Browsing Conference contributions by imec author "13dcefe5013b4ca8662463b7feca3642af9ed6c9"
Now showing items 21-40 of 104
-
Assessing the performance of two-dimensional dopant profiling techniques
Duhayon, Natasja; Eyben, Pierre; Fouchier, Marc; Clarysse, Trudo; Vandervorst, Wilfried; Alvarez, David; Schoemann, S.; Ciappa, M.; Stangoni, M.; Fichtner, W.; Formanek, P.; Raineri, V.; Giannazzo, F.; Goghero, D.; Rosenwaks, Y.; Shikler, R.; Saraf, S.; Sadewasser, S.; Barreau, N.; Glatzel, T.; Verheijen, M.; Mentink, S.A.M.; von Sprekelsen, M.; Maltezopoulos, T.; Wiesendanger, R.; Hellemans, L. (2003) -
Assessing the resolution limits of scanning spreading resistance microscopy and scanning capacitance microscopy
Eyben, Pierre; Duhayon, Natasja; Alvarez, David; Vandervorst, Wilfried (2003) -
Assessing the resolution limits of scanning spreading resistance microscopy and scanning capacitance microscopy
Eyben, Pierre; Duhayon, Natasja; Alvarez, David; Vandervorst, Wilfried (2003) -
Bias-induced junction displacements in SSRM and SCM
Eyben, Pierre; Duhayon, Natasja; Clarysse, Trudo; Vandervorst, Wilfried (2001) -
Calibrated boron doped tip fabrication
Hantschel, Thomas; Zimmer, Jerry; Schulze, Andreas; Eyben, Pierre; Tsigkourakos, Menelaos; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried (2011) -
Carrier profiling of a cross-sectioned silicon nanowire by scanning spreading resistance microscopy
Hantschel, Thomas; Schulz, Volker; Zschaetzsch, Gerd; Eyben, Pierre; Verhulst, Anne; Schmidt, Volker; Vereecken, Philippe; Van den Bosch, Geert; Vandervorst, Wilfried (2007) -
Carrier spilling revisited: the on-bevel junction behavior of different electrical depth profiling techniques
Clarysse, Trudo; Eyben, Pierre; Duhayon, Natasja; Xu, Mingwei; Vandervorst, Wilfried (2001) -
Characterization and otimalization of 65nm CMOS technology using scanning spreading resistance microscopy
Eyben, Pierre; De Keersgieter, An; Chramtsov, I.; Fouchier, M.; Janssens, Tom; Vandervorst, Wilfried (2005) -
Characterization of InP growth in nm-sized trenches by a combination of NC-AFM and STM
Mannarino, Manuel; Eyben, Pierre; Chintala, Ravi Chandra; Merckling, Clement; van Dorp, Dennis; Vandervorst, Wilfried (2014) -
Characterizing the two-dimensional doping concentration inside silicon-nanowires using scanning spreading resistance microscopy
Hantschel, Thomas; Schulz, Volker; Schulze, Andreas; Angeletti, Esteban; Guder, Firat; Schmidt, Volker; Senz, Stephan; Eyben, Pierre; Vandervorst, Wilfried (2009) -
Combining TCAD and advanced metrology techniques to support device integration towards N3
Eyben, Pierre; De Keersgieter, An; Celano, Umberto; Wouters, Lennaert; Chiarella, Thomas; Ritzenthaler, Romain; Mertens, Hans; Richard, Olivier; Paredis, Kristof; Matagne, Philippe; Mitard, Jerome; Horiguchi, Naoto; Goux, Ludovic (2021) -
Comparison of Electrical Performance of Co-Integrated Forksheets and Nanosheets Transistors for the 2nm Technological Node and Beyond
Ritzenthaler, Romain; Mertens, Hans; Eneman, Geert; Simoen, Eddy; Bury, Erik; Eyben, Pierre; Bufler, Fabian; Oniki, Yusuke; Briggs, Basoene; Chan, BT; Hikavyy, Andriy; Mannaert, Geert; Parvais, Bertrand; Vaisman Chasin, Adrian; Mitard, Jerome; Dentoni Litta, Eugenio; Samavedam, Sri; Horiguchi, Naoto (2021) -
Conformal doping of FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Eyben, Pierre; Mody, Jay; Jurczak, Gosia; Nguyen, Duy; Takeuchi, Shotaro; Leys, Frederik; Loo, Roger; Caymax, Matty; Everaert, Jean-Luc (2008) -
Conformal doping of FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas; Eyben, Pierre; Mody, Jay; Zschaetzsch, Gerd; Koelling, Sebastian; Gilbert, Matthieu; Poon, T.; del Agua Borniquel, Jose Ignacio; Foad, M.; Duffy, Ray; Pawlak, Bartek (2008) -
Conformal doping of FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Eyben, Pierre; Jurczak, Gosia; Pawlak, Bartek; Duffy, Ray (2008) -
Conformal ultra shallow junctions by vapor phase doping with boron
Nguyen, Duy; Leys, Frederik; Takeuchi, Shotaro; Loo, Roger; Caymax, Matty; Eyben, Pierre; Vandervorst, Wilfried (2008-05) -
Development and evaluation of the Fast Fourier Transform-SSRM technique
Eyben, Pierre; Bisiaux, Pierre; Vandervorst, Wilfried (2014) -
Development and optimization of scanning spreading resistance microscopy for measuring the two-dimensional carrier profile in solar cell structures
Eyben, Pierre; Seidel, Felix; Hantschel, Thomas; Schulze, Andreas; Lorenz, Anne; Uruena De Castro, Angel; Van Gestel, Dries; John, Joachim; Horzel, Joerg; Vandervorst, Wilfried (2010) -
Diamond nanoprobes for electrical probing of nanoelectronics device structures
Hantschel, Thomas; Clarysse, Trudo; Nuytten, Thomas; Paredis, Kristof; Eyben, Pierre; Vandervorst, Wilfried (2013) -
Diamond tips for electrical AFM measurements with sub-nanometer resolution
Hantschel, Thomas; Tsigkourakos, Menelaos; Paredis, Kristof; Eyben, Pierre; Nuytten, Thomas; Schulze, Andreas; Vandervorst, Wilfried (2014)