Browsing by author "Verdonck, Patrick"
Now showing items 41-60 of 153
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Diffractive optical element applied to proximity exposure lithography exploring partial light coherence
Verdonck, Patrick; Cirino, Giuseppe; Mansano, Ronaldo; Goncalves Neto, Luiz (2010) -
Diffractive phase-shift lithography photomask operating in proximity printing mode
Cirino, Giuseppe; Mansano, Ronaldo; Verdonck, Patrick; Cescato, Lucila; Goncalves Neto, Luiz (2010) -
Digital holography: computer-generated holograms and diffractive optics in scalar diffraction domain
Cirino, Giuseppe; Verdonck, Patrick; Mansano, Ronaldo; Pizolato Jr, Jose; Mazulquim, Daniel; Goncalves Neto, Luiz (2011) -
Direct bonding of low temperature heterogeneous dielectrics
Iacovo, Serena; Peng, Lan; Phommahaxay, Alain; Inoue, Fumihiro; Verdonck, Patrick; Kim, Soon-Wook; Sleeckx, Erik; Miller, Andy; Beyer, Gerald; Beyne, Eric (2019) -
Dry etch solutions for 3D integration technology
Tutunjyan, Nina; Van Cauwenberghe, Marc; Verdonck, Patrick; Majeed, Bivragh; Buisson, Thibault; Civale, Yann; Boullart, Werner (2010) -
Effect of bake/cure temperature of an advanced organic ultra low-k material on the interface adhesion strength to metal barriers
Vanstreels, Kris; Pantouvaki, Marianna; Ferchichi, Abdelkarim; Verdonck, Patrick; Conard, Thierry; Ono, Yukiharu; Matsutani, Mihoko; Nakatani, Koji; Baklanov, Mikhaïl (2011) -
Effect of pore structure of nanometer scale porous films on the measured elastic modulus
Vanstreels, Kris; Wu, Chen; Gonzalez, Mario; Schneider, Dieter; Gidley, David; Verdonck, Patrick; Baklanov, Mikhaïl (2013) -
Effect of porosity on the mechanical and fracture properties of advanced PECVD Ultralow-k SiCOH films
Vanstreels, Kris; Wu, Chen; Gonzalez, Mario; Verdonck, Patrick; Martini, Roberto; Schneider, Dieter; Baklanov, Mikhaïl (2012) -
Effect of pressure on efficiency of UV curing of CVD low-k material at different wavelengths
Prager, Lutz; Naumov, Sergei; Pistol, L.; Wennrich, L.; Buchmeister, M. R.; Marsik, Premysl; Verdonck, Patrick; Baklanov, Mikhaïl (2008) -
Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths
Prager, L.; Marsik, Premysl; Wennrich, L.; Baklanov, Mikhaïl; Naumov, S.; Pistol, L.; Schneider, D.; Gerlach, J.W.; Verdonck, Patrick; Buchmeiser, M.R. (2008) -
Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance
Marsik, Premysl; Urbanowicz, Adam; Verdonck, Patrick; De Roest, David; Sprey, Hessel; Baklanov, Mikhaïl (2011) -
Effect of UV wavelength on the hardening process of porogen-containing and porogen-free ultra-low-k PECVD dielectrics
Urbanowicz, Adam; Vanstreels, Kris; Verdonck, Patrick; Van Besien, Els; Trompoukis, Christos; Shamiryan, Denis; De Gendt, Stefan; Baklanov, Mikhaïl (2011) -
Effect of UV-wavelength on hardening process of porogen-containing and porogen-free ultra-low-k PECVD glasses
Urbanowicz, Adam; Vanstreels, Kris; Verdonck, Patrick; Van Besien, Els; Trompoukis, Christos; Shamiryan, Denis; De Gendt, Stefan; Baklanov, Mikhaïl (2010) -
Effects of He plasma pre-treatment on low-k damage during post Cu surface ceaning with NH3 plasma
Urbanowicz, Adam; Shamiryan, Denis; Zaka, Alban; Verdonck, Patrick; De Gendt, Stefan; Baklanov, Mikhaïl (2010) -
Electrical comparison of iN7 EUV hybrid and EUV single patterning BEOL metal layers
Lariviere, Stephane; Wilson, Chris; Kutrzeba Kotowska, Bogumila; Versluijs, Janko; Decoster, Stefan; Mao, Ming; van der Veen, Marleen; Jourdan, Nicolas; El-Mekki, Zaid; Heylen, Nancy; Kesters, Els; Verdonck, Patrick; Beral, Christophe; Van Den Heuvel, Dieter; De Bisschop, Peter; Bekaert, Joost; Blanco, Victor; Ciofi, Ivan; Wan, Danny; Briggs, Basoene; Mallik, Arindam; Hendrickx, Eric; Kim, Ryan Ryoung han; McIntyre, Greg; Ronse, Kurt; Boemmels, Juergen; Tokei, Zsolt; Mocuta, Dan (2018) -
Engineering of chemical and physical properties of low-k materials by different wavelength of UV light
Baklanov, Mikhaïl; Marsik, Premysl; Verdonck, Patrick; Ferchichi, Abdelkarim; Urbanowicz, Adam; Prager, L.; De Roest, D.; Mechri, C. (2008) -
Enhanced growth and Cu diffusion barrier properties of thermal ALD TaNC films
Wojcik, Henry; Hossbach, Christoph; Kubasch, Christoph; Verdonck, Patrick; Barbarin, Yohan; Merkel, Ulrich; Bartha, Johann; Hubner, Rene; Engelmann, Hans-Jurgen; Friedemann, Michael (2013) -
Evaluation of a new advanced low-k material
Smirnov, Evgeny; Vanstreels, Kris; Verdonck, Patrick; Ciofi, Ivan; Shamiryan, Denis; Baklanov, Mikhaïl; Phillips, Mark (2011) -
Evaluation of barrier integrity on ultra low-k films with different porosities
Wang, Cong; Van Besien, Els; Baklanov, Mikhaïl; Verdonck, Patrick (2013) -
Extreme scaling of low-k dielectric for sub 45 nm BEOL roadmaps
Verdonck, Patrick (2009)