Authors

Arimura, Hiroaki; Ragnarsson, Lars-Ake; Schram, Tom; Albert, Johan; Kaczer, Ben; Degraeve, Robin; Bury, Erik; Aoulaiche, Marc; Kauerauf, Thomas; Thean, Aaron; Horiguchi, Naoto; Groeseneken, Guido

Conference

International Reliability Physics Symposium - IRPS

Title

Guidelines for reducing NBTI based on its correlation with effective work function studied by CV-BTI on high-k first MOS capacitors with slant etched SiO2

Publication type

Proceedings paper

Embargo date

9999-12-31