Browsing by author "Iacopi, Francesca"
Now showing items 21-40 of 102
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Characteristics of indium-nanoparticle-catalyzed Si nanowires
Wang, Zhiwei; Li, Ziyou; Palmer, R.E.; Iacopi, Francesca (2008) -
Characterization and optimization of Cu-low k for 45nm and beyond
Maex, Karen; Brongersma, Sywert; Iacopi, Francesca; Travaly, Youssef; Tokei, Zsolt; Bruynseraede, Christophe; Beyer, Gerald (2004) -
Characterization of molecular sieve coating using ellipsometric porosimetry
Eslava Fernandez, Salvador; Baklanov, Mikhaïl; Kirschhock, Christine E. A.; Iacopi, Francesca; Aldea, Steliana; Maex, Karen; Martens, Johan A. (2008) -
Characterization of porous structure in ultra-low-k dielectrics by depositing thin conductive cap layers
Iacopi, Francesca; Tokei, Zsolt; Stucchi, Michele; Brongersma, Sywert; Vanhaeren, Danielle; Maex, Karen (2003) -
Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions
Eslava Fernandez, Salvador; Kirschhock, Christine E. A.; Aldea, Steliana; Baklanov, Mikhaïl; Iacopi, Francesca; Maex, Karen; Martens, Johan A. (2009) -
Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric
Abell, Thomas; Iacopi, Francesca; Prokopowicz, Greg; Sun, Brad; Mazurenko, Alex; Travaly, Youssef; Baklanov, Mikhaïl; Jonas, Alain; Sullivan, Chris; Brongersma, Sywert; Liou, Huey-Chiang; Tower, Josua; Gostein, Michael; Gallagher, Mike; Calvert, Jeff; Moinpour, Mansour; Maex, Karen (2005-01) -
Compressive stress relaxation through buckling on a low-k polymer-thin cap layer system
Iacopi, Francesca; Brongersma, Sywert; Maex, Karen (2003) -
Continued scalability of copper/low-k interconnects
Brongersma, Sywert; Carbonell, Laure; Vanstreels, Kris; Iacopi, Francesca; D'Haen, Jan; Zhang, Wenqi; Travaly, Youssef; Demuynck, Steven; Tokei, Zsolt; De Ceuninck, Ward; Maex, Karen (2005) -
Correlation between barrier integrity and TDDB performance of copper porous low-k interconnects
Tokei, Zsolt; Patz, Matthias; Schmidt, Michael; Iacopi, Francesca; Demuynck, Steven; Maex, Karen (2004) -
Cryogenic approaches to low-damage patterning of porous low-k films
Iacopi, Francesca; Stauss, Sven; Terashima, Kazuo; Baklanov, Mikhaïl (2012) -
Cu/LKD-5109 damascene integration demonstration using FF-02 low-k spin-on hard-mask and embedded etch-stop
Kokubo, Terukazu; Das, Arabinda; Furukawa, Yukiko; Vos, Ingrid; Iacopi, Francesca; Struyf, Herbert; Van Aelst, Joke; Maenhoudt, Mireille; Tokei, Zsolt; Vervoort, Iwan; Bender, Hugo; Stucchi, Michele; Schaekers, Marc; Boullart, Werner; Van Hove, Marleen; Vanhaelemeersch, Serge; Peterson, William; Shiota, A.; Maex, Karen (2002) -
Damage layer in silica-based low-k material induced by the patterning plasma process studied by energy-filtered TEM
Richard, Olivier; Iacopi, Francesca; Tokei, Zsolt; Bender, Hugo (2005-04) -
Dependence of the minimal PVD Ta(N) sealing thickness on the porosity of Zirkon low-k films
Iacopi, Francesca; Zistl, C.; Jehoul, Christiane; Tokei, Zsolt; Le, Quoc Toan; Das, Arabinda; Sullivan, C.; Prokopowicz, G.; Gronbeck, D.; Gallagher, M.; Calvert, J.; Maex, Karen (2002) -
Diffusion barrier integrity and electrical performance of Cu/porous dielectric damascene lines
Iacopi, Francesca; Tokei, Zsolt; Stucchi, Michele; Lanckmans, Filip; Maex, Karen (2003) -
Effects of silica sources on nanoporous organosilicate films with tetraalkylammonium cations
Eslava Fernandez, Salvador; Urrutia Fernandez de Retana, Jone; Busawon, Abheesh Neervan; Baklanov, Mikhaïl; Iacopi, Francesca; Maex, Karen; Kirschhock, Christine E.A.; Martens, Johan (2009) -
Effects of UV-cure on mechanical, physical and electrical properties of microporous SiOC:H dielectric films
Iacopi, Francesca; Waldfried, Carlo; Abell, Thomas; Guyer, Eric; Eyckens, Brenda; Travaly, Youssef; Sajavaara, Timo; Gage, David M.; Beyer, Gerald; Berry, Ivan; Dauskardt, Reinhold; Maex, Karen (2005) -
Efficient pore sealing crucial for future interconnects
Van Bavel, Mieke; Beyer, Gerald; Iacopi, Francesca; Abell, Thomas; Shamiryan, Denis; Maex, Karen (2004) -
EFTEM as a porosity metrology tool for low-k dielectrics
Hens, S.; Bender, Hugo; Van Landuyt, J.; Iacopi, Francesca; Weidner, K.; Maex, Karen (2002) -
Evaluation of Ta(N) diffusion barrier integrity on porous low-k films
Shamiryan, Denis; Baklanov, Mikhaïl; Tokei, Zsolt; Iacopi, Francesca; Maex, Karen (2002) -
Evaluation of thin Ta(N) film integrity deposited on porous glasses
Shamiryan, Denis; Baklanov, Mikhaïl; Yanovitskaya, Z.S.; Zverev, A.V.; Tokei, Zsolt; Iacopi, Francesca; Maex, Karen (2003)