Browsing by Author "Zhao, Chao"

3D stacked IC demonstration using a through silicon via first approach

A DRAM compatible Cu contact using self-aligned Ta-silicide and Ta-barrier

A Fast DCIV Technique for Characterizing the Generation and Repassivation of Interface Traps Under DC/AC NBTI Stress/Recovery Condition in Si p-FinFETs

A microstructural study of the thermal stability of atomic layer deposited Al2O3 thin films

ALD HfO2 surface preparation study

ALD High-k growth on Ge substrates

Alleviation of Negative-Bias Temperature Instability in Si p-FinFETs With ALD W Gate-Filling Metal by Annealing Process Optimization

Alternative gate insulator materials for future generation MOSFETs

Application of x-ray fluorescence spectrometry in charaterization of high-k uktra-thin films

Atomic layer deposition of hafnium oxide on germanium substrates

Atomic layer deposition of Ru and RuO2 for MIMCAP applications

Atomic layer deposition of Ru and RuO2 for MIMCAP applications

Band alignment at the interface of (100)Si with HfxTa1-xOy high-k dielectric layers

Band alignment between (100)Si and complex rare earth/transition metal oxides

Band alignment between (100)Si and complex rare-earth/transition metal oxides

Band alignment between (100)Si and Hf-based complex metal oxides

Barrier reliability for Cu contacts

Bulk properties of MOCVD-deposited HfO2 layers for high-k dielectric applications

Characterisation of AlCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties

Characterisation of ALCVD ZrO2 thin films by TEM