Browsing by author "Röhr, Erika"
Now showing items 1-20 of 34
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A new HF vapor native oxide removal process for cluster applications
Sprey, Hessel; Storm, Arjen; Maes, Jan; Granneman, E. H. A.; Hendriks, Marton; Röhr, Erika; Caymax, Matty; Decoutere, Stefaan; Heyns, Marc (1998) -
A new HF vapor process for native oxide removal, suited for cluster applications
Storm, Arjen; Sprey, Hessel; Maes, Jan; Granneman, E.; De Blank, Rene; Röhr, Erika; Caymax, Matty; Heyns, Marc (1999) -
A perspective on dry laser cleaning for semiconductor manufacturing
Vereecke, Guy; Röhr, Erika; Van Hoeymissen, Jan; Mertens, Paul; Heyns, Marc (2001) -
Compatibility of polysilicon with HfO2-based gate dielectrics for CMOS applications
Kaushik, V.; De Gendt, Stefan; Caymax, Matty; Young, E.; Röhr, Erika; Van Elshocht, Sven; Delabie, Annelies; Claes, Martine; Shi, Xiaoping; Chen, Jerry; Carter, Richard; Conard, Thierry; Vandervorst, Wilfried; Schaekers, Marc; Heyns, Marc (2003) -
Developments in cleaning technology for critical layers
Heyns, Marc; Arnauts, Sophia; Bearda, Twan; Claes, M.; Cornelissen, Ingrid; De Gendt, Stefan; Doumen, Geert; Fyen, Wim; Loewenstein, Lee; Lux, Marcel; Mertens, Paul; Mertens, S.; Meuris, Marc; Onsia, Bart; Röhr, Erika; Schaekers, Marc; Teerlinck, Ivo; Van Doorne, Patrick; Van Hoeymissen, Jan; Vereecke, Guy; Vos, Rita; Wolke, K. (2000) -
Effect of postdeposition anneal conditions on defect density of HfO2 layers measured by wet etching
Claes, Martine; De Gendt, Stefan; Witters, Thomas; Kaushik, Vidya; Conard, Thierry; Zhao, Chao; Manabe, Y.; Delabie, Annelies; Röhr, Erika; Chen, Jerry; Tsai, Wilman; Heyns, Marc (2004) -
Effects of interactions between HfO2 and poly-Si on MOSCAP and MESFET electrical behaviour
Kaushik, Vidya; Röhr, Erika; De Gendt, Stefan; Delabie, Annelies; Van Elshocht, Sven; Claes, Martine; Shimamoto, Yasuhiro; Ragnarsson, Lars-Ake; Witters, Thomas; Manabe, Y.; Heyns, Marc (2003) -
Electrical evaluation of the EPI/substrate interface quality after different in-situ and ex-situ low-temperature pre-epi cleaning methods
Caymax, Matty; Decoutere, Stefaan; Röhr, Erika; Vandervorst, Wilfried; Heyns, Marc; Sprey, Hessel; Storm, Arjen; Maes, J.W. (1998) -
Electrical evaluation of the EPI/substrate interface quality after different in-situ and ex-situ low-temperature pre-epi cleaning methods
Caymax, Matty; Decoutere, Stefaan; Röhr, Erika; Vandervorst, Wilfried; Heyns, Marc; Sprey, Hessel; Storm, Arjen; Maes, J. (1999) -
Evaluation of a dry laser cleaning process
Vereecke, Guy; Röhr, Erika; Heyns, Marc (1998) -
Evaluation of a dry laser cleaning process for the removal of surface particles
Vereecke, Guy; Röhr, Erika; Heyns, Marc (1998) -
Evaluation of a dry laser cleaning process for the removal of surface particles
Vereecke, Guy; Röhr, Erika; Heyns, Marc (1999) -
Fluorine in thermal oxides from HF preoxidation surface treatments
Ruzyllo, Jerzy; Röhr, Erika; Baeyens, Martien; Mertens, Paul; Heyns, Marc (1999) -
Gas-phase surface proessing prior to 3.2nm gate oxidation
Ruzyllo, Jerzy; Röhr, Erika; Baeyens, Martien; Bearda, Twan; Mertens, Paul; Heyns, Marc (1998) -
Gas-phase surface proessing prior to 3.2nm gate oxidation
Ruzyllo, Jerzy; Röhr, Erika; Baeyens, Martien; Bearda, Twan; Mertens, Paul; Heyns, Marc (1999) -
Impact of ALCVD and PVD titanium nitride deposition on metal gate capacitors
Lujan, Guilherme; Schram, Tom; Pantisano, Luigi; Hooker, Jacob; Kubicek, Stefan; Röhr, Erika; Schuhmacher, Jörg; Kilpela, Olli; Sprey, Hessel; De Gendt, Stefan; De Meyer, Kristin (2002) -
Implementation of high-k gate dielectrics - a status update
De Gendt, Stefan; Chen, Jerry; Carter, Richard; Cartier, Eduard; Caymax, Matty; Claes, Martine; Conard, Thierry; Delabie, Annelies; Deweerd, Wim; Kaushik, Vidya; Kerber, Andreas; Kubicek, Stefan; Maes, Jan; Niwa, M.; Pantisano, Luigi; Puurunen, Riikka; Ragnarsson, Lars-Ake; Schram, Tom; Shimamoto, Yasuhiro; Tsai, Wilman; Röhr, Erika; Van Elshocht, Sven; Witters, Thomas; Young, Edward; Zhao, Chao; Heyns, Marc (2003) -
Influence of beam incidence angle on dry laser cleaning of surface parcticles
Vereecke, Guy; Röhr, Erika; Heyns, Marc (2000) -
Integration of high-k gate dielectrics - wet etch, cleaning and surface conditioning
De Gendt, Stefan; Beckx, Stephan; Caymax, Matty; Claes, Martine; Conard, Thierry; Delabie, Annelies; Deweerd, Wim; Kraus, Harald; Onsia, Bart; Paraschiv, Vasile; Puurunen, Riikka; Röhr, Erika; Snow, Jim; Tsai, Wilman; Van Doorne, Patrick; Van Elshocht, Sven; Vertommen, Johan; Witters, Thomas; Heyns, Marc (2003) -
Investigation of fluorine in dry ultrathin silicon oxides
Vereecke, Guy; Röhr, Erika; Carter, Richard; Conard, Thierry; De Witte, Hilde; Heyns, Marc (2000)