-gated n-MOSFETs using La2O3/SiOx as interfacial layer between HfLaO high-k dielectrics and Si channel
Chang, Shou-Zen; Yu, Hong-Yu; Adelmann, Christoph; Delabie, Annelies; Wang, Xin Peng; Van Elshocht, Sven; Akheyar, Amal; Nyns, Laura; Swerts, Johan; Aoulaiche, Marc; Kerner, Christoph; Absil, Philippe; Hoffmann, Thomas Y.; Biesemans, Serge (2008-05) -
Extraction of the retention properties of a phase-change cell from temperature-ramp tests using a novel method
Goux, Ludovic; Hurkx, Fred; Wang, Xin Peng; Delhougne, Romain; Attenborough, Karen; Gravesteijn, Dirk; Wouters, Dirk; Perez Gonzalez, Jesus (2010) -
Fully CMOS BEOL compatible HfO2 RRAM cell, with low (μA) program current, strong retention and high scalability, using an optimized Plasma Enhanced Atomic Layer Deposition (PEALD) process for TiN electrode
Chen, Yangyin; Goux, Ludovic; Pantisano, Luigi; Swerts, Johan; Adelmann, Christoph; Mertens, Sofie; Afanasiev, Valeri; Wang, Xin Peng; Govoreanu, Bogdan; Degraeve, Robin; Kubicek, Stefan; Paraschiv, Vasile; Verbrugge, Beatrijs; Jossart, Nico; Altimime, Laith; Jurczak, Gosia; Kittl, Jorge; Groeseneken, Guido; Wouters, Dirk (2011) -
High-k dielectrics and metal gates for future generation memory devices
Kittl, Jorge; Opsomer, Karl; Popovici, Mihaela Ioana; Menou, Nicolas; Kaczer, Ben; Wang, Xin Peng; Adelmann, Christoph; Pawlak, Malgorzata; Tomida, Kazuyuki; Rothschild, Aude; Govoreanu, Bogdan; Degraeve, Robin; Schaekers, Marc; Zahid, Mohammed; Delabie, Annelies; Meersschaut, Johan; Polspoel, W.; Clima, Sergiu; Pourtois, Geoffrey; Knaepen, W.; Detavernier, C.; Afanasiev, Valeri; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Fischer, P.; Maes, Jan; Manger, D.; Vandervorst, Wilfried; Conard, Thierry; Franquet, Alexis; Favia, Paola; Bender, Hugo; Brijs, Bert; Van Elshocht, Sven; Jurczak, Gosia; Van Houdt, Jan; Wouters, Dirk (2009) -
High-k dielectrics and metal gates for future generation memory devices
Kittl, Jorge; Opsomer, Karl; Popovici, Mihaela Ioana; Menou, Nicolas; Kaczer, Ben; Wang, Xin Peng; Adelmann, Christoph; Pawlak, Malgorzata; Tomida, Kazuyuki; Rothschild, Aude; Govoreanu, Bogdan; Degraeve, Robin; Schaekers, Marc; Zahid, Mohammed; Delabie, Annelies; Meersschaut, Johan; Polspoel, W.; Clima, Sergiu; Pourtois, Geoffrey; Detavernier, C.; Knaepen, W.; Afanasiev, Valeri; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Maes, Jan; Manger, D.; Vandervorst, Wilfried; Conard, Thierry; Franquet, Alexis; Favia, Paola; Bender, Hugo; Brijs, Bert; Van Elshocht, Sven; Jurczak, Gosia; Van Houdt, Jan; Wouters, Dirk (2009) -
High-k dielectrics for future generation memory devices
Kittl, Jorge; Opsomer, Karl; Popovici, Mihaela Ioana; Menou, Nicolas; Kaczer, Ben; Wang, Xin Peng; Adelmann, Christoph; Pawlak, Malgorzata; Tomida, Kazuyuki; Rothschild, Aude; Govoreanu, Bogdan; Degraeve, Robin; Schaekers, Marc; Zahid, Mohammed; Delabie, Annelies; Meersschaut, Johan; Polspoel, Wouter; Clima, Sergiu; Pourtois, Geoffrey; Knaepen, W.; Detavernier, C.; Afanasiev, Valeri; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Fischer, Pamela; Maes, Jan; Manger, Dirk; Vandervorst, Wilfried; Conard, Thierry; Franquet, Alexis; Favia, Paola; Bender, Hugo; Brijs, Bert; Van Elshocht, Sven; Jurczak, Gosia; Van Houdt, Jan; Wouters, Dirk (2009) -
Influence of process parameters on low current resistive switching in MOCVD and ALD NiO Films
Wang, Xin Peng; Wouters, Dirk; Toeller, Michael; Meersschaut, Johan; Goux, Ludovic; Chen, Yangyin; Govoreanu, Bogdan; Pantisano, Luigi; Degraeve, Robin; Jurczak, Gosia; Altimime, Laith; Kittl, Jorge (2011) -
Low VT metal-gate/high-k nMOSFETs - PBTI dependence and VT tune-ability on La/Dy-capping layer locations and laser annealing conditions
Chang, Shou-Zen; Hoffmann, Thomas Y.; Yu, HongYu; Aoulaiche, Marc; Rohr, Erika; Adelmann, Christoph; Kaczer, Ben; Delabie, Annelies; Favia, Paola; Van Elshocht, Sven; Kubicek, Stefan; Schram, Tom; Witters, Thomas; Ragnarsson, Lars-Ake; Wang, Xin Peng; Cho, Hag-Ju; Mueller, Markus; Chiarella, Thomas; Absil, Philippe; Biesemans, Serge (2008) -
Metal-organic chemical vapor deposition of Ti-doped NiO layers for application in resistive switching memories
Meersschaut, Johan; Toeller, Michael; Schaekers, Marc; Wang, Xin Peng; Brijs, Bert; Wouters, Dirk; Jurczak, Gosia; Altimime, Laith; Van Elshocht, Sven; Vancoille, Eric (2010) -
MOCVD of NiO thin films using Ni(dmamb)2
Meersschaut, Johan; Toeller, M.; Schaekers, Marc; Wang, Xin Peng; Goux, Ludovic; Govoreanu, Bogdan; Wouters, Dirk; Jurczak, Gosia; Altimime, Laith; Bender, Hugo; Conard, Thierry; Franquet, Alexis; Brijs, Bert; Van Elshocht, Sven (2010)