Browsing by author "Varela Pedreira, Olalla"
Now showing items 21-40 of 80
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Cu resistivity and intrinsic EM-reliability study in Ta/Cu, Co/Cu and Ru/Cu systems for advanced BEOL Cu interconnections
Jourdan, Nicolas; Varela Pedreira, Olalla; van der Veen, Marleen; Adelmann, Christoph; Van Elshocht, Sven; Tokei, Zsolt (2018) -
CVD-Mn/CVD-Ru-based barrier/liner solution for advanced BEOL Cu/low-k interconnects
Jourdan, Nicolas; van der Veen, Marleen; Vega Gonzalez, Victor; Croes, Kristof; Lesniewska, Alicja; Varela Pedreira, Olalla; Van Elshocht, Sven; Boemmels, Juergen; Tokei, Zsolt (2016) -
Damascene benchmark of Ru, Co and Cu in scaled dimensions
van der Veen, Marleen; Heylen, Nancy; Varela Pedreira, Olalla; Ciofi, Ivan; Decoster, Stefan; Vega Gonzalez, Victor; Jourdan, Nicolas; Struyf, Herbert; Croes, Kristof; Wilson, Chris; Tokei, Zsolt (2018) -
Design, fabrication and testing of wafer-level thin film vacuum packages for MEMS based on nanoporous alumina membranes
Zekry, Joseph; Sabuncuoglu Tezcan, Deniz; Cherman, Vladimir; Varela Pedreira, Olalla; Wang, Bo; El Ghannudi, Hamza; Celis, Jean-Pierre; Puers, Bob; Van Hoof, Chris; Tilmans, Harrie (2013-01) -
Electromigration activation energies in alternative metal interconnects
Beyne, Sofie; Varela Pedreira, Olalla; Oprins, Herman; De Wolf, Ingrid; Tokei, Zsolt; Croes, Kristof (2019) -
Electromigration activation energies in ruthenium interconnects
Beyne, Sofie; Varela Pedreira, Olalla; Oprins, Herman; De Wolf, Ingrid; Tokei, Zsolt; Croes, Kristof (2019) -
Electromigration and thermal storage study of barrierless Co vias
Varela Pedreira, Olalla; Croes, Kristof; Zahedmanesh, Houman; Vandersmissen, Kevin; van der Veen, Marleen; Vega Gonzalez, Victor; Dictus, Dries; Zhao, Larry; Kolics, Artur; Tokei, Zsolt (2018) -
Electromigration limits of copper nano-interconnects
Zahedmanesh, Houman; Varela Pedreira, Olalla; Tokei, Zsolt; Croes, Kristof (2021) -
Electromigration Performance Improvement of Metal Heaters for Si Photonic Ring Modulators
Coenen, David; Croes, Kristof; Tsiara, Artemisia; Oprins, Herman; Simons, Veerle; Varela Pedreira, Olalla; Ban, Yoojin; Van Campenhout, Joris; De Wolf, Ingrid (2022-07-01) -
Electromigration scaling limits of copper interconnects
Varela Pedreira, Olalla; Zahedmanesh, Houman; Ciofi, Ivan; Tokei, Zsolt; Croes, Kristof (2019) -
Enabling 3-level High Aspect Ratio Supervias for 3nm nodes and below
Montero Alvarez, Daniel; Vega Gonzalez, Victor; Feurprier, Yannick; Varela Pedreira, Olalla; Oikawa, Noriaki; Martinez Alanis, Gerardo Tadeo; Batuk, Dmitry; Puliyalil, Harinarayanan; Versluijs, Janko; De Coster, Hanne; Bazzazian, Nina; Jourdan, Nicolas; Kumar, Kaushik; Lazzarino, Frederic; Murdoch, Gayle; Park, Seongho; Tokei, Zsolt (2022-06-29) -
Exploring the Benefits of Cryogenic Temperatures for Co and Ru Metallizations
Tierno, Davide; Ciofi, Ivan; Parvais, Bertrand; Croes, Kristof; Varela Pedreira, Olalla (2023) -
Exploring W-Cu hybrid dual damascene metallization for future nodes
Lei, W.; Pethe, S.; Hwang, S.; Chen, F.; Wu, Z.; Machillot, J.; Cockburn, A.; Jansen, A.; van der Veen, Marleen; Varela Pedreira, Olalla; Heylen, Nancy; Jourdan, Nicolas; Lariviere, Stephane; Park, Seongho; Struyf, Herbert; Tokei, Zsolt (2021) -
Extending the Cu metallization and alternatives
van der Veen, Marleen; Jourdan, Nicolas; Vega Gonzalez, Victor; Vandersmissen, Kevin; Wilson, Chris; Varela Pedreira, Olalla; Boemmels, Juergen; Struyf, Herbert; Tokei, Zsolt (2017) -
First demonstration of Two Metal Level Semi-damascene Interconnects with Fully Self-aligned Vias at 18MP
Murdoch, Gayle; O'Toole, Martin; Marti, Giulio; Pokhrel, Ankit; Tsvetanova, Diana; Decoster, Stefan; Kundu, Souvik; Oniki, Yusuke; Thiam, Arame; Le, Quoc Toan; Varela Pedreira, Olalla; Lesniewska, Alicja; Martinez Alanis, Gerardo Tadeo; Park, Seongho; Tokei, Zsolt (2022-06-15) -
Functionality, yield and reliability analysis of SiGe micro-mirrors using automated optical measurement techniques
De Wolf, Ingrid; De Coster, Jeroen; Varela Pedreira, Olalla; Haspeslagh, Luc; Witvrouw, Ann (2009) -
High throughput measurement techniques for wafer level yield inspection of MEMS devices
Varela Pedreira, Olalla; Lauwagie, Tom; De Coster, Jeroen; Haspeslagh, Luc; Witvrouw, Ann; De Wolf, Ingrid (2008) -
High-aspect-ratio ruthenium lnes for buried power rail
Gupta, Anshul; Kundu, Shreya; Teugels, Lieve; Boemmels, Juergen; Adelmann, Christoph; Heylen, Nancy; Jamieson, Geraldine; Varela Pedreira, Olalla; Ciofi, Ivan; Chava, Bharani; Wilson, Chris; Tokei, Zsolt (2018) -
Highly reliable CMOS-integrated 11MPixel SiGe-based micro-mirror arrays for high-end industrial applications
Haspeslagh, Luc; De Coster, Jeroen; Varela Pedreira, Olalla; De Wolf, Ingrid; Du Bois, Bert; Verbist, Agnes; Van Hoof, Rita; Willegems, Myriam; Locorotondo, Sabrina; Bryce, George; Vaes, Jan; van Drieenhuizen, Bert; Witvrouw, Ann (2008) -
Hybrid Metallization with Cu in sub 30nm Interconnects
van der Veen, Marleen; Soethoudt, Job; Delabie, Annelies; Varela Pedreira, Olalla; Vega Gonzalez, Victor; Lariviere, Stephane; Teugels, Lieve; Jourdan, Nicolas; Decoster, Stefan; Struyf, Herbert; Wilson, Chris; Croes, Kristof; Tokei, Zsolt (2020)