Browsing by author "Sun, Yiting"
Now showing items 1-17 of 17
-
Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches
Zhang, Liping; de Marneffe, Jean-Francois; Lukaszewicz, Mikolaj; Barry-Porter, Stephen; Vajda, Felim; Sun, Yiting; Heyne, Markus; Baklanov, Mikhaïl; Rutiqlian, Vito (2014) -
Electrical properties of amino SAM layers studied with conductive AFM
Chintala, Ravi Chandra; Eyben, Pierre; Armini, Silvia; Maestre Caro, Arantxa; Loyo Prado, Jana; Sun, Yiting; Vandervorst, Wilfried (2013) -
Electrical properties of APTMS SAM layers studied with conductive atomic force microscope
Chintala, Ravi Chandra; Eyben, Pierre; Vandervorst, Wilfried; Armini, Silvia; Sun, Yiting (2012) -
Impact of plasma pretreatment and pore size on the sealing of ultra low-k dielectrics by self-assembling monolayers
Sun, Yiting; Krishtab, Mikhail; Struyf, Herbert; Verdonck, Patrick; De Feyter, Steven; Baklanov, Mikhaïl; Armini, Silvia (2014) -
Improved plasma resistance for porous low-k dielectrics by pore stuffing approach
Zhang, Liping; de Marneffe, Jean-Francois; Heyne, Markus; Naumov, Sergej; Sun, Yiting; Zotovich, Alexey; El Otell, Ziad; Vaida, Selim; De Gendt, Stefan; Baklanov, Mikhaïl (2015) -
Investigation of sealing efficiency of self-assembled monolayers deposited on porous k=2.0 dielectrics as a function of dielectric surface preparation by plasma
Sun, Yiting; Armini, Silvia; Baklanov, Mikhaïl; De Feyter, Steven (2013) -
Investigation of Self-Assembled Monolayers (SAM) for Advanced Interconnects Schemes
Sun, Yiting (2017-06) -
Optimization and upscaling of spin coating with organosilane monolayers for low-k pore sealing
Sun, Yiting; Romo Negreira, Ainhoa; Meersschaut, Johan; Hoflijk, Ilse; Vaesen, Inge; Conard, Thierry; Struyf, Herbert; Tokei, Zsolt; Boemmels, Juergen; Moinpour, Mansour; De Feyter, Steven; Armini, Silvia (2017) -
Pore sealing of porous ultralow-k dielectrics by self-assembled monolayers combined with atomic layer deposition
Armini, Silvia; Loyo Prado, Jana; Swerts, Johan; Sun, Yiting; Krishtab, Mikhail; Meersschaut, Johan; Blauw, Michiel; Baklanov, Mikhaïl; Verdonck, Patrick (2012) -
Sealing of low-k dielectric (k=2.0) with self-assembled monolayers (SAMs) for the atomic layer deposition (ALD) of TiN
Sun, Yiting; Levrau, Elisabeth; Blauw, Michiel; Meersschaut, Johan; Verdonck, Patrick; Struyf, Herbert; Detavernier, Chrostophe; Baklanov, Mikhaïl; De Feyter, Steven; Armini, Silvia (2013) -
Self-assembled monolayers assisted pore sealing of k 2.0 dielectrics
Armini, Silvia; Sun, Yiting; Loyo Prado, Jana; Baumans, Kim; De Cooman, Johan; Redzheb, Murad; Verdonck, Patrick; Swerts, Johan; Baklanov, Mikhaïl; Struyf, Herbert (2013) -
Self-organized organic/inorganic films functional to next generation metallization schemes
Armini, Silvia; Carnevali, Guido; Sun, Yiting; Zhang, Liping; de Marneffe, Jean-Francois; Zhang, Yu; Baklanov, Mikhaïl; Jourdan, Nicolas; Verdonck, Patrick; Teugels, Lieve; Delande, Tinne; Wen, Liang Gong; Struyf, Herbert; Boemmels, Juergen; Tokei, Zsolt (2014) -
Stuffing-enabled confinement of self-assembled monolayer used as sealing agent on plasma-exposed 2.0 p-OSG films
Sun, Yiting; Levrau, Elisabeth; Zhang, Liping; Geypen, Jef; Franquet, Alexis; Le, Quoc Toan; de Marneffe, Jean-Francois; Bender, Hugo; Struyf, Herbert; Baklanov, Mikhaïl; Detavernier, Christophe; De Feyter, Steven; Armini, Silvia (2014) -
Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG films
Sun, Yiting; Levrau, Elisabeth; Zhang, Liping; Geypen, Jef; Meersschaut, Johan; Franquet, Alexis; Le, Quoc Toan; de Marneffe, Jean-Francois; Bender, Hugo; Struyf, Herbert; Detavernier, Christophe; Baklanov, Mikhaïl; De Feyter, Steven; Armini, Silvia (2015) -
Surface-confined activation of ultra low-k dielectrics in CO2 plasma
Sun, Yiting; Krishtab, Mikhail; Mankelevich, Yuri; Zhang, Liping; De Feyter, Steven; Baklanov, Mikhaïl; Armini, Silvia (2016) -
The effect of Ar/H2 plasma pretreatments on porous k=2.0 dielectrics for pore sealing by self-assembled monolayers deposition
Sun, Yiting; Swerts, Johan; Verdonck, Patrick; Maheshwari, Abhishek; Prado, J.L.; De Feyter, Steven; Armini, Silvia (2013) -
The influence of solvents on the quality of SAMs for low-k pore sealing purpose
Sun, Yiting; de Roover, Roel; Struyf, Herbert; De Feyter, Steven; Armini, Silvia (2016)