Browsing Conference contributions by imec author "80dd9ecda1d431bdcee1f3de547708cb6771c818"
Now showing items 21-40 of 49
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Mass metrology for controlling and understanding processes
Vecchio, Emma; Kunnen, Eddy; Redolfi, Augusto; Everaert, Jean-Luc; Delabie, Annelies; Shi, Xiaoping; Vanhaelemeersch, Serge; Cunnane, Liam; Kiermasz, Adrian (2007) -
MOCVD-SBT thin films for advanced FeRAM: deposition and film formation processes
Wouters, Dirk; Everaert, Jean-Luc; Schwitters, Michael; Johnson, Jo; Vander Meeren, Hans; Monchoix, H.; Mitaut, C.; Van Autryve, L.; Caputa, C.; Zambrano, R. (2003) -
Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistance
Everaert, Jean-Luc; Rosseel, Erik; Meszaros, A.; Kis-Szabo, K.; Tutto, P.; Pap, A.; Pavelka, T.; Wilson, M.; Findlay, A.; Jastrzebski, L.; Lagowski, J. (2010) -
Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistance
Everaert, Jean-Luc; Rosseel, Erik; Meszaros, Albert; Kis-Szabo, Krisztian; Tutto, P; Pap, Aron; Pavelka, Tibor; Wilson, Marshall; Findlay, Andrew; Edelman, P.; Lagowski, Jacek (2010) -
Optimized ultra-low thermal budget process flow for advanced high-K / metal gate first CMOS using laser-annealing technology
Ortolland, Claude; Ragnarsson, Lars-Ake; Favia, Paola; Richard, Olivier; Kerner, Christoph; Chiarella, Thomas; Rosseel, Erik; Okuno, Yasutoshi; Akheyar, Amal; Tseng, Joshua; Everaert, Jean-Luc; Schram, Tom; Kubicek, Stefan; Aoulaiche, Marc; Cho, Moon Ju; Absil, Philippe; Biesemans, Serge; Hoffmann, Thomas Y. (2009) -
Oxygen barrier for stacked SBT-FeCAP on W-plug
Lisoni, Judit; Maes, David; Everaert, Jean-Luc; Johnson, Jo; Paraschiv, Vasile; Haspeslagh, Luc; Wouters, Dirk; Casella, Patrizia; Corvasce, C.; Zambrano, R.; Monchoix, H.; Van Autryve, L. (2002) -
Performance enhancement of PFET planar devices by plasma immersion ion implantation (P3i)
Ortolland, Claude; Horiguchi, Naoto; Kerner, Christoph; Chiarella, Thomas; Eyben, Pierre; Everaert, Jean-Luc; Agua Borniquel, Jose; Poon, Tse; Santhanam, Kartik; Porshnev, Peter; Foad, Majeed; Schreutelkamp, Robert; Absil, Philippe; Vandervorst, Wilfried; Felch, Susan; Hoffmann, Thomas Y. (2008) -
Plasma doping control by mass metrology
Everaert, Jean-Luc; Zschaetzsch, Gerd; Vecchio, Emma; Vandervorst, Wilfried; Cunnane, Liam (2008) -
Plasma nitrided silicon rich oxide as an extension to ultra-thin nitrided oxide gate dielectrics
Cubaynes, Florence; Venezia, V.; Everaert, Jean-Luc; Shi, Xiaoping; Rothschild, Aude; Schaekers, Marc (2004) -
Probing doping conformality in FINFET structures using resistors
Vandervorst, Wilfried; Jurczak, Gosia; Everaert, Jean-Luc; Pawlak, Bartek; del Agua Borniquel, Jose Ignacio (2007) -
Process options to enable (Sub-)1e-9 Ohm.cm2 contact resistivity on Si devices
Yu, Hao; Schaekers, Marc; Demuynck, Steven; Rosseel, Erik; Everaert, Jean-Luc; Chew, Soon Aik; Peter, Antony; Kubicek, Stefan; Barla, Kathy; Mocuta, Anda; Horiguchi, Naoto; Collaert, Nadine; Thean, Aaron; De Meyer, Kristin (2016) -
Review of silicon nanowire oxidation
Shi, Xiaoping; Kurstjens, Rufi; Vos, Ingrid; Everaert, Jean-Luc; Schaekers, Marc (2011) -
Scaling down of MOCVD HfSiON to 1nm EOT
Shi, Xiaoping; Rothschild, Aude; Everaert, Jean-Luc; Van Elshocht, Sven; Date, Lucien; Schreutelkamp, Rob; Schaekers, Marc (2007-10) -
Scaling down of MOCVD HfSiON to 1nm EOT
Shi, Xiaoping; Rothschild, Aude; Everaert, Jean-Luc; Van Elshocht, Sven; Date, Lucien; Schaekers, Marc (2007) -
Selective epitaxial p-SiGe source-drain contacts: low contact resistivity (1.5x10-9 ohm.cm2) by optimizing strain and doping concentration
Porret, Clément; Huang, Yan-Hua; Rengo, Gianluca; Yu, Hao; Schaekers, Marc; Everaert, Jean-Luc; Heyns, Marc; Vohra, Anurag; Hikavyy, Andriy; Rosseel, Erik; Langer, Robert; Loo, Roger (2019) -
Selective wet removal of the SiN contact etch stop layer prior to S/D contact formation
Pacco, Antoine; Holsteyns, Frank; Schaekers, Marc; Everaert, Jean-Luc; Dictus, Dries; Cuypers, Daniel (2018) -
Self-aligned-quadruple-patterning for N7/N5 silicon fins
Altamirano Sanchez, Efrain; Tao, Zheng; Gunay Demirkol, Anil; Lorusso, Gian; Hopf, Toby; Everaert, Jean-Luc; Sobieski, Daniel; Ou, Fung Suong; Hellin, David; Clark, William (2016) -
Si photonic device uniformity improvement using wafer-scale location specific processing
Selvaraja, Shankar; Fernandez, Luis; Vanslembrouck, Michael; Everaert, Jean-Luc; Dumon, Pieter; Van Campenhout, Joris; Bogaerts, Wim; Absil, Philippe (2012) -
SiON gate dielectric formation by rapid thermal oxidation of nitrided Si
Everaert, Jean-Luc; Conard, Thierry; Schaekers, Marc (2005) -
Sub-10-9 Ohm.cm2 contact resistivity on p-SiGe achieved by Ga doping and nanosecond laser activation
Everaert, Jean-Luc; Schaekers, Marc; Yu, Hao; Wang, Linlin; Hikavyy, Andriy; Date, Lucien; del Agua Borniquel, Jose Ignacio; Hollar, Kelly; Khaja, Fareen; Aderhold, Wolfgang; Mayur, Abhilash; Lee, JaeYoung; van Meer, Hans; Jiang, Yu-Long; De Meyer, Kristin; Mocuta, Dan; Horiguchi, Naoto (2017)