Browsing by author "Vereecke, Bart"
Now showing items 1-20 of 37
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2D micro-chamber for DC plasma working at low power
Rochus, Veronique; Samara, Vladimir; Vereecke, Bart; Soussan, Philippe; Onsia, Bart; Rottenberg, Xavier (2014) -
A novel CMOS-compatible, monolithically integrated line-scan hyperspectral imager covering the VIS-NIR range
Gonzalez, Pilar; Tack, Klaas; Geelen, Bert; Masschelein, Bart; Charle, Wouter; Vereecke, Bart; Lambrechts, Andy (2016) -
A CMOS compatible carbon nanotube growth approach
Cott, Daire; Chiodarelli, Nicolo; Vereecken, Philippe; Vereecke, Bart; Van Elshocht, Sven; De Gendt, Stefan (2010) -
A platform for backside illuminated CMOS image sensors for UV and isible applications
Vereecke, Bart; Cavaco, Celso; De Munck, Koen; Haspeslagh, Luc; Minoglou, Kiki; Sabuncuoglu Tezcan, Deniz; Tack, Klaas; Osman, Haris (2014) -
All-wet removal of post-etch photoresist and sidewall residues: Electrical characterization of 90 nm and 30 nm ½ pitch structures
Le, Quoc Toan; Demuynck, Steven; Suhard, Samuel; Klipp, Andreas; Vereecke, Bart; Vereecke, Guy (2010) -
An extremely compact and high-speed line-scan hyperspectral imager covering the SWIR range
Gonzalez, Pilar; Pichette, Julien; Vereecke, Bart; Masschelein, Bart; Krasovitski, Leonid; Bikov, Leonid; Lambrechts, Andy (2018) -
Application of a nano-mechanical sensor to monitor stress in copper damascene interconnects
Wilson, Chris; Croes, Kristof; Tokei, Zsolt; Vereecke, Bart; Beyer, Gerald; O'Neill, A.G.; Horsfall, A.B. (2009) -
Carbon nanotube interconnects: Electrical characterization of 150 nm CNT contacts with Cu damascene top contact
Chiodarelli, Nicolo; van der Veen, Marleen; Vereecke, Bart; Cott, Daire; Groeseneken, Guido; Vereecken, Philippe; Huyghebaert, Cedric; Tokei, Zsolt (2011-05) -
Carbon nanotube interconnects: electrical characterization of CNT contacts with Cu damascene top contact
van der Veen, Marleen; Vereecke, Bart; Huyghebaert, Cedric; Cott, Daire; Masahito, Sugiura; Yusaku, Kashiwagi; Teugels, Lieve; Caluwaerts, Rudy; Beyer, Gerald; Heyns, Marc; Tokei, Zsolt; De Gendt, Stefan (2011) -
Characterization of carbon nanotubes based vertical interconnects
Vereecke, Bart; van der Veen, Marleen; Barbarin, Yohan; Masahito, Sugiura; Kashiwagi, Yusaku; Cott, Daire; Huyghebaert, Cedric; Tokei, Zsolt (2012) -
Demonstration of lithography patterns using reflective e-beam direct write
Freed, Regina; Sun, Jeff; Brodie, Alan D.; Petric, Paul; McCord, Marc A.; Ronse, Kurt; Haspeslagh, Luc; Vereecke, Bart (2011) -
Dielectric reliability of 70 nm pitch air-gap interconnect structures
Pantouvaki, Marianna; Sebaai, Farid; Kellens, Kristof; Goossens, Danny; Vereecke, Bart; Versluijs, Janko; Van Besien, Els; Caluwaerts, Rudy; Marrant, Koen; Bender, Hugo; Moussa, Alain; Struyf, Herbert; Beyer, Gerald (2011) -
Digital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithography
Grella, Luca; Carroll, Alan; Murray, Kirk; McCord, Mark A.; Tong, William M.; Brodie, Alan D.; Gubiotti, Thomas; Sun, Fuge; Kidwingira, Francoise; Kojima, Shinichi; Petric, Paul; Bevis, Christopher F.; Vereecke, Bart; Haspeslagh, Luc; Mane, Anil U.; Elam, Jeffrey W. (2013) -
Electrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallization
van der Veen, Marleen; Vereecke, Bart; Masahito, Sugiura; Kashiwagi, Yusaku; Ke, Xiaoxing; Cott, Daire; Vanpaemel, Johannes; Vereecken, Philippe; De Gendt, Stefan; Huyghebaert, Cedric; Tokei, Zsolt (2012) -
Electrical characterization of CNT contacts with Cu damascene top contact
van der Veen, Marleen; Vereecke, Bart; Huyghebaert, Cedric; Cott, Daire; Masahito, Sugiura; Kashiwagi, Yusaku; Teugels, Lieve; Caluwaerts, Rudy; Chiodarelli, Nicolo; Vereecken, Philippe; Beyer, Gerald; Heyns, Marc; De Gendt, Stefan; Tokei, Zsolt (2013) -
Electrical improvement of CNT contacts with Cu damascene top metallization
van der Veen, Marleen; Barbarin, Yohan; Vereecke, Bart; Masahito, Sugiura; Kashiwagi, Yusaki; Cott, Daire; Huyghebaert, Cedric; Tokei, Zsolt (2013) -
Electromigration and stress-induced-voiding in dual damascene Cu/low-k interconnects: a complex balance between vacancy and stress gradients
Croes, Kristof; Wilson, Chris; Lofrano, Melina; Vereecke, Bart; Beyer, Gerald; Tokei, Zsolt (2010) -
Etch challenges of a spin-on trilayer resist system for narrow pitch dual damascene patterning
Lazzarino, Frederic; Wilson, Chris; Truffert, Vincent; Vereecke, Bart; Demuynck, Steven; de Marneffe, Jean-Francois; Baklanov, Mikhaïl (2012) -
Evaluating k-values for low-k materials after damascene integration: method and results for 90nm half pitch
Vereecke, Bart; Pantouvaki, Marianna; Beyer, Gerald; Tokei, Zsolt (2010) -
Evaluation and screening of different wet cleaning solutions on BEOL applications
Suhard, Samuel; Claes, Martine; Loh, James; Vereecke, Guy; Demuynck, Steven; Vereecke, Bart; Beyer, Gerald (2009)