Browsing by author "Vinckier, Chris"
Now showing items 1-20 of 81
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A detailed study on the growth of thin oxide layers on silicon using ozonated solutions
De Smedt, Frank; Vinckier, Chris; Cornelissen, Ingrid; De Gendt, Stefan; Heyns, Marc (2000) -
A force study in brush scrubbing
Xu, Kaidong; Vos, Rita; Vereecke, Guy; Doumen, Geert; Fyen, Wim; Mertens, Paul; Heyns, Marc; Vinckier, Chris; Fransaer, Jan (2005) -
A Ge matrix removal method for metallic contamination analysis on Ge wafers using TXRF
Hellin, David; Geens, Veerle; Teerlinck, Ivo; Rip, Jens; Theuwis, Antoon; De Gendt, Stefan; Vinckier, Chris (2004) -
A mechanism for the silicon oxide growth by ozonated solutions
De Smedt, Frank; Vinckier, Chris; De Gendt, Stefan; Cornelissen, Ingrid; Heyns, Marc (1999) -
A mechanism for the silicon oxide growth by ozonated solutions
De Smedt, Frank; Vinckier, Chris; De Gendt, Stefan; Cornelissen, Ingrid; Heyns, Marc (2000) -
A study of the influence of typical wet chemical treatments on the germanium wafer surface
Onsia, Bart; Conard, Thierry; De Gendt, Stefan; Heyns, Marc; Hoflijk, Ilse; Mertens, Paul; Meuris, Peter; Raskin, G.; Sioncke, Sonja; Teerlinck, I; Theuwis, A.; Van Steenbergen, Jan; Vinckier, Chris (2004) -
A study of the influence of typical wet chemical treatments on the germanium wafer surface
Onsia, Bart; Conard, Thierry; De Gendt, Stefan; Heyns, Marc; Hoflijk, Ilse; Mertens, Paul; Meuris, Peter; Raskin, G.; Sioncke, Sonja; Teerlinck, Ivo; Theuwis, A.; Van Steenbergen, Jan; Vinckier, Chris (2005) -
A wet chemical method for the determination of thickness of SiO2 layers below the nanometer level
De Smedt, Frank; Stevens, G.; De Gendt, Stefan; Cornelissen, Ingrid; Arnauts, Sophia; Meuris, Marc; Heyns, Marc; Vinckier, Chris (1999) -
Aging phenomena in the removal of nano-particles from Si wafers
Vereecke, Guy; Veltens, J.; Xu, Kaidong; Eitoku, A.; Sano, Ken-Ichi; Arnauts, Sophia; Kenis, Karine; Snow, J.; Vinckier, Chris; Mertens, Paul (2008) -
Atomic layer deposition of Hf-based materials in semiconductor applications
Nyns, Laura; Delabie, Annelies; Heyns, Marc; Pourtois, Geoffrey; Van Elshocht, Sven; Vinckier, Chris; De Gendt, Stefan (2008) -
Atomic layer deposition of HfO2 on (100) and (110) oriented silicon surfaces
Nyns, Laura; Ragnarsson, Lars-Ake; Hall, Lindsey; Delabie, Annelies; Heyns, Marc; Van Elshocht, Sven; Vinckier, Chris; Zimmerman, Paul; De Gendt, Stefan (2007) -
Boosting the efficiency of solar cells fabricated on electromagnetic cold crucible cast multicrystalline silicon by means of hydrogen passivation
El Gamel, Hussam; Ghannam, Moustafa; Vinckier, Chris; Nijs, Johan; Mertens, Robert; Van Overstraeten, Roger (1994) -
Can we increase the efficiency of organic contamination removal by ozone/di-water processes by using additives
De Smedt, Frank; Vankerckhoven, Hans; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2002) -
Can we increase the efficiency of organic contamination removal by ozone/Di-water processes by using additives?
De Smedt, Frank; Vankerckhoven, H.; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2003) -
Chlorine detection and quantification in ALCVD HfO2 high-k dielectric films using total reflection X-ray fluorescence spectrometry
Hellin, David; Delabie, Annelies; Puurunen, Riikka; Conard, Thierry; De Gendt, Stefan; Vinckier, Chris (2003) -
Cleaning of nanoparticles in semiconductor manufacturing
Vereecke, Guy; Arnauts, Sophia; Doumen, Geert; Eitoku, Atsuro; Fransaer, J.; Fyen, Wim; Holsteyns, Frank; Kenis, Karine; Lee, Kuntack; Lux, Marcel; Snow, Jim; Vinckier, Chris; Vos, Rita; Xu, Kaidong; Mertens, Paul (2004) -
Comparison of bulk and surface passivation properties of plasma nitrides on Si and SiGe solar cells
Said, Khalid; Beaucarne, Guy; Libezny, Milan; Laureys, Wim; Vinckier, Chris; Nijs, Johan; Poortmans, Jef (1997) -
Correlation between haze of the wafer and particle-count on wafers: a new approach to monitor nano-sized particles
Xu, Kaidong; Vos, Rita; Vereecke, Guy; Lux, Marcel; Fyen, Wim; Holsteyns, Frank; Kenis, Karine; Mertens, Paul; Heyns, Marc; Vinckier, Chris (2002) -
Determination of degradation products in O3/DI processes
Vankerckhoven, Hans; De Smedt, Frank; Van Herp, Bart; Claes, M.; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2001) -
Determination of metallic contaminants on Ge wafers using direct- and droplet sandwich etch- total reflection X-ray fluorescence spectrometry
Hellin, David; Bearda, Twan; Zhao, Chao; Raskin, G.; Mertens, Paul; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2003-12)