Browsing by author "Dentoni Litta, Eugenio"
Now showing items 41-60 of 61
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Nanosheet FETs and their Potential for Enabling Continued Moore's Law Scaling
Veloso, Anabela; Eneman, Geert; De Keersgieter, An; Jang, Doyoung; Mertens, Hans; Matagne, Philippe; Dentoni Litta, Eugenio; Ryckaert, Julien; Horiguchi, Naoto (2021) -
Nanosheet RMG: metal gate and interface dipole patterning
Oniki, Yusuke; Ragnarsson, Lars-Ake; Cott, Daire; Dekkers, Harold; Dentoni Litta, Eugenio; Altamirano Sanchez, Efrain; Holsteyns, Frank; Horiguchi, Naoto (2020) -
Novel forksheet device architecture as ultimate logic scaling device towards 2nm
Weckx, Pieter; Ryckaert, Julien; Dentoni Litta, Eugenio; Yakimets, Dmitry; Matagne, Philippe; Schuddinck, Pieter; Jang, Doyoung; Chehab, Bilal; Baert, Rogier; Gupta, Mohit; Oniki, Yusuke; Ragnarsson, Lars-Ake; Horiguchi, Naoto; Spessot, Alessio; Verkest, Diederik (2019) -
Novel low thermal budget gate stack solutions for BTI reliability in future Logic Device technologies
Franco, Jacopo; Arimura, Hiroaki; de Marneffe, Jean-Francois; Vandooren, Anne; Ragnarsson, Lars-Ake; Wu, Z.; Claes, D.; Dentoni Litta, Eugenio; Horiguchi, Naoto; Croes, Kristof; Linten, Dimitri; Grasser, T.; Kaczer, Ben (2021) -
Overview of bias temperature instability in scaled DRAM logic for memory transistors
O'Sullivan, Barry; Ritzenthaler, Romain; Dentoni Litta, Eugenio; Simoen, Eddy; Machkaoutsan, Vladimir; Fazan, Pierre; Ji, Yunhyuck; Cheolygu, Kim; Spessot, Alessio; Linten, Dimitri; Horiguchi, Naoto (2020) -
Process Integration of High Aspect Ratio Vias with a Comparison between Co and Ru Metallizations
Vega Gonzalez, Victor; Montero Alvarez, Daniel; Versluijs, Janko; Varela Pedreira, Olalla; Jourdan, Nicolas; Puliyalil, Harinarayanan; Chehab, Bilal; Peissker, Tobias; Haider, Ali; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Geypen, Jef; Le, Quoc Toan; Bazzazian, Nina; Heylen, Nancy; van der Veen, Marleen; El-Mekki, Zaid; Webers, Tomas; Vats, H.; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Gillijns, Werner; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Ciofi, Ivan; De Wachter, Bart; Swerts, Johan; Grieten, Eva; Ercken, Monique; Kim, Ryan Ryoung han; Croes, Kristof; Leray, Philippe; Jaysankar, Manoj; Nagesh, Nishanth; Ramakers, Leon; Murdoch, Gayle; Park, Seongho; Tokei, Zsolt; Dentoni Litta, Eugenio; Horiguchi, Naoto (2021) -
Process variation analysis of device performance using virtual fabrication: methodology demonstrated on a CMOS 14-nm FinFET vehicle
Vincent, Benjamin; Hathwar, R.; Kamon, M.; Ervin, J.; Schram, Tom; Chiarella, Thomas; Demuynck, Steven; Baudot, Sylvain; Siew, Yong Kong; Kubicek, Stefan; Dentoni Litta, Eugenio; Chew, Soon Aik; Mitard, Jerome (2020) -
Relevance of fin dimensions and high-pressure anneals on hot-carrier degradation
Vaisman Chasin, Adrian; Franco, Jacopo; Bury, Erik; Ritzenthaler, Romain; Dentoni Litta, Eugenio; Spessot, Alessio; Horiguchi, Naoto; Linten, Dimitri; Kaczer, Ben (2020) -
Reliability engineering enabling continued logic for memory device scaling
O'Sullivan, Barry; Ritzenthaler, Romain; Dentoni Litta, Eugenio; Simoen, Eddy; Machkaoutsan, Vladimir; Fazan, Pierre; Ji, Yunhyuck; Kim, Cheolgyu; Spessot, Alessio; Linten, Dimitri; Horiguchi, Naoto (2019) -
Reliability of Barrierless PVD Mo
Tierno, Davide; Hosseini, Maryam; van der Veen, Marleen; Dangol, Anish; Croes, Kristof; Demuynck, Steven; Tokei, Zsolt; Dentoni Litta, Eugenio; Horiguchi, Naoto (2021) -
RMG patterning by digital wet etching of polycrystalline metal films
Oniki, Yusuke; Vereecke, Guy; Dentoni Litta, Eugenio; Ragnarsson, Lars-Ake; Dekkers, Harold; Schram, Tom; Holsteyns, Frank; Horiguchi, Naoto (2018) -
RMG wet process challenges and the patterning knobs towards N5 and beyond logic devices
Oniki, Yusuke; Ragnarsson, Lars-Ake; Vereecke, Guy; Sebaai, Farid; Dekkers, Harold; Dentoni Litta, Eugenio; Schram, Tom; Holsteyns, Frank; Horiguchi, Naoto (2018) -
Scaled FinFETs Connected by Using Both Wafer Sides for Routing via Buried Power Rails
Veloso, Anabela; Jourdain, Anne; Radisic, Dunja; Chen, Rongmei; Arutchelvan, Goutham; O'Sullivan, Barry; Arimura, Hiroaki; Stucchi, Michele; De Keersgieter, An; Hosseini, Maryam; Hopf, Toby; D'have, Koen; Wang, Shouhua; Dupuy, Emmanuel; Mannaert, Geert; Vandersmissen, Kevin; Iacovo, Serena; Marien, Philippe; Choudhury, Subhobroto; Schleicher, Filip; Sebaai, Farid; Oniki, Yusuke; Zhou, X.; Gupta, Anshul; Schram, Tom; Briggs, Basoene; Lorant, Christophe; Rosseel, Erik; Hikavyy, Andriy; Loo, Roger; Geypen, Jef; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Soulie, Jean-Philippe; Devriendt, Katia; Chan, BT; Demuynck, Steven; Hiblot, Gaspard; Van der Plas, Geert; Ryckaert, Julien; Beyer, Gerald; Dentoni Litta, Eugenio; Beyne, Eric; Horiguchi, Naoto (2022) -
Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard Cells
Vega Gonzalez, Victor; Radisic, Dunja; Choudhury, Subhobroto; Tierno, Davide; Thiam, Arame; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Seidel, Felix; Decoster, Stefan; Kundu, Souvik; Tsvetanova, Diana; Peter, Antony; De Coster, Hanne; Sepulveda Marquez, Alfonso; Altamirano Sanchez, Efrain; Chan, BT; Drissi, Youssef; Sherazi, Yasser; Lee, Jae Uk; Ciofi, Ivan; Murdoch, Gayle; Nagesh, Nishanth; Hellings, Geert; Ryckaert, Julien; Biesemans, Serge; Dentoni Litta, Eugenio; Horiguchi, Naoto; Park, Seongho; Tokei, Zsolt (2022) -
TaN versus TiN metal gate input/output pMOSFETs: a low-frequency noise perspective
Simoen, Eddy; O'Sullivan, Barry; Ritzenthaler, Romain; Dentoni Litta, Eugenio; Schram, Tom; Horiguchi, Naoto; Claeys, Cor (2018) -
Thermal stress-aware CMOS-SRAM partitioning in sequential 3-D technology
Salahuddin, Shairfe Muhammad; Dentoni Litta, Eugenio; Gupta, Anshul; Ritzenthaler, Romain; Schaekers, Marc; Everaert, Jean-Luc; Yu, Hao; Vandooren, Anne; Ryckaert, Julien; Na, Myung Hee; Spessot, Alessio (2020) -
Thermally stable, packaged aware LV HKMG platforms benchmark to enable low power I/O for next 3D NAND generations
Spessot, Alessio; Salahuddin, Shairfe Muhammad; Escobar Gavilanez, Ricardo; Ritzenthaler, Romain; Xiang, Yang; Budhwani, Rahul Kumar; Dentoni Litta, Eugenio; Capogreco, Elena; Bastos, Joao; Chen, Yangyin; Horiguchi, Naoto (2022) -
Towards extreme scaling of logic standard cells using Forksheet devices
Weckx, Pieter; Ryckaert, Julien; Jang, Doyoung; Chehab, Bilal; Hellings, Geert; Mertens, Hans; Dentoni Litta, Eugenio; Spessot, Alessio; Horiguchi, Naoto; Na, Myung Hee (2020) -
Treatments for reliability improvement in thick oxides diffusion and gate replacement (D&GR) I/O transistors
Ritzenthaler, Romain; Cho, Moon Ju; Schram, Tom; Spessot, Alessio; Simoen, Eddy; O'Sullivan, Barry; Dentoni Litta, Eugenio; Horiguchi, Naoto; Thean, Aaron (2017) -
Two-level MOL and VHV routing style to enable extreme height scaling beyond 2nm technology node
Chehab, Bilal; Zografos, Odysseas; Dentoni Litta, Eugenio; Ahmed, Zubair; Schuddinck, Pieter; Jang, Doyoung; Hellings, Geert; Spessot, Alessio; Weckx, Pieter; Ryckaert, Julien (2021)