Browsing by author "Schuhmacher, Jorg"
Now showing items 1-20 of 25
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A novel approach to characterise a low-k dielectric polymer surface
Martin Hoyas, Ana; Schuhmacher, Jorg; Le, Quoc Toan; Whelan, Caroline; Schaekers, Marc; Celis, Jean-Pierre; Maex, Karen (2002) -
A novel approach to characterization of a low-k dielectric polymer surface
Martin Hoyas, Ana; Schuhmacher, Jorg; Whelan, Caroline; Baklanov, Mikhaïl; Carbonell, Laure; Schaekers, Marc; Celis, Jean-Pierre; Maex, Karen (2002) -
A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates
Travaly, Youssef; Schuhmacher, Jorg; Baklanov, Mikhaïl; Giangrandi, Simone; Richard, Olivier; Brijs, Bert; Van Hove, Marleen; Maex, Karen; Abell, Thomas; Somers, K.R.F; Hendrickx, M.F.A; Vanquickenborne, L.G.; Ceulemans, A.; Jonas, A.M (2005-10) -
Atomic layer deposited barriers for copper interconnects
Schuhmacher, Jorg; Martin Hoyas, Ana; Ernur, Didem; Tokei, Zsolt; Travaly, Youssef; Bruynseraede, Christophe; Satta, Alessandra; Whelan, Caroline; Shamiryan, Denis; Beyer, Gerald; Abell, Thomas; Sutcliffe, Victor; Schaekers, Marc; Maex, Karen (2004) -
Atomic-layer deposited barrier and seed layers for interconnects
Schuhmacher, Jorg; Martin Hoyas, Ana; Satta, Alessandra; Maex, Karen (2005) -
Barrier reliability of ALD TaN on sub-100 nm copper low-k interconnects
Tokei, Zsolt; Gailledrat, Thomas; Li, Yunlong; Schuhmacher, Jorg; Mandrekar, T.; Guggilla, S.; Mebarki, B.; Maex, Karen (2005) -
Barrier reliability on sub-100nm copper low-k interconnects
Tokei, Zsolt; Gailledrat, T.; Li, Yunlong; Schuhmacher, Jorg; Mandrekar, T.; Guggilla, S.; Mebarki, Bencherki; Maex, Karen (2004) -
Characterization of ALD diffusion barrier on low-k dielectric polymer by contact angle measurements
Martin Hoyas, Ana; Schuhmacher, Jorg; Celis, Jean-Pierre; Maex, Karen (2002) -
Characterization of the growth of atomic layer deposited WNxCy films on various substrates
Martin Hoyas, Ana; Travaly, Youssef; Schuhmacher, Jorg; Sajavaara, Timo; Whelan, Caroline; Eyckens, Brenda; Richard, Olivier; Giangrandi,; Brijs, Bert; Jonas, A.M.; Vantomme, Andre; Vandervorst, Wilfried; Celis, Jean-Pierre; Maex, Karen (2005) -
Comprehensive electromigration studies of dual-damascene Cu interconnects with ALD WCxNy barriers
Bruynseraede, Christophe; Fisher, A.H.; Ungar, F.; Schuhmacher, Jorg; Sutcliffe, Victor; Michelon, Julien; Maex, Karen (2004) -
Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization
Ernur, Didem; Terzieva, Valentina; Schuhmacher, Jorg; Sutcliffe, Victor; Whelan, Caroline; Maex, Karen (2005) -
Effect of plasma treatments on a low-k dielectric polymer surface
Martin Hoyas, Ana; Schuhmacher, Jorg; Whelan, Caroline; Baklanov, Mikhaïl; Carbonell, Laure; Celis, Jean-Pierre; Maex, Karen (2005) -
Growth and characterization of atomic layer deposited WC0.7N0.3 on polymer films
Martin Hoyas, Ana; Schuhmacher, Jorg; Shamiryan, Denis; Waeterloos, Joost; Besling, W.; Celis, Jean-Pierre; Maex, Karen (2004) -
Growth and characterization of atomic layer deposited WCxNy
Martin Hoyas, Ana; Travaly, Youssef; Schuhmacher, Jorg; Sajavaara, T.; Whelan, Caroline; Eyckens, Brenda; Richard, Olivier; Giangrandi, Simone; Brijs, Bert; Jonas, A.M.; Vantomme, A.; Vandervorst, Wilfried; Celis, Jean-Pierre; Maex, Karen (2005) -
Implementation of atomic layer deposition in advanced semiconductor processes
Schaekers, Marc; Van Ammel, Annemie; Schuhmacher, Jorg; Delabie, Annelies; Martin Hoyas, Ana; Zhao, Chao (2005) -
Inhibition of galvanic corrosion of WNC barrier metal for reliable Cu CMP
Ernur, Didem; Terzieva, Valentina; Schuhmacher, Jorg; Maex, Karen (2004) -
Initial growth mechanism of atomic layer deposited TiN
Satta, Alessandra; Vantomme, Andre; Schuhmacher, Jorg; Whelan, Caroline; Sutcliffe, Victor; Maex, Karen (2004) -
Interface characterization of nanoscale laminate structures on dense dielectric substrates by X-ray reflectivity
Travaly, Youssef; Schuhmacher, Jorg; Martin Hoyas, Ana; Van Hove, Marleen; Maex, Karen; Abell, Thomas; Sutcliffe, Victor; Jonas, Alain M. (2005-04) -
Interface characterization of nanoscale laminate structures on dense dielectric substrates by x-ray reflectivity
Travaly, Youssef; Schuhmacher, Jorg; Martin Hoyas, Ana; Van Hove, Marleen; Maex, Karen; Abell, Thomas; Sutcliffe, Victor; Jonas, A.M. (2005-04) -
Lateral solvent diffusion characterization of low k dielectric plasma damage and ALD barrier film closure
Abell, Thomas; Schuhmacher, Jorg; Tokei, Zsolt; Travaly, Youssef; Maex, Karen (2005)