Browsing by author "van den Berg, J.A."
Now showing items 1-16 of 16
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A comparative X-ray photoelectron spectroscopy and medium-energy ion-scattering study of ultra-thin, Hf-based high-k films
Sygellou, L; Ladas, S; Reading, M.A.; van den Berg, J.A.; Conard, Thierry; De Gendt, Stefan (2010-03) -
Advanced front-end processes for the 45nm CMOS technology node
Collart, E.J.H.; Felch, S.B.; Graoui, H.; Tallavarjula, S.; Lindsay, Richard; Pawlak, Bartek; van den Berg, J.A.; Cowern, N.E.B.; Kirby, K.J. (2004) -
Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films
Hourdakis, E.; Theodoropoulou, M.; Nassiopoulou, A.G.; Parisini, A.; Reading, M.A.; van den Berg, J.A.; Conard, Thierry; De Gendt, Stefan (2009) -
Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films
Hourdakis, E.; Theodoropoulou, M.; Nassiopoulou, A.G.; Parisini, A.; Reading, M.A.; van den Berg, J.A.; Conard, Thierry; De Gendt, Stefan (2009) -
Damage accumulation and dopant migration during shallow As and Sb implantation into Si
Werner, M.; van den Berg, J.A.; Armour, D.G.; Vandervorst, Wilfried; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C.Q. (2004) -
High depth resolution characterization of the damage and annealing behaviour of ultrashallow As-implants in Si
van den Berg, J.A.; Armour, D.G.; Werner, M.; Whelan, S.; Vandervorst, Wilfried; Clarysse, Trudo; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C.Q. (2002) -
High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS
van den Berg, J.A.; Reading, M.A.; Parisini, A.; Kolbe, M.; Beckhoff, B.; Ladas, S.; Petrik, P.; Bailey, P.; Noakes, T.; Conard, Thierry; De Gendt, Stefan (2009) -
High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS
van den Berg, J.A.; Reading, M. A.; Parisini, A.; Kolbe, M.; Beckhoff, B.; Ladas, S.; Fried, M.; Petrik, P.; Bailey, P.; Noakes, T.; Conard, Thierry; De Gendt, Stefan (2009) -
High resolution, quantitative depth profiling analysis of nm thin hgh-k dielectriclayers using medium energy ion scattering (MEIS)
van den Berg, J.A.; Reading, M.A.; Armour, D.G>; Bailey, P.; Noakes, T.C.Q.; Conard, Thierry; De Gendt, Stefan (2009) -
Nanolayer characterisation by reference-free X-ray fluorescence analysis with synchrotron radiation
Kolbe, M.; Beckhoff, B.; Krumrey, M.; Reading, M.A.; van den Berg, J.A.; Conard, Thierry; De Gendt, Stefan (2009) -
Physical characterization of the metal/high-k layer interaction upon annealing
Conard, Thierry; Franquet, Alexis; Vandervorst, Wilfried; Reading, M.; van den Berg, J.A.; Van Elshocht, Sven; Schram, Tom; Adelmann, Christoph; De Gendt, Stefan (2008) -
Quantitative analysis of thin dielectrica with ultra high resolution ERD, MEIS and RBS
Vandervorst, Wilfried; Conard, Thierry; Giangrandi, Simone; Brijs, Bert; Bergmaier, A.; Kimura, K.; van den Berg, J.A.; Werner, M. (2007) -
Recent developments in nuclear methods in support of semiconductor characterization
Brijs, Bert; Bender, Hugo; Huyghebaert, Cedric; Janssens, Tom; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Bergmaier, A.; Dollinger, G.; van den Berg, J.A. (2003) -
Sub nanometer depth resolution profiling of the evolution and annealing of damage and the dopant redistribution of ultra-shallow As and Sb implants in Si
van den Berg, J.A.; Werner, M.; Armour, D.G.; Vandervorst, Wilfried; Clarysse, Trudo; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C. (2003) -
TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM
Barozzi, Mario; Iacob, E; van den Berg, J.A.; Reading, M.A.; Adelmann, Christoph; Popovici, Mihaela Ioana; Tielens, Hilde; Bersani, M. (2011) -
Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
Popovici, Mihaela Ioana; Redolfi, Augusto; Aoulaiche, Marc; van den Berg, J.A.; Douhard, Bastien; Swerts, Johan; Bailey, P.; Kaczer, Ben; Groven, Benjamin; Meersschaut, Johan; Conard, Thierry; Moussa, Alain; Adelmann, Christoph; Delabie, Annelies; Fazan, Pierre; Van Elshocht, Sven; Jurczak, Gosia (2015)