Browsing by author "Verdonck, Patrick"
Now showing items 61-80 of 154
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Extreme scaling of low-k dielectric for sub 45 nm BEOL roadmaps
Verdonck, Patrick (2009) -
Fabrication of porogen residue free ultra low-k PECVD material by subsequent H2-afterglow plasma treatment and UV curing
Urbanowicz, Adam; Vanstreels, Kris; Verdonck, Patrick; Shamiryan, Denis; Cremel, Maxime; De Gendt, Stefan; Baklanov, Mikhaïl (2010) -
First evaluation of new advanced SOG 2.0 low-k material
Smirnov, Evgeny; Vanstreels, Kris; Verdonck, Patrick; Shamiryan, Denis; Baklanov, Mikhaïl; Phillips, Mark (2010) -
Fundamental study of atomic layer deposition in and on porous low-k films
Verdonck, Patrick; Delabie, Annelies; Swerts, Johan; Farrell, L; Baklanov, Mikhaïl; Tielens, Hilde; Van Besien, Els; Witters, J.; Nyns, Laura; Van Elshocht, Sven (2011) -
Hafnium aluminates deposited by atomic layer deposition: Structural characterization by X-ray spectroscopy
Huanca, D.R.; Christiano, V.; Adelmann, Christoph; Kellerman, G.; Verdonck, Patrick; dos Santos Filho, S. (2012) -
HF etching mechanisms of advanced low-k films
Verdonck, Patrick; Le, Quoc Toan; Krishtab, Mikhail; Vanstreels, Kris; Armini, Silvia; Simone, A.; Nguyen, Mai Phuong; Van Elshocht, Sven; Baklanov, Mikhaïl (2014) -
Impact of carbon-doping on time dependent dielectric breakdown of SiO2-based films
Zhao, Larry; Barbarin, Yohan; Croes, Kristof; Baklanov, Mikhaïl; Verdonck, Patrick; Tokei, Zsolt; Claeys, Cor (2015) -
Impact of oxide liner properties on TSV Cu pumping and TSV stress
De Messemaeker, Joke; Varela Pedreira, Olalla; Moussa, Alain; Nabiollahi, Nabi; Vanstreels, Kris; Van Huylenbroeck, Stefaan; Philipsen, Harold; Verdonck, Patrick; Vandevelde, Bart; De Wolf, Ingrid; Beyne, Eric; Croes, Kristof (2015) -
Impact of plasma pretreatment and pore size on the sealing of ultra low-k dielectrics by self-assembling monolayers
Sun, Yiting; Krishtab, Mikhail; Struyf, Herbert; Verdonck, Patrick; De Feyter, Steven; Baklanov, Mikhaïl; Armini, Silvia (2014) -
Impact of UV cure time and wavelength on chemical, mechanical and electrical properties of PECVD deposited porous ultra low-k films
Godavarthi, Srinivas; Le, Quoc Toan; Verdonck, Patrick; Mardani, Shabnam; Vanstreels, Kris; Van Besien, Els; Baklanov, Mikhaïl (2012-03) -
Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films
Godavarthi, Srinivas; Le, Quoc Toan; Verdonck, Patrick; Mardani, Shabnam; Vanstreels, Kris; Van Besien, Els; Baklanov, Mikhaïl (2013) -
Improved low-k dielectric properties using He/H2 plasma for resist removal
Urbanowicz, Adam; Shamiryan, Denis; Marsik, Premysl; Travaly, Youssef; Verdonck, Patrick; Vanstreels, Kris; Ferchichi, Abdelkarim; De Roest, David; Sprey, Hessel; Matsushita, K.; Kaneko, S.; Tsuji, N.; Luo, S.; Escorcia, O.; Berry, Ivan; Waldfried, Carlo; De Gendt, Stefan; Baklanov, Mikhaïl (2008) -
Improved low-k dielectric properties using He/H2 plasma for resist removal
Urbanowicz, Adam; Shamiryan, Denis; Marsik, Premysl; Travaly, Youssef; Jonas, Alain; Verdonck, Patrick; Vanstreels, Kris; Ferchichi, Abdelkarim; De Roest, David; Sprey, Hessel; Matsushita, Kiyohiro; Kaneko, Shinya; Tsuji, Naoto; Luo, Shijian; Escorcia, Orlando; Berry, Ivan; Waldfried, Carlo; De Gendt, Stefan; Baklanov, Mikhaïl (2009) -
Improving mechanical robustness of ultra-low-k SiOCH PECVD glasses by controlled porogen decomposition prior to UV-hardening
Urbanowicz, Adam; Vanstreels, Kris; Verdonck, Patrick; Shamiryan, Denis; De Gendt, Stefan; Baklanov, Mikhaïl (2010) -
Improving mechanical robustness of ultra-low-k SiOCH PECVD materials
Urbanowicz, Adam; Vanstreels, Kris; Verdonck, Patrick; Shamiryan, Denis; De Gendt, Stefan; Baklanov, Mikhaïl (2010) -
Influence and evolution of 193i resist composition during VUV exposure
Kunnen, Eddy; Vaglio Pret, Alessandro; Verdonck, Patrick; Gronheid, Roel (2012) -
Influence of composition of SiCN as interfacial layer on plasma activated direct bonding
Inoue, Fumihiro; Peng, Lan; Iacovo, Serena; Phommahaxay, Alain; Verdonck, Patrick; Meersschaut, Johan; Dara, Praveen; Sleeckx, Erik; Miller, Andy; Beyer, Gerald; Beyne, Eric (2019) -
Influence of composition of SiCN for surface activated bonding
Inoue, Fumihiro; Peng, Lan; Iacovo, Serena; Phommahaxay, Alain; Visker, Jakob; Verdonck, Patrick; Meersschaut, Johan; Dara, Praveen; Sleeckx, Erik; Miller, Andy; Beyne, Eric (2018) -
Influence of the ion bombardment of O2 plasmas on low-k materials
Verdonck, Patrick; Samara, Vladimir; Goodyear, Alec; Ferchichi, Abdelkarim; Van Besien, Els; Baklanov, Mikhaïl; Braithwaite, Nicholas (2011) -
Influence of the UV Cure on advanced PECVD low-k materials
Verdonck, Patrick; Van Besien, Els; Trompoukis, Christos; Vanstreels, Kris; Urbanowicz, Adam; De Roest, David; Baklanov, Mikhaïl (2010)