Browsing by author "Maex, Karen"

A BEEM study of PtSi Schottky contacts on ion-milled Si

Ru, Guo-Ping; Detavernier, C.; Alves Donaton, Ricardo; Blondeel, A.; Clauws, P.; Van Meirhaeghe, R. L.; Cardon, F.; Maex, Karen; Qu, X. P.; Zhu, S. Y.; Li, Bing-Zong (1999)

A CAD-oriented analytical model for frequency-dependent series resistance and inductance of microstrip on-chip interconnect on silicon substrate

Ymeri, Hasan; Nauwelaers, Bart; Maex, Karen; Vandenberghe, S.; De Roest, David (2002)

A chemical role of refractory metal caps in Co silicidation: Evidence of SiO2 reduction by Ti cap

Kondoh, Eiichi; Conard, Thierry; Brijs, Bert; Jin, S.; Bender, Hugo; de Potter de ten Broeck, Muriel; Maex, Karen (1999)

A comparative study of copper drift diffusion in plasma deposited a-SiC : H and Silicon Nitride

Lanckmans, Filip; Gray, William; Brijs, Bert; Maex, Karen (2001)

A comparative study of copper drift diffusion in plasma deposited A-Sic:H and silicon nitride

Lanckmans, Filip; Gray, William; Brijs, Bert; Maex, Karen (2000)

A comparison of spike, flash, SPER and laser annealing for 45nm CMOS

Lindsay, Richard; Pawlak, Bartek; Kittl, Jorge; Henson, Kirklen; Torregiani, Cristina; Giangrandi, Simone; Surdeanu, Radu; Vandervorst, Wilfried; Mayur, A.; Ross, J.; McCoy, S.; Gelpey, J.; Elliott, K.; Pagès, Xavier; Satta, Alessandra; Lauwers, Anne; Stolk, P.; Maex, Karen (2003)

A finite element study of process induced stress in the transistor channel: effects of silicide contact and gate stack

Torregiani, Cristina; Liu, Joy; Vandevelde, Bart; Degryse, Dominiek; Van Dal, Mark; Benedetti, Alessandro; Lauwers, Anne; Maex, Karen (2004)

A grain size limitation inherent to electroplated copper films

Brongersma, Sywert; Richard, Emmanuel; Vervoort, Iwan; Maex, Karen (2000)

A manufacturable process to improve thermal stability of 0.25-µm cobalt silicided poly gate

Wang, Qingfeng; Lauwers, A.; Deweerdt, Bruno; Verbeeck, Rita; Loosen, Fred; Maex, Karen (1995)

A modified capacitance / voltage technique to characterize copper drift diffusion in organic low-K dielectrics

Lanckmans, Filip; Geenen, Luc; Vandervorst, Wilfried; Maex, Karen (2000)

A modified capacitance/voltage technique to characterize copper drift diffusion in organic low-K dielectrics

Lanckmans, Filip; Geenen, Luc; Vandervorst, Wilfried; Maex, Karen (1999)

A new approach for the calculation of line capacitances of two-layer IC interconnects

Ymeri, Hasan; Nauwelaers, Bart; Maex, Karen; De Roest, David (2000)

A new approach for the measurement of resistivity and cross-sectional area of an aluminium interconnect line: principle and applications

Li, Hua; Jin, S.; Proost, Joris; Van Hove, Marleen; Froyen, L.; Maex, Karen (1998)