Browsing by author "Heyne, Markus"
Now showing items 1-20 of 42
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A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion
Heyne, Markus; Marinov, Daniil; Braithwaite, Nicholas; Goodyear, Andy; de Marneffe, Jean-Francois; Cooke, Mike; Radu, Iuliana; Neyts, Erik C.; De Gendt, Stefan (2019) -
An experimental study of VUV plasma damage on porous organo-silicon glass materials
de Marneffe, Jean-Francois; Lukaszewicz, Mikolaj; Heyne, Markus; Zhang, Liping; Baklanov, Mikhaïl (2013-02) -
Atomic layer deposition of 2D transition metal dichalogenides
Delabie, Annelies; Caymax, Matty; Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Bender, Hugo; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Barla, Kathy; Radu, Iuliana; Thean, Aaron (2015-10) -
Atomic layer etching of amorphous Si on MoS2 for selectively patterned MX2 heterostructures
Heyne, Markus; Goodyear, Andy; de Marneffe, Jean-Francois; Cooke, Mike; Neyts, Erik; Radu, Iuliana; De Gendt, Stefan (2017) -
Atomic layer etching of amorphous silicon with selectivity towards MoS2
Heyne, Markus; Goodyear, Andy; de Marneffe, Jean-Francois; Cooke, Mike; Radu, Iuliana; Neyts, Erik C.; De Gendt, Stefan (2017) -
Atomic layer etching of amorphous silicon with selectivity towards MoS2 for novel MX2 heterostructure device concepts
Heyne, Markus; Goodyear, Andy; de Marneffe, Jean-Francois; Cooke, Mike; Neyts, Erik C.; Radu, Iuliana; De Gendt, Stefan (2017) -
Atomic layer processing of 2D materials for beyond CMOS applications
Delabie, Annelies; Caymax, Matty; Groven, Benjamin; Heyne, Markus; Zhang, Haodong; Chiappe, Daniele; Heyns, Marc; Radu, Iuliana (2016) -
BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line
Schram, Tom; Smets, Quentin; Heyne, Markus; Groven, Benjamin; Kunnen, Eddy; Thiam, Arame; Devriendt, Katia; Delabie, Annelies; Lin, Dennis; Chiappe, Daniele; Asselberghs, Inge; Lux, Marcel; Brus, Stephan; Huyghebaert, Cedric; Sayan, Safak; Juncker, Aurélie; Caymax, Matty; Radu, Iuliana (2017) -
Challenges and opportunities for Atomic Layer Deposition of 2D transition metal dichalcogenides
Delabie, Annelies; Groven, Benjamin; Heyne, Markus; Zhang, Haodong; Tomczak, Yoann; Caymax, Matty; Radu, Iuliana (2016) -
Characterization of grain boundaries and impact of plasma-induced patterned in 2D materials
Celano, Umberto; Virkki, Olli; Chiappe, Daniele; Heyne, Markus; Hoflijk, Ilse; Franquet, Alexis; Huyghebaert, Cedric; Paredis, Kristof; De Gendt, Stefan; Radu, Iuliana; Vandervorst, Wilfried (2017) -
Chemistry and plasma physics challenges for 2D materials technology
Heyne, Markus (2019-09) -
Comparative study of the growth behaviour of 2D WS2 by Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD), and the impact on the 2D crystal structure
Groven, Benjamin; Claes, Dieter; Heyne, Markus; Meersschaut, Johan; Nuytten, Thomas; Richard, Olivier; Bender, Hugo; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Radu, Iuliana; Thean, Aaron; Heyns, Marc; Caymax, Matty; Delabie, Annelies (2016) -
Controlled sulfurization process for the synthesis of large area MoS2 films and MoS2-WS2 heterostructures
Chiappe, Daniele; Asselberghs, Inge; Sutar, Surajit; Iacovo, Serena; Afanasiev, Valeri; Stesmans, Andre; Balaji, Yashwanth; Peters, Lisanne; Heyne, Markus; Mannarino, Manuel; Vandervorst, Wilfried; Sayan, Safak; Huyghebaert, Cedric; Caymax, Matty; Heyns, Marc; De Gendt, Stefan; Radu, Iuliana; Thean, Aaron (2016) -
Cryogenic etching vs P4 approaches: paths towards ultra-low damage integration of mesoporous oxide dielectric materials
de Marneffe, Jean-Francois; Zhang, Liping; Heyne, Markus; Krishtab, Mikhail; Goodyear, Andy; Cooke, Mike; Heylen, Nancy; Ciofi, Ivan; Wen, Liang Gong; Wilson, Chris; Rutigliani, Vito; Decoster, Stefan; Savage, Travis; Matsunaga, Koichi; Nafus, Kathleen; Boemmels, Juergen; Tokei, Zsolt; Baklanov, Mikhaïl (2014) -
Effect of 147 nm radiation on a 2.0 porous organo-Silicon glass
de Marneffe, Jean-Francois; Lukaszewicz, Mikolaj; Porter, Stephen; Zhang, Liping; Heyne, Markus; Baklanov, Mikhaïl (2013) -
Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches
Zhang, Liping; de Marneffe, Jean-Francois; Lukaszewicz, Mikolaj; Barry-Porter, Stephen; Vajda, Felim; Sun, Yiting; Heyne, Markus; Baklanov, Mikhaïl; Rutiqlian, Vito (2014) -
Growth of multilayer transition-metal dichalcogenide layers by high temperature sulfurization in H2S
Heyne, Markus; Nuytten, Thomas; Meersschaut, Johan; Chiappe, Daniele; Caymax, Matty; de Marneffe, Jean-Francois; Radu, Iuliana (2015) -
Highly efficient and stable MoS2 FETs with reversible n-doping using a dehydrated poly(vynyl-alcohol) coating
Lockhart de la Rosa, Cesar Javier; Nourbakhsh, Amirhasan; Heyne, Markus; Asselberghs, Inge; Huyghebaert, Cedric; Radu, Iuliana; Heyns, Marc; De Gendt, Stefan (2017) -
Improved plasma resistance for porous low-k dielectrics by pore stuffing approach
Zhang, Liping; de Marneffe, Jean-Francois; Heyne, Markus; Naumov, Sergej; Sun, Yiting; Zotovich, Alexey; El Otell, Ziad; Vaida, Selim; De Gendt, Stefan; Baklanov, Mikhaïl (2015) -
Insight in nucleation mechanisms of semiconducting 2D metal sulfides and application to area selective deposition
Delabie, Annelies; Tomczak, Yoann; Heyne, Markus; Groven, Benjamin; van Pelt, Thomas; Zhang, Haodong; De Gendt, Stefan; Van Elshocht, Sven; Caymax, Matty; Radu, Iuliana (2017)