Browsing by author "Verdonck, Patrick"
Now showing items 81-100 of 153
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Influence of varying porogen loads and different UV cures on low-k film characteristics
Farrel, Leo; Verdonck, Patrick; Van Besien, Els; Ciofi, Ivan; Borrello, Gianpaolo; Vanstreels, Kris; Mardani, Shabnam; Baklanov, Mikhaïl (2011) -
Integration and dielectric reliability of 30nm 1/2 pitch structures in Aurora LK HM
Demuynck, Steven; Huffman, Craig; Claes, Martine; Suhard, Samuel; Versluijs, Janko; Volders, Henny; Heylen, Nancy; Kellens, Kristof; Croes, Kristof; Struyf, Herbert; Vereecke, Guy; Verdonck, Patrick; De Roest, David; Beynet, Julien; Sprey, Hessel; Beyer, Gerald (2009) -
Integration and dielectric reliability of 30nm ½ pitch structures in Aurora® LK HM
Demuynck, Steven; Huffman, Craig; Claes, Martine; Suhard, Samuel; Versluijs, Janko; Volders, Henny; Heylen, Nancy; Kellens, Kristof; Croes, Kristof; Struyf, Herbert; Vereecke, Guy; Verdonck, Patrick; De Roest, David; Beynet, Julien; Sprey, Hessel; Beyer, Gerald (2010) -
Integration of a k=2.3 spin-on polymer for the sub-28nm technology node
Wilson, Chris; Lazzarino, Frederic; Truffert, Vincent; Kirimura, Tomoyuki; de Marneffe, Jean-Francois; Verdonck, Patrick; Hirai, M.; Nakatani, K.; Tada, M.; Heylen, Nancy; El-Mekki, Zaid; Vanstreels, Kris; Van Besien, Els; Ciofi, Ivan; Stucchi, Michele; Croes, Kristof; Zhang, Liping; Demuynck, Steven; Ercken, Monique; Xu, Kaidong; Baklanov, Mikhaïl; Tokei, Zsolt (2012) -
Integration of porogen-based low-k films: influence of capping layer thickness and long thermal anneals on low-k damage and reliability
De Roest, David; Vereecke, Bart; Huffman, Craig; Heylen, Nancy; Croes, Kristof; Arai, H; Takamure, N; Beynet, Julien; Sprey, Hessel; Matsushita, K; Kobayashi, N; Verdonck, Patrick; Demuynck, Steven; Beyer, Gerald; Tokei, Zsolt (2009) -
Integration of porogen-based low-k films: influence of capping layer thickness and long thermal anneals on low-k damage and reliability
De Roest, David; Vereecke, Bart; Huffman, Craig; Heylen, Nancy; Croes, Kristof; Arai, H.; Takamure, N.; Beynet, Julien; Sprey, Hessel; Matsushita, K.; Kobayashi, N.; Verdonck, Patrick; Demuynck, Steven; Beyer, Gerald; Tokei, Zsolt (2009) -
Integration of porous low-k dielectrics using post porosity pore protection
Zhang, Liping; de Marneffe, Jean-Francois; Verdonck, Patrick; Heylen, Nancy; Wen, Liang Gong; Wilson, Chris; Tokei, Zsolt; Boemmels, Juergen; De Gendt, Stefan; Baklanov, Mikhail (2016) -
Integration of ultralow-k dielectrics using a template replacement approach
Zhang, Liping; de Marneffe, Jean-Francois; Murdoch, Gayle; Vega Gonzalez, Victor; Verdonck, Patrick; Heylen, Nancy; Zha, Lichen; Wu, Chen; Lesniewska, Alicja; Tokei, Zsolt; Boemmels, Juergen; De Gendt, Stefan; Lefferts, Scott (2017) -
Interplay between plasma modification of surfaces & atomic layer deposition for semiconductor applications
Swerts, Johan; Adelmann, Christoph; Armini, Silvia; Delabie, Annelies; Nyns, Laura; Popovici, Mihaela Ioana; Schaekers, Marc; Verdonck, Patrick; Van Elshocht, Sven (2012) -
Intrinsic effect of porosity on mechanical and fracture properties of nanoporous ultralow-k dielectrics
Vanstreels, Kris; Wu, Chen; Verdonck, Patrick; Baklanov, Mikhaïl (2012) -
Intrinsic effect of porosity on the stiffness and fracture energy of nano porous ultra low-k dielectrics
Vanstreels, Kris; Wu, Chen; Verdonck, Patrick; Schneider, Dieter; Gonzalez, Mario; Martini, Roberto; Baklanov, Mikhaïl (2013) -
Investigations of capacitively-coupled plasmas by electrostatic probe technique
Cirino, Giuseppe; Castro, Raul; Pisani, Marcelo; Verdonck, Patrick; Mansano, Ronaldo; Massi, Marcos; Pessoa, Rodrigo; Barea, Luis; Brahim, Tayeb; Maciel, Homero (2015) -
Key factors to sustain the extension of a MHM-based integration scheme to medium and high porosity PECVD low-k materials
Travaly, Youssef; Van Aelst, Joke; Truffert, Vincent; Verdonck, Patrick; Dupont, Tania; Camerotto, Elisabeth; Richard, Olivier; Bender, Hugo; Croes, Kristof; De Roest, David; Vereecke, Guy; Claes, Martine; Le, Quoc Toan; Kesters, Els; Van Cauwenberghe, Marc; Beynet, Julien; Kaneko, S.; Struyf, Herbert; Baklanov, Mikhaïl; Matsushita, K.; Kobayashi, N.; Sprey, Hessel; Beyer, Gerald (2008) -
Low f-number microlens array fabricated in thick resist
Cirino, Giuseppe; Montagnoli, Arlindo; Verdonck, Patrick; Goncalves Neto, Luiz (2012-04) -
Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: Impact of reducing agents
Delabie, Annelies; Caymax, Matty; Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Bender, Hugo; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; De Gendt, Stefan; Heyns, Marc; Barla, Kathy; Radu, Iuliana; Thean, Aaron (2015) -
Low-k a-SiCO:H films as diffusion barriers for advanced interconnects
Van Besien, Els; Singh, Arjun; Barbarin, Yohan; Verdonck, Patrick; Dekkers, Harold; Vanstreels, Kris; de Marneffe, Jean-Francois; Baklanov, Mikhaïl; Van Elshocht, Sven (2014) -
Mechanical integrity of nano-interconnects as brittle-matrix nano-composites
Zahedmanesh, Houman; Vanstreels, Kris; Le, Quoc Toan; Verdonck, Patrick; Gonzalez, Mario (2018) -
Monolayer controlled deposition of 2D transition metal dichalcogenides on large area substrates
Delabie, Annelies; Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Caymax, Matty; Barla, Kathy; Radu, Iuliana; Thean, Aaron (2015) -
N5 technology node dual-damascene interconnects enabled using multi patterning
Briggs, Basoene; Wilson, Chris; Devriendt, Katia; van der Veen, Marleen; Decoster, Stefan; Paolillo, Sara; Versluijs, Janko; Kesters, Els; Sebaai, Farid; Jourdan, Nicolas; El-Mekki, Zaid; Heylen, Nancy; Verdonck, Patrick; Wan, Danny; Varela Pedreira, Olalla; Croes, Kristof; Dutta, Shibesh; Ryckaert, Julien; Mallik, Arindam; Lariviere, Stephane; Boemmels, Juergen; Tokei, Zsolt (2017) -
Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin films
Lomonosov, Alexey; Ayouch, Adil; Ruello, Pascal; Vaudel, Gwenaele; Baklanov, Mikhaïl; Verdonck, Patrick; Zhao, Larry; Gusev, Vitalyi (2012)