Browsing by author "Witvrouw, Ann"

11-Megapixel CMOS-integrated SiGe micromirror arrays for high-end applications

Witvrouw, Ann; Haspeslagh, Luc; Varela Pedreira, Olalla; De Coster, Jeroen; De Wolf, Ingrid; Tilmans, Harrie; Bearda, Twan; Schlatmann, Bart; van Bommel, Mark; de Nooijer, Christine; Magnee, P.H.C.; Lous, E.J.; Hagting, Marco; Lauria, John; Vanneer, Roel; van Drieenhuizen, Bert (2010)

3D total variation denoising in X-CT imaging applied to pore extraction in additively manufactured parts

Heylen, Rob; Thanki, Aditi; Verhees, Dries; Luso, Domenico; De Beenhouwer, Jan; Sijbers, Jan; Witvrouw, Ann; Haitjema, Han; Bey-Temsamani, Abdellatif (2022)

A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS

Scheurle, A.; Fuchs, T.; Kehr, K.; Leinenbach, C.; Kronmueller, S.; Arias, A.; Ceballos, J.; Lagos, M.A.; Mora, J.-M.; Munoz, J.M.; Ragel, A.; Ramos, J.; Van Aerde, Steven; Spengler, J.; Mehta, Anshu; Verbist, Agnes; Du Bois, Bert; Witvrouw, Ann (2007-01)

A 2D MEMS grating based CMOS compatible poly-SiGe variable optical attenuator

Rudra, Sukumar; Van Hoof, Rita; De Coster, Jeroen; Bryce, George; Severi, Simone; Witvrouw, Ann; Van Thourhout, Dries (2013)

A CMOS compatible polycrystalline silicon-germanium based piezoresistive pressure sensor

Gonzalez, Pilar; Guo, Bin; Severi, Simone; De Meyer, Kristin; Witvrouw, Ann (2011)

A comb based in-plane SiGe capacitive accelerometer for above-IC integration

Wen, Lianggong; Wouters, Kristof; Haspeslagh, Luc; Witvrouw, Ann; Puers, Bob (2010)

A comparison between wet HF etching and vapor HF etching for sacrificial oxide removal

Witvrouw, Ann; Du Bois, Bert; De Moor, Piet; Verbist, Agnes; Van Hoof, Chris; Bender, Hugo; Baert, Kris (2000)

A detailed study of a novel wafer separation method for surface sensitive MEMS wafers

Malachowski, Karl; Severi, Simone; Van Hoof, Rita; Sangameswaran, Sandeep; Witvrouw, Ann; Genda, Satoshi; Tabuchi, Tomotaka; Uchiyama, Naoki (2011)

A new generic surface micromachining module for MEMS hermetic packaging at temperatures below 200° C

Hellin Rico, Raquel; Celis, Jean-Pierre; Baert, Kris; Van Hoof, Chris; Witvrouw, Ann (2007)

A new method to determine the internal pressure and leakage rate of MEMS packages

Wang, Bo; De Coster, Jeroen; Witvrouw, Ann; Severi, Simone; Wevers, Martine; De Wolf, Ingrid (2013)

A novel gap narrowing process for creating high aspect ratio transduction gaps for MEM HF resonators

Stoffels, Steve; Bryce, George; Van Hoof, Rita; Du Bois, Bert; Mertens, Robert; Puers, Bob; Tilmans, Harrie; Witvrouw, Ann (2008)

A novel gap narrowing process for creating high aspect ratio transduction gaps for MEM HF resonators

Stoffels, Steve; Bryce, George; Van Hoof, Rita; Du Bois, Bert; Mertens, Robert; Puers, Bob; Tilmans, Harrie; Witvrouw, Ann (2009)

A Parylene temporary packaging technique for MEMS wafer handling

Wen, L.; Wouters, K.; Ceyssens, F.; Witvrouw, Ann; Puers, Bob (2011)

A parylene temporary packaging technique for MEMS wafer handling

Wen, Liangong; Wouters, K.; Ceyssens, F.; Witvrouw, Ann; Puers, Bob (2011)

A parylene temporary packaging technique for MEMS wafer handling

Wen, Lianggong; Wouters, K.; Ceyssens, F.; Witvrouw, Ann; Puers, Bob (2012)

A wafer-level poly-SiGe-based thin film packaging technology demonstrated on a SOI-based high-Q MEM resonator

Helin, Philippe; Verbist, Agnes; De Coster, Jeroen; Guo, Bin; Severi, Simone; Witvrouw, Ann; Haspeslagh, Luc; Tilmans, Harrie; Naito, Yasuyuki; Onishi, K. (2011)

Above-IC generic poly-SiGe thin film wafer level packaging and MEM device technology: application to accelerometers

Guo, Bin; Wen, Lianggong; Helin, Philippe; Claes, Gert; Verbist, Agnes; Van Hoof, Rita; Du Bois, Bert; De Coster, Jeroen; De Wolf, Ingrid; Shahar, Abdul Hadi; Li, Yunlong; Cui, Hushan; Lux, Marcel; Vereecke, Guy; Tilmans, Harrie; Haspeslagh, Luc; Decoutere, Stefaan; Osman, Haris; Puers, Bob; Severi, Simone; Witvrouw, Ann (2011)