Browsing Conference contributions by author "Iacopi, Francesca"

A 35nm diameter vertical silicon nanowire short-gate tunnelFET

Vandooren, Anne; Rooyackers, Rita; Leonelli, Daniele; Iacopi, Francesca; De Gendt, Stefan; Verhulst, Anne; Heyns, Marc; Kunnen, Eddy; Nguyen, Duy; Demand, Marc; Ong, Patrick; Lee, Willie; Moonens, Jos; Richard, Olivier; Vandenberghe, William; Groeseneken, Guido (2009)

A new ultra-low K ILD material based on organic-inorganic hybrid resins

Zhong, Ben; Meynen, Herman; Iacopi, Francesca; Weidner, Ken; Malhouitre, Stéphane; Moyer, Eric; Bargeron, Cory; Schalk, Paul; Peck, Alan; Van Hove, Marleen; Maex, Karen (2002)

Aggressive scaling of Cu lowk: impact on metrology

Maex, Karen; Brongersma, Sywert; Iacopi, Francesca; Vanstreels, Kris; Travaly, Youssef; Baklanov, Mikhaïl; D'Haen, Jan; Beyer, Gerald (2005)

Alternative catalysts for si-technology compatible growth of si nanowires

Iacopi, Francesca; Vereecken, Philippe; Schaekers, Marc; Caymax, Matty; Moelans, Nele; Blanpain, Bart; Detavernier, C.; D'Haen, Jan; Griffiths, Hefin (2007)

Alternative catalysts for Si-technology compatible growth of Si nanowires

Iacopi, Francesca; Vereecken, Philippe; Schaekers, Marc; Caymax, Matty; Moelans, Nele; Blanpain, Bart; Detavernier, C.; D'Haen, Jan; Griffiths, Hefin (2007)

Barrier deposition on porous low-k films

Shamiryan, Denis; Yanovitskaya, Z.S.; Iacopi, Francesca; Maex, Karen (2003)

Barrier process development for damascene integration of porous SiLK resin films

Tokei, Zsolt; Waeterloos, Joost; Iacopi, Francesca; Caluwaerts, Rudy; Struyf, Herbert; Van Aelst, Joke; Maex, Karen (2002)

Buckling instabilities of thin cap layers deposited onto low-k dielectric films

Iacopi, Francesca; Brongersma, Sywert; Abell, Thomas; Maex, Karen (2003)

Calculation of thermodynamic equilibrium conditions between a liquid nanoparticle and a solid nanowires

Eichhammer, Yann; Moelans, Nele; Iacopi, Francesca; Blanpain, Bart; Heyns, Marc (2009)

Challenges of clean/strip processing for Cu/LowK technology

Baklanov, Mikhaïl; Le, Quoc Toan; Kesters, Els; Iacopi, Francesca; Van Aelst, Joke; Struyf, Herbert; Boullart, Werner; Vanhaelemeersch, Serge; Maex, Karen (2004)

Characterization and optimization of Cu-low k for 45nm and beyond

Maex, Karen; Brongersma, Sywert; Iacopi, Francesca; Travaly, Youssef; Tokei, Zsolt; Bruynseraede, Christophe; Beyer, Gerald (2004)

Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric

Abell, Thomas; Iacopi, Francesca; Prokopowicz, Greg; Sun, Brad; Mazurenko, Alex; Travaly, Youssef; Baklanov, Mikhaïl; Jonas, Alain; Sullivan, Chris; Brongersma, Sywert; Liou, Huey-Chiang; Tower, Josua; Gostein, Michael; Gallagher, Mike; Calvert, Jeff; Moinpour, Mansour; Maex, Karen (2005-01)

Cryogenic approaches to low-damage patterning of porous low-k films

Iacopi, Francesca; Stauss, Sven; Terashima, Kazuo; Baklanov, Mikhaïl (2012)

Cu/LKD-5109 damascene integration demonstration using FF-02 low-k spin-on hard-mask and embedded etch-stop

Kokubo, Terukazu; Das, Arabinda; Furukawa, Yukiko; Vos, Ingrid; Iacopi, Francesca; Struyf, Herbert; Van Aelst, Joke; Maenhoudt, Mireille; Tokei, Zsolt; Vervoort, Iwan; Bender, Hugo; Stucchi, Michele; Schaekers, Marc; Boullart, Werner; Van Hove, Marleen; Vanhaelemeersch, Serge; Peterson, William; Shiota, A.; Maex, Karen (2002)