Browsing by Author "Hansen, Ole"

3 omega correction method for eliminating resistance measurement error due to Joule heating

Accurate micro Hall effect measurement on scribe line pads

Advanced characterization of carrier profiles in germanium using micro-machined contact probes

Apparent size effects on dopant activation in nanometer-wide Si fins

Atomic layer deposition of ruthenium with TiN interface for sub-10nm advanced interconnects beyond copper

Electrical characterization of InGaAs ultra-shallow junctions

Electrical characterization of InGaAs ultra-shallow junctions

Fast micro Hall effect measurements on small pads

Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes

High precision micro-scale Hall effect characterization method using in-line micro four-point probes

In-line resistance measurement of single nanometer-wide trenches and fins

In-line sheet resistance measurements of nanometer-wide semiconducting fins

Micro probe carrier profiling of ultra-shallow structures in germanium

Monitoring of local and global temperature non-uniformities by means of Therma-Probe and Micro Four-Point Probe metrology

On the analysis of the activation mechanisms of sub-melt laser anneals

Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Sheet-resistance measurements in nanometer-wide conductive lines

Study of submelt laser induced junction nonuniformities using Therma-Probe

Systematic study of shallow junction formation on germanium substrates