Browsing Conference contributions by imec author "c51910f96307207d647c473ae9f979b7392713e4"
Now showing items 1-18 of 18
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3D stacking cobalt and nickel microbumps and kinetics of corresponding IMCs at low temperatures
De Preter, Inge; Derakhshandeh, Jaber; Nagano, Fuya; Houshmand Sharifi, Shamin; Hou, Lin; Bex, Pieter; Suhard, Samuel; Shibata, Toshiaki; Yukinori, Oda; Hashimoto, Shigeo; Lieten, Ruben; Rebibis, Kenneth June; Miller, Andy; Beyer, Gerald; Beyne, Eric (2017) -
An initial exploration of GaN growth on Ge-(111) substrate
Zhang, Y.; McAleese, C.; Xiu, H.; Humphreys, C.J.; Lieten, Ruben; Degroote, Stefan; Borghs, Gustaaf (2008) -
CVD based selective Co deposition on Cu and W for via pre-fill
Chen, Phil; Zheng, Jun-Fei; Lieten, Ruben; Frye, Asa; Baum, Thomas; O'Neill, James; van der Veen, Marleen; Murdoch, Gayle; Boemmels, Juergen; Tokei, Zsolt; Xu, Jeff; Zhu, John; Bao, Jerry; Badaroglu, Mustafa; Yeap, Geoffrey (2016) -
Enhanced photoelectrochemical activity of GaN by dry etching into nanopillar array
Tseng, Peter; Mehta, Bharat; van Dorp, Dennis; Lieten, Ruben; Vereecken, Philippe; Borghs, Gustaaf (2013) -
Enhanced photoelectrochemical activity of GaN by dry etching into nanopillar array
Tseng, Peter; Mehta, Bharat; van Dorp, Dennis; Lieten, Ruben; Vereecken, Philippe; Borghs, Gustaaf (2013) -
Evaluation of post etch residue cleaning solutions for the removal of TiN hardmask after dry etch of low-k dielectric materials on 45 nm pitch interconnects
Payne, Makonnen; Lippy, Steve; Lieten, Ruben; Kesters, Els; Le, Quoc Toan; Murdoch, Gayle; Vega Gonzalez, Victor; Holsteyns, Frank (2016) -
Indium rich III-nitrides on Germanium by molecular beam epitaxy
Lieten, Ruben; Tseng, Peter; Leys, Maarten; Locquet, Jean-Pierre; Dekoster, Johan (2011) -
Mechanistic and electrochemical aspects of copper and cobalt post CMP cleaners for 5-7 nm nodes
White, Mike; White, Daniela; Wang, Volley; Liu, Jun; Thomas, Elisabeth; Frye, Don; Lieten, Ruben; Parson, Thomas (2017) -
Post-CMP cleaners for tungsten advanced nodes: 10 nm and 7 nm
Lieten, Ruben; White, Daniela; Parson, Thomas; Jenq, Shining; Frye, Don; White, Michael; Teugels, Lieve; Struyf, Herbert (2017-10) -
Post-CMP cleaners for tungsten at advanced nodes
Lieten, Ruben; White, Daniela; Parson, Thomas; Jenq, Shining; Frye, Don; White, Michael; Teugels, Lieve; Struyf, Herbert (2016) -
Single crystalline GeSn on silicon by solid phase crystallization
Lieten, Ruben; Decoster, Stefan; Menghini, Mariela; Seo, J.W.; Vantomme, Andre; Locquet, Jean-Pierre (2012) -
Solid phase epitaxy of amorphous Ge films deposited by PECVD
Ma, Quanbao; Lieten, Ruben; Degroote, Stefan; Leys, Maarten; Germain, Marianne; Borghs, Gustaaf (2010) -
Solid phase epitaxy of Germanium on Silicon substrates
Lieten, Ruben; Ma, Quanbao; Guzman, Julian; Ager, J.W.; Haller, E.E.; Locquet, Jean-Pierre (2011) -
Solid phase epitaxy of GeSn alloys on silicon and integration in MOSFET devices
Lieten, Ruben; Maeda, Tatsuro; Seo, Jin Won; Jevasuwan, Wipakorn; Hattori, Hiroyuki; Uchida, Noriyuki; Miura, Shu; Tanaka, Masatoshi; Fleischmann, Claudia; Vantomme, Andre; Johnson, Brett; Locquet, Jean-Pierre (2014) -
Strain relaxation and distribution in GaN nanopillars using in-plane X-ray diffraction
Tseng, Peter; Dillemans, Leander; Gonzalez, Mario; Cheng, Kai; Borghs, Gustaaf; Lieten, Ruben (2012) -
Strained germanium gate-all-around PMOS device demonstration using selective wire release etch prior to replacement metal gate deposition
Witters, Liesbeth; Sebaai, Farid; Hikavyy, Andriy; Milenin, Alexey; Loo, Roger; De Keersgieter, An; Eneman, Geert; Schram, Tom; Wostyn, Kurt; Devriendt, Katia; Schulze, Andreas; Lieten, Ruben; Bilodeau, S; Cooper, E; Storck, Peter; Vrancken, Christa; Arimura, Hiroaki; Favia, Paola; Vancoille, Eric; Mitard, Jerome; Langer, Robert; Opdebeeck, Ann; Holsteyns, Frank; Waldron, Niamh; Barla, Kathy; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine (2017-06) -
Tensile strained GeSn on Si by solid phase epitaxy and fabrication of high mobility FET devices
Lieten, Ruben; Maeda, Tatsuro; Jevasuwan, Wipakorn; Hattori, Hiroyuki; Uchida, Noriyuki; Miura, Shu; Tanaka, Masatoshi; Seo, Jin Won; Locquet, Jean-Pierre (2013) -
Wet selective SiGe etch to enable Ge nanowire formation.
Sebaai, Farid; Witters, Liesbeth; Holsteyns, Frank; Wostyn, Kurt; Rip, Jens; Yukifumi, Yoshida; Lieten, Ruben; Bilodeau, Steven; Cooper, Emanuel (2016)