Browsing Conference contributions by imec author "e576afbf43add4095143c6322cedb3ccde8f2762"
Now showing items 1-20 of 272
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A BEEM study of PtSi Schottky contacts on ion-milled Si
Ru, Guo-Ping; Detavernier, C.; Alves Donaton, Ricardo; Blondeel, A.; Clauws, P.; Van Meirhaeghe, R. L.; Cardon, F.; Maex, Karen; Qu, X. P.; Zhu, S. Y.; Li, Bing-Zong (1999) -
A comparison of spike, flash, SPER and laser annealing for 45nm CMOS
Lindsay, Richard; Pawlak, Bartek; Kittl, Jorge; Henson, Kirklen; Torregiani, Cristina; Giangrandi, Simone; Surdeanu, Radu; Vandervorst, Wilfried; Mayur, A.; Ross, J.; McCoy, S.; Gelpey, J.; Elliott, K.; Pagès, Xavier; Satta, Alessandra; Lauwers, Anne; Stolk, P.; Maex, Karen (2003) -
A finite element study of process induced stress in the transistor channel: effects of silicide contact and gate stack
Torregiani, Cristina; Liu, Joy; Vandevelde, Bart; Degryse, Dominiek; Van Dal, Mark; Benedetti, Alessandro; Lauwers, Anne; Maex, Karen (2004) -
A grain size limitation inherent to electroplated copper films
Brongersma, Sywert; Richard, Emmanuel; Vervoort, Iwan; Maex, Karen (2000) -
A modified capacitance / voltage technique to characterize copper drift diffusion in organic low-K dielectrics
Lanckmans, Filip; Geenen, Luc; Vandervorst, Wilfried; Maex, Karen (2000) -
A new approach for the measurement of resistivity and cross-sectional area of an aluminium interconnect line: principle and applications
Li, Hua; Jin, S.; Proost, Joris; Van Hove, Marleen; Froyen, L.; Maex, Karen (1998) -
A new method for the lifetime determination of submicron metal interconnects by means of parallel test structure
Vanstreels, Kris; D'Olieslaeger, Marc; De Ceuninck, Ward; D'Haen, Jan; Maex, Karen (2004) -
A new scaling issue in the electrical behavior of damascene versus plasma-etched interconnects
Proost, Joris; Conard, Thierry; Boullart, Werner; Grillaert, Joost; Maex, Karen (1998) -
A new ultra-low K ILD material based on organic-inorganic hybrid resins
Zhong, Ben; Meynen, Herman; Iacopi, Francesca; Weidner, Ken; Malhouitre, Stéphane; Moyer, Eric; Bargeron, Cory; Schalk, Paul; Peck, Alan; Van Hove, Marleen; Maex, Karen (2002) -
A novel approach to characterise a low-k dielectric polymer surface
Martin Hoyas, Ana; Schuhmacher, Jorg; Le, Quoc Toan; Whelan, Caroline; Schaekers, Marc; Celis, Jean-Pierre; Maex, Karen (2002) -
A quantitative study of the adhesion between copper, barrier and organic low-k polymers
Lanckmans, Filip; Brongersma, Sywert; Varga, Istvan; Bender, Hugo; Beyne, Eric; Maex, Karen (2001) -
A reliability study of titanium silicide lines using micro-Raman spectroscopy and electron microscopy
De Wolf, Ingrid; Howard, Dave; Rasras, Mahmoud; Lauwers, A.; Maex, Karen; Groeseneken, Guido; Maes, Herman (1997) -
A study of growth mechanism of TiN and WCN barrier films deposited by atomic layer deposition on different substrates
Satta, Alessandra; Schuhmacher, Jörg; Whelan, Caroline; Vandervorst, Wilfried; Brongersma, Sywert; Beyer, Gerald; Brijs, Bert; Conard, Thierry; Maex, Karen; Vantomme, Andre; Viitanen, M.M.; Brongersma, H.H. (2002) -
A study on (Co1-xNixSi2) Schottky contacts on N-Si(100) substrates
Qu, Xin-Ping; Detavernier, C.; Van Meirhaeghe, R.L.; Cardon, F.; Lauwers, Anne; Maex, Karen; Li, Bin-Zong (2001) -
A yield-aware modeling methodology for nano-scaled SRAM designs
Grossar, Evelyn; Croon, Jeroen; Stucchi, Michele; Dehaene, Wim; Maex, Karen (2005) -
Accurate frequency-dependent formula for series line impedance of microstrip on lossy silicon substrate
Ymeri, H.; Nauwelaers, Bart; Maex, Karen; De Roest, D. (2001) -
Admittance matrix calculations of on-chip interconnects on lossy silicon substrate using multilayer Green's function
Ymeri, Hasan; Nauwelaers, Bart; Maex, Karen; De Roest, David; Vandenberghe, S.; Stucchi, Michele (2001) -
Aggressive scaling of Cu lowk: impact on metrology
Maex, Karen; Brongersma, Sywert; Iacopi, Francesca; Vanstreels, Kris; Travaly, Youssef; Baklanov, Mikhaïl; D'Haen, Jan; Beyer, Gerald (2005) -
Alpha-Ta formation and its impact on electromigration
Demuynck, Steven; Tokei, Zsolt; Bruynseraede, Christophe; Michelon, Julien; Maex, Karen (2004) -
Analysis of silicide / diffusion contact resistance making use of transmission line stuctures
Akheyar, Amal; Lauwers, Anne; Lindsay, Richard; de Potter de ten Broeck, Muriel; Tempel, Georg; Maex, Karen (2002)