Browsing by author "Deweerd, Wim"
Now showing items 21-37 of 37
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Nitrogen incorporation in HfSiO(N)/TaN gate stacks: impact on performances and NBTI
Aoulaiche, Marc; Houssa, Michel; Deweerd, Wim; Trojman, Lionel; Conard, Thierry; Maes, Jan; De Gendt, Stefan; Groeseneken, Guido; Heyns, Marc (2007) -
NMOS and PMOS triple gate devices with mid-gap metal gate on oxynitride and Hf based gate dielectrics
Henson, Kirklen; Collaert, Nadine; Demand, Marc; Goodwin, Michael; Brus, Stephan; Rooyackers, Rita; Van Ammel, Annemie; Degroote, Bart; Ercken, Monique; Baerts, Christina; Kottantharayil, Anil; Dixit, Abhisek; Beckx, Stephan; Schram, Tom; Deweerd, Wim; Boullart, Werner; Schaekers, Marc; De Gendt, Stefan; De Meyer, Kristin; Yim, Yong Sik; Hooker, Jacob; Jurczak, Gosia; Biesemans, Serge (2005) -
Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors
Schram, Tom; Ragnarsson, Lars-Ake; Lujan, Guilherme; Deweerd, Wim; Chen, Jerry; Tsai, Wilman; Henson, Kirklen; Lander, Rob; Hooker, Jacob; Vertommen, Johan; De Meyer, Kristin; De Gendt, Stefan; Heyns, Marc (2005-03) -
Potential remedies for the VT/Vfb-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey
Deweerd, Wim; Kaushik, Vidya; Chen, J.; Shimamoto, Y.; Ragnarsson, Lars-Ake; Delabie, Annelies; Pantisano, Luigi; Eyckens, Brenda; Maes, J.W.; De Gendt, Stefan; Heyns, Marc (2004) -
Potential remedies for the VT/Vfb-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey
Deweerd, Wim; Kaushik, Vidya; Chen, J.; Shimamoto, Y.; Schram, Tom; Ragnarsson, Lars-Ake; Delabie, Annelies; Pantisano, Luigi; Eyckens, Brenda; Maes, J.W.; De Gendt, Stefan; Heyns, Marc (2005-01) -
PVD-HfSiON gate dielectrics with Ni-FUSI electrode for 65nm LSTP application
Yamamoto, Kazuhiko; Kubicek, Stefan; Rothschild, Aude; Mitsuhashi, Riichirou; Deweerd, Wim; Veloso, Anabela; Jurczak, Gosia; Biesemans, Serge; De Gendt, Stefan; Wickramanayaka, S.; Hayashi, S.; Niwa, Masaaki (2005-06) -
Scaling of Hf-based gate dielectrics - integration with polysilicon gates
De Gendt, Stefan; Caymax, Matty; Chen, Jerry; Claes, Martine; Conard, Thierry; Delabie, Annelies; Deweerd, Wim; Kaushik, Vidya; Kerber, Andreas; Kubicek, Stefan; Niwa, Masaaki; Pantisano, Luigi; Puurunen, Riikka; Ragnarsson, Lars-Ake; Schram, Tom; Shimamoto, Yasuhiro; Tsai, Wilman; Röhr, Erika; Van Elshocht, Sven; Witters, Thomas; Young, Edward; Zhao, Chao; Heyns, Marc (2003) -
Scaling of HF-based gate dielectrics - intgeration with polysilicon gates
De Gendt, Stefan; Caymax, Matty; Chen, J.; Claes, Martine; Conard, Thierry; Delabie, Annelies; Deweerd, Wim; Kaushik, Vidya; Kerber, Andreas; Kubicek, Stefan; Niwa, M.; Pantisano, Luigi; Puurunen, Riikka; Ragnarsson, Lars-Ake; Schram, Tom; Shimamoto, Yasuhiro; Tsai, Wilman; Rohr, Erika; Van Elshocht, Sven; Vandervorst, Wilfried; Witters, Thomas; Young, Edward; Zhao, Chao; Heyns, Marc (2004) -
Scaling of Hf-based high-k dielectrics
Heyns, Marc; Beckx, Stephan; Caymax, Matty; Chen, J.; Claes, Martine; Coenegrachts, Bart; De Gendt, Stefan; Degraeve, R.; Delabie, Annelies; Deweerd, Wim; Groeseneken, Guido; Hayashi, Shigenori; Henson, Kirklen; Hooker, Jacob; Houssa, Michel; Kauerauf, Thomas; Kerber, A.; Kwak, Dong Hwa; Lander, Rob; Lujan, Guilherme; Niwa, Masaaki; Pantisano, Luigi; Puurunen, Riikka; Ragnarsson, Lars-Ake; Rohr, Erika; Schram, Tom; Shimamoto, Y.; Tsai, Wilman; Van Elshocht, Sven; Vertommen, Johan; Vandervorst, Wilfried; Kubicek, Stefan (2004) -
Scaling of high-k dielectrics towards sub-1nm EOT
Heyns, Marc; Beckx, Stephan; Bender, Hugo; Blomme, Pieter; Boullart, Werner; Brijs, Bert; Carter, Richard; Caymax, Matty; Claes, Martine; Conard, Thierry; De Gendt, Stefan; Degraeve, Robin; Delabie, Annelies; Deweerd, Wim; Groeseneken, Guido; Henson, Kirklen; Kauerauf, Thomas; Kubicek, Stefan; Lucci, Luca; Lujan, Guilherme; Mentens, Jimmy; Pantisano, Luigi; Petry, Jasmine; Richard, Olivier; Röhr, Erika; Schram, Tom; Vandervorst, Wilfried; Van Doorne, Patrick; Van Elshocht, Sven; Westlinder, Jörgen; Witters, Thomas; Zhao, Chao; Cartier, Eduard; Chen, Jerry; Cosnier, Vincent; Green, Martin; Jang, Se Aug; Kaushik, Vidya; Kerber, Andreas; Kluth, Jon; Lin, Steven; Tsai, Wilman; Young, Edward; Manabe, Yukiko; Shimamoto, Yasuhiro; Bajolet, Philippe; De Witte, Hilde; Maes, Jan; Date, Lucien; Pique, Didier; Coenegrachts, Bart; Vertommen, Johan; Passefort, Sophie (2003) -
Selective wet removal of Hf-based layers and post-dry etch residues high-k and metal gate
Claes, Martine; Paraschiv, Vasile; Beckx, Stephan; Demand, Marc; Deweerd, Wim; Garaud, Sylvain; Kraus, Harald; Vos, Rita; Snow, Jim; Boullart, Werner; De Gendt, Stefan (2004) -
Selective wet removal of Hf-based layers and post-dry etch residues in high-k and metal gate stacks
Claes, Martine; Paraschiv, Vasile; Beckx, Stephan; Demand, Marc; Deweerd, Wim; Garaud, Sylvain; Kraus, Harald; Vos, Rita; Snow, Jim; Boullart, Werner; De Gendt, Stefan (2005) -
Stabilisation and phase transformation of hexagonal rare-earth silicides on Si(111)
Vantomme, Andre; Wu, Ming Fang; Hogg, S.; Wahl, U.; Deweerd, Wim; Pattyn, Hugo; Langouche, G.; Jin, S.; Bender, Hugo (1998) -
Stabilisation and phase transformation of hexagonal rare-earth silicides on Si(111)
Vantomme, Andre; Wu, Ming Fang; Hogg, S. M.; Wahl, U.; Deweerd, Wim; Pattyn, Hugo; Langouche, G.; Jin, S.; Bender, Hugo (1999) -
TaN metal gate MOSFETs with agressively scaled HfO2 dielectrics
Lander, Rob; Schram, Tom; Lujan, Guilherme; Hooker, Jacob; Vertommen, Johan; Lee, S.; Deweerd, Wim; Boullart, Werner; Van Elshocht, Sven; Carter, Richard; Kubicek, Stefan; De Meyer, Kristin; De Gendt, Stefan; Heyns, Marc (2003) -
Wafer backside cleaning strategies for high-k/metal gate processing
Vos, Rita; Kesters, Els; Garaud, Sylvain; De Waele, Rita; Kenis, Karine; Lux, Marcel; Kraus, Harald; Snow, Jim; Shamiryan, Denis; Catana, Gabriela; Deweerd, Wim; Schram, Tom; De Gendt, Stefan; Mertens, Paul (2005) -
Wafer backside cleaning strategies for high-k/metal gate processing
Vos, Rita; Kesters, Els; Garaud, Sylvain; De Waele, Rita; Kenis, Karine; Lux, Marcel; Kraus, Harald; Snow, Jim; Shamiryan, Denis; Catana, Gabriela; Deweerd, Wim; Schram, Tom; De Gendt, Stefan; Mertens, Paul (2004)