Browsing by author "Rotondaro, Antonio"
Now showing items 1-20 of 37
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A new cleaning concept for particle and metal removal on Si surfaces
Meuris, Marc; Verhaverbeke, Steven; Mertens, Paul; Schmidt, Harald; Rotondaro, Antonio; Heyns, Marc (1994) -
A novel environmentally-friendly corrosion-free post-stripping rinsing procedure after solvent strip
Vos, Rita; Rotondaro, Antonio; Mertens, Paul; Meuris, Marc; Heyns, Marc (1997) -
A semi-quantitative method for studying photoresist stripping
Rotondaro, Antonio; Meuris, Marc; Schmidt, Harald; Heyns, Marc; Vandervorst, Wilfried; Claeys, Cor; Hellemans, L.; Snauwert, L. (1994) -
Advanced cleaning and ultra-thin oxide technology
Heyns, Marc; Cornelissen, Ingrid; De Gendt, Stefan; Degraeve, Robin; Knotter, D. M.; Mertens, Paul; Mertens, S.; Meuris, Marc; Nigam, Tanya; Rotondaro, Antonio; Schaekers, Marc; Teerlinck, Ivo; Vos, Rita; Wolke, K. (1998) -
Cleaning technology for highly reliable gate oxides
Heyns, Marc; Meuris, Marc; Verhaverbeke, Steven; Mertens, Paul; Schmidt, Harald; Rotondaro, Antonio; Hurd, Trace; Hatcher, Z.; Gräf, D. (1994) -
Contamination control in submicron CMOS technologies
Rotondaro, Antonio (1996-01) -
Development of advanced corrosion free organic strippers for ULSI processing
Rotondaro, Antonio; Honda, K.; Maw, T.; Perry, D.; Lux, Marcel; Heyns, Marc; Claeys, C.; Daraktchiev, I. (1996) -
Effect of oxidation ramp up on the redistribution of metallic contamination in gate oxides
Mertens, Paul; Rotondaro, Antonio; Meuris, Marc; Schmidt, Harald; Heyns, Marc; Gräf, D. (1994) -
H2O2 decomposition and its impact on silicon surface roughening and gate oxide integrity
Schmidt, Harald; Meuris, Marc; Rotondaro, Antonio; Heyns, Marc; Hurd, Trace; Hatcher, Z. (1995) -
How clean is clean enough?
Mertens, Paul; Teerlinck, Ivo; Hurd, Trace; Kenis, Karine; Schmidt, Harald; Rotondaro, Antonio; Hall, L.; Gräf, D.; De Pestel, Freddy; Meuris, Marc; Heyns, Marc (1995) -
Impact of Fe and Cu contamination on the minority carrier lifetime of silicon substrates
Rotondaro, Antonio; Hurd, Trace; Kaniava, Arvydas; Vanhellemont, Jan; Simoen, Eddy; Heyns, Marc; Claeys, Cor (1996) -
Impact of the electrochemical properties of silicon wafer surfaces on copper outplating from HF solutions
Teerlinck, Ivo; Schmidt, Harald; Rotondaro, Antonio; Hurd, Trace; Mouche, Laurent; Mertens, Paul; Meuris, Marc; Heyns, Marc; Vanhaeren, Danielle; Vandervorst, Wilfried (1996) -
Important parameters influencing the rince efficiency of silicon wafers
Meuris, Marc; Opdebeeck, Ann; Cornelissen, Ingrid; Rotondaro, Antonio; Mertens, Paul; Heyns, Marc (1995) -
Interaction of the sulphuric acid hydrogen peroxide mixture with silicon surfaces
Rotondaro, Antonio; Schmidt, Harald; Meuris, Marc; Heyns, Marc; Claeys, Cor; Mulready, J. (1994) -
Investigation of advanced organic strippers for ULSI processing
Rotondaro, Antonio; Gluck, Ronald; Meuris, Marc; Heyns, Marc; Claeys, Cor; Honda, K.; Daraktchiev, I. (1994) -
IR and MW absorption techniques for bulk and surface recombination control in high-quality silicon
Kaniava, Arvydas; Menczigar, U.; Vanhellemont, Jan; Poortmans, Jef; Rotondaro, Antonio; Gaubas, Eugenijus; Vaitkus, J.; Köster, L.; Gräf, D. (1995) -
Just-Clean- Enough technology for the 21st century
Heyns, Marc; Meuris, Marc; Mertens, Paul; Hurd, Trace; Schmidt, Harald; Depas, Michel; Rotondaro, Antonio; Vermeire, Bert; Vandervorst, Wilfried; Storm, Wolfgang; Polleunis, C.; Bertrand, P.; McGeary, M. J.; Lubbers, A.; Hatcher, Z. (1995) -
Limitations of minority carrier lifetime as a parameter for evaluating iron contamination in silicon
Rotondaro, Antonio; Hurd, Trace; Mertens, Paul; Schmidt, Harald; Heyns, Marc; Simoen, Eddy; Vanhellemont, Jan; Vegh, Gerzson; Claeys, Cor; Gräf, D. (1994) -
Metal interactions with silica (SiO2) surfaces: adsorption and ion exchange
Hurd, Trace; Schmidt, Harald; Rotondaro, Antonio; Mertens, Paul; Hall, L. H.; Heyns, Marc (1996) -
New technologies for reducing chemical costs and environmental impact
Heyns, Marc; Cornelissen, Ingrid; Mertens, Paul; Mertens, S.; Meuris, Marc; Rotondaro, Antonio; Schaekers, Marc; Teerlinck, Ivo; Vos, Rita; Wolke, K. (1998)