Browsing by Author "Kimura, K."
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Publication Advanced characterization of high-K materials: a nuclear approach
Journal article2002, Nuclear Instruments & Methods in Physics Research B, 190, p.505-509Publication Advanced RBS analysis of thin films in micro-electronics
Proceedings paper2001, Application of Accelerators in Research and Industry: Sixteenth International Conference; Denton, TX, USA, 1-5 Nov 2000., p.470-475Publication Advanced RBS analysis of thin films in micro-electronics
Oral presentation2000, 16th International Conference on the Application of Accelerators in Research and Industry - CAARI; 1-4 November 2000; Denton, TXPublication Characterization of ultra thin layers by Rutherford backscattering spectrometry
Proceedings paper1999, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, 16/09/1999, p.160-169Publication Characterization of ultra thin oxynitrides, a general approach
Oral presentation1999, IBA-14-ECAART-6; July 1999; Dresden, Germany.Publication Characterization of ultra thin oxynitrides: a general approach
Journal article2000, Nuclear Instruments and Methods B, 161-163, p.429-434Publication Cluster effect on projected range of 30 keV C60+ in silicon
Journal article2011, Nuclear Instruments and Methods in Physics Research B, (269) 19, p.2080-2083Publication Comparative growth kinetics of SiGe in a commercial reduced pressure chemical vapour deposition EPI reactor and anomalies during growth of thin Si layers on SiGe
Proceedings paper1998, Epitaxy and Applications of Si-Based Heterostructures, 13/04/1998, p.339-344Publication Errors in near-surface and interfacial profiling of boron and arsenic
Journal article2004-06, Applied Surface Science, 231-232, p.618-631Publication Errors in near-surface and interfacial profiling of boron and arsenic
Proceedings paper2004-05, Proceedings of the 14th Int. Conference on Secondary Ion Mass Spectometry and Related Topics, 14/09/2003, p.618-631Publication EXLE-SIMS: dramatically enhanced accuracy for dose loss metrology
Proceedings paper2008, 17th International Conference in Ion Implantation Technology - IIT, 8/06/2008, p.109-112Publication New ways for the mediation of the charge transfer mechanism in P3HT:PCBM bulk heterojunction solar cells by the use of graphene and its derivates
Oral presentation2012, Hasselt Diamond Workshop - SBDD XVIIPublication Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD
Oral presentation2001, 15th International Conference on Ion Beam Analysis (IBA); July 2001; Cairns, Australia.Publication Quantitative analysis of thin dielectrica with ultra high resolution ERD, MEIS and RBS
Meeting abstract2007, International Workshop on High-Resolution Depth Profiling, 17/06/2007Publication Recent developments in nuclear methods in support of semiconductor characterization
Proceedings paper2003, Analytical Techniques for Semiconductor Materials and Processes, 27/04/2003, p.50-62Publication The analysis of a thin SiO2/SixN1-x/SiO2 stack, a comparative study of low energy ERD with XPS, low energy SIMS, HRBS, HR-ERD
Oral presentation2005, 17th International Conference on Ion Beam AnalysisPublication The analysis of ultra-thin films with HRBS-30
Meeting abstract2009, 5th International Workshop on High-Resolution Depth Profiling, 15/11/2009