Authors
Zidan, Mohamed;
Fischer, Daniel;
Lorusso, Gian;
Severi, Joren;
De Simone, Danilo;
Moussa, Alain;
Muellender, Angelika;
Mack, Chris A.;
Charley, Anne-Laure;
Leray, Philippe;
De Gendt, Stefan
EISBN
978-1-5106-4982-8
ISBN
978-1-5106-4981-1
ISSN
0277-786X
Conference
Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference
Journal
Proceedings of SPIE
Volume
12053
Title
Low-Voltage Aberration-Corrected SEM Metrology of Thin Resist for High-NA EUVL
Publication type
Proceedings paper
