Browsing by author "Gräf, D."
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Cleaning of metal contamination
Mertens, Paul; Hurd, Trace; Gräf, D.; Meuris, Marc; Schmidt, Harald; Heyns, Marc; Kwakman, L.; Hendriks, M.; Kubota, M. (1994) -
Cleaning technology for highly reliable gate oxides
Heyns, Marc; Meuris, Marc; Verhaverbeke, Steven; Mertens, Paul; Schmidt, Harald; Rotondaro, Antonio; Hurd, Trace; Hatcher, Z.; Gräf, D. (1994) -
Correlation between grown-in silicon substrate defects and silicon gate oxide breakdown characteristics
Vanhellemont, Jan; Kissinger, G.; Kenis, Karine; Depas, Michel; Gräf, D.; Lambert, U.; Wagner, P. (1996) -
Critical processes for ultra-thin gate oxide integrity
Depas, Michel; Heyns, Marc; Nigam, Tanya; Kenis, Karine; Sprey, Hessel; Wilhelm, H.; Wilhelm, Rudi; Crossley, A.; Sofield, C. J.; Gräf, D. (1996) -
Defects in As-grown silicon and their evolution during heat treatments
Vanhellemont, Jan; Dornberger, E.; Esfandyari, J.; Kissinger, G.; Trauwaert, Marie-Astrid; Bender, Hugo; Gräf, D.; Lambert, U.; von Ammon, W. (1997) -
Differential interference contrast microscopy of defects in As-grown and annealed Si wafers
Trauwaert, Marie-Astrid; Vanhellemont, Jan; Lambert, U.; Gräf, D.; Kenis, Karine; Mertens, Paul; Heyns, Marc (1997) -
Effect of Fe contamination on quality of poly silicon gate structures
Mertens, Paul; De Gendt, Stefan; Depas, Michel; Kenis, Karine; Opdebeeck, Ann; Snee, Peter; Gräf, D.; Brown, G.; Heyns, Marc (1996) -
Effect of oxidation ramp up on the redistribution of metallic contamination in gate oxides
Mertens, Paul; Rotondaro, Antonio; Meuris, Marc; Schmidt, Harald; Heyns, Marc; Gräf, D. (1994) -
Environmentally-friendly chlorine during oxidation
Mertens, Paul; Vermeire, Bert; McGeary, M. J.; Meuris, Marc; Heyns, Marc; Depas, Michel; Sees, J.; O'Brien, S. C.; Gräf, D. (1995) -
Evaluation of Si surface conditions by the use of surface photovoltage technique
Trauwaert, Marie-Astrid; Kenis, Karine; Caymax, Matty; Mertens, Paul; Heyns, Marc; Vanhellemont, J.; Gräf, D.; Wagner, P. (1998) -
Extraction of the carrier generation and recombination lifetime from the forward characteristics of advanced diodes
Poyai, Amporn; Simoen, Eddy; Claeys, Cor; Gaubas, Eugenijus; Huber, A.; Gräf, D. (2002) -
Extraction of the carrier generation and recombination lifetime from the forward characteristics of advanced diodes
Poyai, Amporn; Simoen, Eddy; Claeys, Cor; Gaubas, E.; Huber, A.; Gräf, D. (2003) -
Grown-in defect density spectra in czochralski silicon wafers
Kissinger, G.; Gräf, D.; Lambert, U.; Vanhellemont, Jan; Richter, H. (1996) -
How clean is clean enough?
Mertens, Paul; Teerlinck, Ivo; Hurd, Trace; Kenis, Karine; Schmidt, Harald; Rotondaro, Antonio; Hall, L.; Gräf, D.; De Pestel, Freddy; Meuris, Marc; Heyns, Marc (1995) -
Impact of state-of-the-art Cz substrates on the current-voltage characteristics of shallow p-n junctions
Poyai, Amporn; Simoen, Eddy; Claeys, Cor; Huber, A.; Gräf, D.; Gaubas, Eugenijus (2002) -
Investigation of crystal defects in As-grown and processed silicon wafers and heteroepitaxial layers by infrared light scattering
Kissinger, G.; Vanhellemont, Jan; Gräf, D.; Zulehner, W.; Claeys, Cor; Richter, H. (1995) -
IR and MW absorption techniques for bulk and surface recombination control in high-quality silicon
Kaniava, Arvydas; Menczigar, U.; Vanhellemont, Jan; Poortmans, Jef; Rotondaro, Antonio; Gaubas, Eugenijus; Vaitkus, J.; Köster, L.; Gräf, D. (1995) -
IR-LST a powerful non-invasive tool to observe crystal defects in as-grown silicon, after device processing, and in heteroepitaxial layers
Kissinger, G.; Vanhellemont, Jan; Gräf, D.; Claeys, Cor; Richter, H. (1996) -
Lattice defects in high quality as-grown CZ silicon, studied with light scattering and preferential etching techniques
Vanhellemont, Jan; Kissinger, G.; Gräf, D.; Kenis, Karine; Depas, Michel; Mertens, Paul; Lambert, U.; Heyns, Marc; Claeys, C.; Richter, H.; Wagner, Patrick (1995) -
Light scattering tomography study of lattice defects in high quality as-grown Cz silicon wafers and their evolution during gate oxidation
Vanhellemont, Jan; Kissinger, G.; Gräf, D.; Kenis, Karine; Depas, Michel; Mertens, Paul; Lambert, U.; Heyns, Marc; Claeys, Cor; Richter, H.; Wagner, P. (1996)