Browsing by Author "Koelling, Sebastian"
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Publication 3D-Atomprobe : facts, artifacts and applications in semiconductors
Proceedings paper2010, The International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei University - SISS-12, 10/06/2010Publication 3D-carrier profiling in FinFETs using scanning spreading resistance microscopy
Proceedings paper2011, IEEE International Electron Devices Meeting - IEDM, 5/12/2011, p.119-122Publication 3D-doping in Finfets and nanowires : fabrication and metrology challenges and solutions
Oral presentation2011, E-MRS Symposium I: Transport in Si-based NanodevicesPublication Assessing the performance of two and three dimensional dopant profiling techniques for sub-65nm technologies
Oral presentation2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and ModelingPublication Atom probe analysis of a 3D-finfet with high-k metal gate
Journal article2011, Ultramicroscopy, (111) 6, p.530-534Publication Atom probe for FinFET dopant characterization
Meeting abstract2010, 52nd International Field Emission Symposium - IFES, 5/07/2010Publication Conductive diamond probes with electroplated holder chips
Journal article2007, Microelectronic Engineering, (84) 5_8, p.1178-1181Publication Conformal doping for FINFET's: a fabrication and metrology challenge
Oral presentation2008, Stanford & Tohoku University Joint Open Workshop on 3D Transistor and its ApplicationsPublication Conformal doping of FINFET's: a fabrication and metrology challenge
Proceedings paper2008, 17th International Conference in Ion Implantation Technology - IIT, 8/06/2008, p.449-456Publication Counting dopants/atoms in 2D/3D nanoscale structures
Oral presentation2010, The X International Conference on Nanostructured Materials - NANO-2010Publication Direct imaging of 3D atomic-scale dopant-defect clustering processes in ion-implanted silicon
Journal article2013, Nano Letters, (13) 6, p.2458-2462Publication Dopant and carrier profiling for 3D-device architectures
Proceedings paper2011, International Workshop on Junction Technology, 7/06/2011Publication Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution
Proceedings paper2010, IEEE Symposium on VLSI Technology, 15/06/2010, p.195-196Publication Dopant/carrier profiling in nanostructures
Proceedings paper2010, International Conference on Solid State Devices and Materials - SSDM, 22/09/2010, p.992-993Publication Electrical demonstration of thermally stable Ni silicides on Si1-xCx epitaxial layers
Journal article2010, Microelectronic Engineering, (87) 3, p.306-310Publication Failure mechanisms for semiconductor atom probe tips
Publication field evaporation behavior of high-k metal gate stack under femtosecond laser pulsing
Oral presentation2010, 52nd International Field Emission Symposium - IFESPublication Field evaporation of semiconductors under femtosecond laser illumination
Meeting abstract2009, Atom Probe Workshop, 13/09/2009Publication FIM observation of dopants in silicon
Meeting abstract2009, Atom Probe Workshop, 13/09/2009Publication First electrical demonstration of DRAM compatible Ni silicides
Oral presentation2009, 18th Workshop Materials for Advanced Metallization - MAM