Browsing imec Publications by imec author "5d18d0b8555376d05523aa0bd338318b7c6556c2"
Now showing items 1-20 of 27
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A feasibility study of dual damascene porous SiLK resin with spin-on hard masks
Hoofman, Romano; Michelon, Julien; Verheijden, G.J.A.M.; Waeterloos, Joost; Caluwaerts, Rudy; Schmidt, M.O.; Demeurisse, Caroline; Vandeweyer, Tom; Demuynck, Steven; Tokei, Zsolt; Beyer, Gerald (2004) -
Barrier process development for damascene integration of porous SiLK resin films
Tokei, Zsolt; Waeterloos, Joost; Iacopi, Francesca; Caluwaerts, Rudy; Struyf, Herbert; Van Aelst, Joke; Maex, Karen (2002) -
Carbon nanotube interconnects: electrical characterization of CNT contacts with Cu damascene top contact
van der Veen, Marleen; Vereecke, Bart; Huyghebaert, Cedric; Cott, Daire; Masahito, Sugiura; Yusaku, Kashiwagi; Teugels, Lieve; Caluwaerts, Rudy; Beyer, Gerald; Heyns, Marc; Tokei, Zsolt; De Gendt, Stefan (2011) -
Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time
Verdonck, Patrick; De Roest, David; Kaneko, Shinya; Caluwaerts, Rudy; Tsuji, Naoto; Matsushita, Kiyohiro; Kemeling, Nathan; Travaly, Youssef; Sprey, Hessel; Schaekers, Marc; Beyer, Gerald (2007) -
Damascene integration feasability of porous SiLK resin films
Waeterloos, Joost; Struyf, Herbert; Van Aelst, Joke; Das, Arabinda; Caluwaerts, Rudy; Alaerts, Carine; Boullart, Werner; Tokei, Zsolt; Van Hove, Marleen; Maex, Karen (2002) -
Development of a SEM based methodology for the detection of sub-surface voids in nano-interconnects
Carbonell, Laure; Caluwaerts, Rudy; Heylen, Nancy; Volders, Henny; Kellens, Kristof; Tokei, Zsolt; Takada, S; Ban, N; Ishimoto, T; Suzuki, N.; Umehara, S. (2012) -
Dielectric reliability of 70 nm pitch air-gap interconnect structures
Pantouvaki, Marianna; Sebaai, Farid; Kellens, Kristof; Goossens, Danny; Vereecke, Bart; Versluijs, Janko; Van Besien, Els; Caluwaerts, Rudy; Marrant, Koen; Bender, Hugo; Moussa, Alain; Struyf, Herbert; Beyer, Gerald (2011) -
Dry oxidation mechanisms of copper in trenches
Carbonell, Laure; Ratchev, Petar; Caluwaerts, Rudy; Van Hove, Marleen; Verlinden, B.; Maex, Karen (2002) -
Electrical characterization of CNT contacts with Cu damascene top contact
van der Veen, Marleen; Vereecke, Bart; Huyghebaert, Cedric; Cott, Daire; Masahito, Sugiura; Kashiwagi, Yusaku; Teugels, Lieve; Caluwaerts, Rudy; Chiodarelli, Nicolo; Vereecken, Philippe; Beyer, Gerald; Heyns, Marc; De Gendt, Stefan; Tokei, Zsolt (2013) -
Evaluation of gas cluster ion beam processing for sealing af a porous dielectric
Brongersma, Sywert; Sherman, S.; Tabat, M.; Patz, Michael; Beyer, Gerald; Travaly, Youssef; Le, Quoc Toan; Caluwaerts, Rudy; Hautala, J. (2005-01) -
Evaluation of wet Cu seed deposition to enable downscaling damascene metallization
Armini, Silvia; Li, Muyang; Swerts, Johan; Siew, Yong Kong; Caluwaerts, Rudy; Meersschaut, Johan; Franquet, Alexis; Moussa, Alain; Leunissen, Peter (2012) -
High sputter bias super secondary grain initiation (in structures)
Vanstreels, Kris; Brongersma, Sywert; D'Haen, Jan; Demuynck, Steven; De Ceuninck, Ward; Caluwaerts, Rudy; D'Olieslaeger, Marc (2007) -
Implementation of Ru based barriers in 50 nm half pitch single damascene Cu/SiCOH (k=2.5) structures
Carbonell, Laure; Volders, Henny; Heylen, Nancy; Kellens, Kristof; Tokei, Zsolt; Hendrickx, Dirk; Struyf, Herbert; Claes, Martine; Versluijs, Janko; Van Besien, Els; Caluwaerts, Rudy; Cockburn, Andrew; Gravey, Virginie; Shah, Kavita; Al-Bayati, Amir; Fu, X.; Lubben, D.; Sundarrajan, A.; Beyer, Gerald (2009) -
Implementation of Ru based barriers in 50 nm half pitch single damascene Cu/SiCOH (k=2.5) structures
Carbonell, Laure; Volders, Henny; Heylen, Nancy; Kellens, Kristof; Tokei, Zsolt; Hendrickx, Dirk; Struyf, Herbert; Vandervorst, Alain; Claes, Martine; Lux, Marcel; Versluijs, Janko; Alaerts, Wilfried; Van Besien, Els; Deweerdt, Bruno; Vaes, Jan; Caluwaerts, Rudy; Cockburn, Andrew; Gravey, Virginie; Shah, Kavita; Al-Bayati, A.; Fu, X.; Lubben, D.; Sundarrajan, A.; Beyer, Gerald (2008) -
Integration feasibility of porous SiLK semiconductor dielectric
Waeterloos, Joost; Struyf, Herbert; Van Aelst, Joke; Castillo, D. W.; Lucero, S.; Caluwaerts, Rudy; Alaerts, Carine; Mannaert, Geert; Boullart, Werner; Sleeckx, Erik; Schaekers, Marc; Tokei, Zsolt; Vervoort, Iwan; Steenbergen, Johnny; Sijmus, Bram; Vos, I.; Meuris, Marc; Iacopi, Francesca; Donaton, R (2001) -
Integration of a low permittivity spin-on embedded hardmask for Cu/SiLK resin dual damascene
Waeterloos, Joost; Shaffer, E. O.; Stokich, T.; Hetzner, J.; Price, D.; Booms, L.; Donaton, R. A.; Beyer, Gerald; Coenegrachts, Bart; Caluwaerts, Rudy; Struyf, Herbert; Tokei, Zsolt; Vervoort, Iwan; Sjjmus, B.; Vos, I.; Maex, Karen; Komiya, Takayuki; Iwashita, J. M. (2001) -
Materials characterization of WNxCy, WNx and WCx films for advanced barriers
Volders, Henny; Tokei, Zsolt; Bender, Hugo; Brijs, Bert; Caluwaerts, Rudy; Carbonell, Laure; Conard, Thierry; Drijbooms, Chris; Franquet, Alexis; Garaud, Sylvain; Hoflijk, Ilse; Li, Wei-Min; Moussa, Alain; Sinapi, Fabrice; Sprey, Hessel; Travaly, Youssef; Vanhaeren, Danielle; Vereecke, Guy (2007) -
Metallization of sub- 30 nm Interconnects: Comparison of different liner/seed combinations
Carbonell, Laure; Volders, Henny; Heylen, Nancy; Kellens, Kristof; Caluwaerts, Rudy; Devriendt, Katia; Altamirano Sanchez, Efrain; Wouters, Johan M. D.; Gravey, Virginie; Shah, Kavita; Luo, Qian; Sundarrajan, Arvind; Lu, Jiang; Aubuchon, Joseph; Ma, Paul; Narasimhan, Murali; Cockburn, Andrew; Tokei, Zsolt; Beyer, Gerald (2009) -
Metallization options for sub- 30 nm interconnects: comparison of Cu and W metallizations
Carbonell, Laure; Caluwaerts, Rudy; Volders, Henny; Heylen, Nancy; Kellens, Kristof; Mertens, Sofie; Van Ammel, Annemie; Van Roey, Frieda; Cockburn, Andrew; Gravey, Virgine; Shah, Kavita; Rajagopalan, Ravi; Tokei, Zsolt; Beyer, Gerald (2010) -
Microwave Properties of Ba-Substituted Pb(Zr0.52Ti0.48)O3 after Chemical Mechanical Polishing
Luciano, Federica; Teugels, Lieve; McMitchell, Sean; Talmelli, Giacomo; Guerenneur, Anais; Stheins, Renzo; Caluwaerts, Rudy; Conard, Thierry; Vaesen, Inge; Sergeant, Stefanie; Van Dorpe, Pol; De Gendt, Stefan; Dekkers, Matthijn; Swerts, Johan; Ciubotaru, Florin; Adelmann, Christoph (2023)