Browsing by author "Hellemans, L."
Now showing items 1-20 of 49
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A detailed study of SCM on cross-sectional and beveled junctions
Duhayon, Natasja; Clarysse, Trudo; Eyben, Pierre; Vandervorst, Wilfried; Hellemans, L. (2001) -
A semi-quantitative method for studying photoresist stripping
Rotondaro, Antonio; Meuris, Marc; Schmidt, Harald; Heyns, Marc; Vandervorst, Wilfried; Claeys, Cor; Hellemans, L.; Snauwert, L. (1994) -
Application of SCM to process development of novel devices
Duhayon, Natasja; Vandervorst, Wilfried; Hellemans, L. (2003) -
Assessing the performance of two-dimensional dopant profiling techniques
Duhayon, Natasja; Eyben, Pierre; Fouchier, Marc; Clarysse, Trudo; Vandervorst, Wilfried; Alvarez, David; Schoemann, S.; Ciappa, M.; Stangoni, M.; Fichtner, W.; Formanek, P.; Raineri, V.; Giannazzo, F.; Goghero, D.; Rosenwaks, Y.; Shikler, R.; Saraf, S.; Sadewasser, S.; Barreau, N.; Glatzel, T.; Verheijen, M.; Mentink, S.A.M.; von Sprekelsen, M.; Maltezopoulos, T.; Wiesendanger, R.; Hellemans, L. (2003) -
Assessing the performance of two-dimensional dopant profiling techniques
Duhayon, Natasja; Eyben, Pierre; Fouchier, Marc; Clarysse, Trudo; Vandervorst, Wilfried; Álvarez, D.; Schoemann, S.; Ciappa, M.; Stangoni, M.; Fichtner, W.; Formanek, P.; Kittler, M.; Raineri, V.; Giannazzo, F.; Goghero, D.; Rosenwaks, Y.; Shikler, R.; Saraf, S.; Sadewasser, S.; Barreau, N.; Glatzel, T.; Verheijen, M.; Mentink, S.A.M.; von Sprekelsen, M.; Maltezopoulos, T.; Wiesendanger, R.; Hellemans, L. (2004) -
Carrier Distribution in Silicon Devices by Atomic Force Microscopy on Etched Surfaces
Raineri, Vito; Privitera, Vittorio; Vandervorst, Wilfried; Hellemans, L.; Snauwaerts, Jan (1994) -
Carrier Profile Determination in Device Structures using AFM-Based Methods
Vandervorst, Wilfried; De Wolf, Peter; Clarysse, Trudo; Trenkler, Thomas; Hellemans, L.; Snauwaerts, Jan; Raineri, Vito (1995) -
Characterization of a point-contact on silicon using force microscopy-supported resistance measurements
De Wolf, Peter; Snauwaerts, Jan; Clarysse, Trudo; Vandervorst, Wilfried; Hellemans, L. (1995) -
Characterization of conductive probes for atomic force microscopy
Trenkler, Thomas; Hantschel, Thomas; Vandervorst, Wilfried; Hellemans, L.; Kulisch, W.; Oesterschulze, E.; Niedermann, P.; Sulzbach, T. (1999) -
Characterization of different tip materials for SCM
Duhayon, Natasja; Fouchier, Marc; Vandervorst, Wilfried; Hellemans, L. (2003) -
Characterization of vertical RESURF diodes using scanning probe microscopy
Duhayon, Natasja; Xu, Mingwei; Vandervorst, Wilfried; Hellemans, L.; Rochefort, Christelle; Van Dalen, Rob (2003) -
Characterization of vertical resurf diodes using scanning probe microsopy
Duhayon, Natasja; Xu, Mingwei; Alvarez, David; Eyben, Pierre; Vandervorst, Wilfried; Hellemans, L.; Rochefort, Christelle; Van Dalen, Rob (2002) -
Combining TOF-SIMS with XPS to quantify organic surface coverages
Kenens, Conny; Conard, Thierry; Hellemans, L.; Bertrand, P.; Vandervorst, Wilfried (2000) -
Cross-sectional nano-spreading resistance profiling
De Wolf, Peter; Clarysse, Trudo; Vandervorst, Wilfried; Hellemans, L.; Niedermann, P.; Hänni, W. (1998) -
Cross-sectional nano-srp dopant profiling
De Wolf, Peter; Clarysse, Trudo; Vandervorst, Wilfried; Hellemans, L.; Niedermann, P.; Hanni, W. (1997) -
Detailed study of scanning capacitance microscopy on cross- sectional and beveled junctions
Duhayon, Natasja; Clarysse, Trudo; Eyben, Pierre; Vandervorst, Wilfried; Hellemans, L. (2002) -
Electrical characterization of submicrometer silicon devices by cross-sectional contact-mode AFM
De Wolf, Peter; Trenkler, Thomas; Clarysse, Trudo; Caymax, Matty; Vandervorst, Wilfried; Snauwaert, J.J.; Hellemans, L. (1996) -
Evaluating probes for "electrical" atomic force microscopy
Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert; De Wolf, Peter; Hellemans, L.; Vandervorst, Wilfried; Malavé, A.; Büchel, D.; Oesterschulze, E.; Kulisch, W.; Niedermann, P.; Sulzbach, T.; Ohlsson, O. (1999) -
Evaluating probes for "electrical" atomic force microscopy
Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert; De Wolf, Peter; Vandervorst, Wilfried; Hellemans, L.; Malavé, A.; Büchel, D.; Oesterschulze, E.; Kulisch, W.; Niedermann, P.; Sulzbach, T.; Ohlsson, O. (2000) -
Lateral and Vertical Dopant Profiling in Semiconductors by Atomic Force Microscopy Using Conducting Tips
Vandervorst, Wilfried; Clarysse, Trudo; De Wolf, Peter; Hellemans, L.; Snauwaerts, Jan (1994)