Browsing by Author "Parnell, Doni"
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Publication 28nm pitch of line/space pattern transfer into silicon substrates with chemo-epitaxy directed self-assembly (DSA) process flow
Oral presentation2013, 39th International Conference on Micro and Nano Engineering - MNEPublication Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns
Meeting abstract2014, Micro and Nano Engineering Conference - MNE, 22/09/2014Publication Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow
Journal article2015, Journal of Micro/Nanolithography MEMS and MOEMS, (14) 3, p.31204Publication Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow
Proceedings paper2015, Alternative Lithographic Technologies VII, 22/02/2015, p.94230MPublication Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow
Proceedings paper2014, Alternative Lithographic Technologies VI, 24/02/2014, p.904905Publication Demonstration of an N7 integrated fab process for metal oxide EUV photoresist
Proceedings paper2016, Extreme Ultraviolet (EUV) Lithography VII, 21/02/2016, p.97760BPublication Evaluation of integration schemes for contact-hole grapho-epitaxy DSA: a study of substrate and template affinity control
Proceedings paper2014, Alternative Lithographic Technologies VI, 23/02/2014, p.90491LPublication Origin of defect in directed self-assembly of block copolymers using feature multiplication
; ; Lin, GuanyangProceedings paper2013, IEEE Litho Workshop, 11/11/2013Publication Pattern transfer challenges of the Sequential Infiltration Synthesis (SIS) of of Directed Self-Assembly (DSA) for line/space applications
Proceedings paper2016, 42nd Micro- and Nano-Engineering - MNE, 19/09/2016Publication Patterning sub-25nm half-pitch hexagonal arrays of contact holes with chemo-epitaxial DSA guided by ArFi pre-patterns
Proceedings paper2015, Advances in Patterning Materials and Processes XXXII, 22/02/2015, p.94250XPublication Process optimization of templated DSA flows
Proceedings paper2014, Advances in Patterning Materials and Processes XXXI, 24/02/2014, p.90510IPublication Progress in directed self-assembly hole shrink applications
Proceedings paper2013, Advances in Resist Materials and Processing Technology XXX, 25/02/2013, p.86820LPublication Readying directed self-assembly for patterning in semiconductor manufacturing
Meeting abstract2014, 58th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - EIPBN, 27/05/2014Publication Using chemo-epitaxial directed self-assembly for repair and frequency multiplication of EUVL contact-hole patterns
Proceedings paper2014, Alternative Lithographic Technologies VI, 23/02/2014, p.90492E