Browsing by Author "Lin, Rong"

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Van Daele, Benny

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Satta, Alessandra

Proceedings paper

2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 6/05/2007

Publication

Advanced carrier depth profiling on Si and Ge with micro four-point probe

Clarysse, Trudo

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Eyben, Pierre

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Van Daele, Benny

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Satta, Alessandra

Journal article

2008, Journal of Vacuum Science and Technology B, (26) 1, p.317-321

Publication

Electrical characterization of InGaAs ultra-shallow junctions

Petersen, Dirch H.

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Hansen, Ole

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Boggild, Peter

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Lin, Rong

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Nielsen, Peter F.

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Lin, Dennis

Proceedings paper

2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009

Publication

Electrical characterization of InGaAs ultra-shallow junctions

Petersen, Dirch H.

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Hansen, Ole

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Bĝggild, Peter

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Lin, Rong

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Nielsen, Peter F.

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Lin, Dennis

Journal article

2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C41-C1C47

Publication

High precision micro-scale Hall effect characterization method using in-line micro four-point probes

Petersen, Dirch

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Hansen, Ole

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Lin, Rong

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Nielsen, P.F.

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Clarysse, Trudo

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Goossens, Jozefien

Proceedings paper

2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 30/09/2008, p.251-256

Publication

High precision micro-scale Hall effect characterization method using in-line micro four-point probes

Petersen, Dirch

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Hansen, Olaf

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Clarysse, Trudo

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Goossens, Jozefien

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Proceedings paper

2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 30/09/2008, p.251-255

Publication

Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctions

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Vandervorst, Wilfried

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Clarysse, Trudo

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Goossens, Jozefien

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Proceedings paper

2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 30/09/2008, p.135-140

Publication

Micro probe carrier profiling of ultra-shallow structures in germanium

Clarysse, Trudo

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Proceedings paper

2010, Materials and Devices for End-of-Roadmap and Beyond CMOS Scaling, 5/04/2010, p.1252-I05-20

Publication

On the analysis of the activation mechanisms of sub-melt laser anneals

Clarysse, Trudo

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Goossens, Jozefien

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Journal article

2008, Materials Science and Engineering B, 154-155, p.24-30

Publication

Photo-voltage versus micro-probe sheet resistance measurements on ultra-shallow structures

Clarysse, Trudo

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Proceedings paper

2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009

Publication

Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures

Clarysse, Trudo

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Journal article

2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C8-C1C14

Publication

Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Petersen, Dirch

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Hansen, Ole

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Hansen, Torben

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Boggild, Peter

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Lin, Rong

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Kjaer, Daniel

Journal article

2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C27-C1C33

Publication

Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Petersen, Dirch H.

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Hansen, Ole

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Hansen, Torben M.

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Boggild, Peter

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Lin, Rong

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Kjaer, Daniel

Proceedings paper

2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009

Publication

Study of submelt laser induced junction nonuniformities using Therma-Probe

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