Browsing Conference contributions by author "Wada, Masayuki"
Now showing items 1-18 of 18
-
Acoustic cleaning in nano-electronics
Mertens, Paul; Janssens, Tom; Holsteyns, Frank; Zijlstra, Aaldert; Halder, Sandip; Wostyn, Kurt; Andreas, Michael; Hoyer, Ronald; Barbagini, Francesca; Wada, Masayuki; Franklin, Cole; Kim, Tae-Gon; Kim, K; Kenis, Karine; Le, Quoc Toan; Claes, Martine; Kesters, Els; Vos, Rita; Vereecke, Guy; Bearda, Twan; Heyns, Marc (2008) -
Application of single-wafer wet cleaning prior to epitaxial SiGe process
Sano, K.; Wada, Masayuki; Leys, Frederik; Loo, Roger; Mertens, Paul W.; Snow, James; Izumi, Akira; Miya, Katsuhiko; Eitoku, Atsuro (2008) -
Cleaning and strip requirements for metal gate based CMOS integration
Schram, Tom; Sebaai, Farid; Claes, Martine; Vos, Rita; Wada, Masayuki; Albert, Johan; Rohr, Erika; Kubicek, Stefan (2009) -
Damage cluster analysis of patterned wafers during solvent spray cleaning
Halder, Sandip; Wostyn, Kurt; Andreas, Michael; Wada, Masayuki; Brems, Steven; Bearda, Twan; Pacco, Antoine; Kenis, Karine; Vos, Rita; Mertens, Paul (2009) -
Damage cluster analysis of patterned wafers during solvent spray cleaning
Halder, Sandip; Wostyn, Kurt; Andreas, Michael; Wada, Masayuki; Brems, Steven; Bearda, Twan; Pacco, Antoine; Kenis, Karine; Mertens, Paul; Vos, Rita (2009) -
Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis
Pacco, Antoine; Bearda, Twan; Mertens, Paul; Wada, Masayuki (2008) -
Effect of chemical growth air filter for wafer storage before epitaxial growth
Wada, Masayuki; Sano, Tomohiro; Leys, Frederik; Dilliway, G.; Loo, Roger; Mertens, Paul; Snow, j.; Izumi, A.; Eitoku, A. (2008) -
Lossless solvent-based extension implant strip
Vos, Rita; Mannaert, Geert; Halder, Sandip; Wada, Masayuki; Sonnemans, Roger; Tsvetanova, Diana; Valckx, Nick; Vanstreels, Kris; Conard, Thierry; Mertens, Paul (2009) -
Lossless solvent-based extension implant strip
Vos, Rita; Mannaert, Geert; Halder, Sandip; Wada, Masayuki; Sonnemans, Roger; Tsvetanova, Diana; Valckx, Nick; Vanstreels, Kris; Conard, Thierry; Mertens, Paul (2009) -
Low temperature pre-epi treatment: critical parameters to control interface contamination
Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; Sano, Ken-Ichi; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty (2008) -
Low temperature pre-epi treatment: critical parameters to control interface contamination
Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty (2008) -
Multiple-Vt FinFET devices through La2O3 dielectric capping
Witters, Liesbeth; Veloso, Anabela; Ferain, Isabelle; Demand, Marc; Collaert, Nadine; Son, Nak Jin; Adelmann, Christoph; Meersschaut, Johan; Vos, Rita; Rohr, Erika; Wada, Masayuki; Schram, Tom; Kubicek, Stefan; De Meyer, Kristin; Biesemans, Serge; Jurczak, Gosia (2008) -
New wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric loss
Wada, Masayuki; Vos, Rita; Claes, Martine; Schram, Tom; Snow, J.; Mertens, Paul; Eitoku, A. (2009) -
New wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric loss
Wada, Masayuki; Vos, Rita; Claes, Martine; Schram, Tom; Snow, J.; Mertens, Paul; Eitoku, Atsuro (2009) -
Particle removal and damage thresholds from particle removal and damage formation frequency for high-velocity-aerosol cleaning
Wostyn, Kurt; Wada, Masayuki; Andreas, M.; Kenis, Karine; Roussel, Philippe; Bearda, Twan; Leunissen, Peter; Mertens, Paul (2009) -
Single-metal dual-dielectric (SMDD) gate-first CMOS integration towards low VT and high performance
Ragnarsson, Lars-Ake; Schram, Tom; Rohr, Erika; Sebaai, Farid; Kelkar, Prasad; Wada, Masayuki; Kauerauf, Thomas; Aoulaiche, Marc; Cho, Moon Ju; Kubicek, Stefan; Lauwers, Anne; Hoffmann, Thomas Y.; Absil, Philippe; Biesemans, Serge (2009) -
Uniformity of particle removal by aerosol spray
Xu, XiuMei; Pacco, Antoine; Wada, Masayuki; Leunissen, Peter; Struyf, Herbert; Mertens, Paul (2010) -
Using the background signal of a light scattering tool for I/I photo resist strip optimization and monitoring
Halder, Sandip; Vos, Rita; Wada, Masayuki; Claes, Martine; Kenis, Karine; Mertens, Paul; Dighe, Prasanna; Radovanovic, Sanda; Simpson, Gavin; Sonnemans, Roger (2010)