Browsing by author "Date, Lucien"
Now showing items 1-20 of 31
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A novel PEALD tunnel dielectric for three-dimensional non-volatile charge-trapping technology
Cacciato, Antonio; Breuil, Laurent; Dekkers, Harold; Zahid, Mohammed; Kar, Gouri Sankar; Everaert, Jean-Luc; Schoofs, Geert; Shi, Qixian; Van den Bosch, Geert; Jurczak, Gosia; Debusschere, Ingrid; Van Houdt, Jan; Cockburn, Andrew; Date, Lucien; Xa, Li Qun; Le, Maggie; Lee, Won (2011) -
A novel PEALD tunnel dielectric for three-dimensional non-volatile charge-trapping technology
Cacciato, Antonio; Breuil, Laurent; Dekkers, Harold; Zahid, Mohammed; Kar, Gouri Sankar; Everaert, Jean-Luc; Schoofs, Geert; Van den Bosch, Geert; Jurczak, Gosia; Debusschere, Ingrid; Van Houdt, Jan; Cockburn, Andrew; Date, Lucien; Xa, Li-Qun; Le, Maggie; Lee, Won (2010) -
Bulk properties of MOCVD-deposited HfO2 layers for high-k dielectric applications
Van Elshocht, Sven; Baklanov, Mikhaïl; Brijs, Bert; Carter, R.; Caymax, Matty; Carbonell, Laure; Claes, Martine; Conard, Thierry; Cosnier, Vincent; Date, Lucien; De Gendt, Stefan; Kluth, J.; Pique, Didier; Richard, Olivier; Vanhaeren, Danielle; Vereecke, Guy; Witters, Thomas; Zhao, Chao; Heyns, Marc (2004) -
Composition and growth kinetics of the interfacial layer for MOCVD HfO2 layers on Si substrates
Van Elshocht, Sven; Caymax, Matty; De Gendt, Stefan; Conard, Thierry; Petry, Jasmine; Date, Lucien; Pique, Didier; Heyns, Marc (2004-03) -
Comprehensive study of Ga Activation in Si, SiGe and Ge and 5 x 10-10 $Xcm2 contact resistivity achieved on Ga doped Ge using nanosecond laser activation
Wang, Linlin; Yu, Hao; Schaekers, Marc; Everaert, Jean-Luc; Franquet, Alexis; Douhard, Bastien; Date, Lucien; del Agua Borniquel, Jose Ignacio; Hollar, Kelly; Khaja, Fareen; Aderhold, Wolfgang; Mayur, Abhilash; Lee, J.Y.; van Meer, Hans; Mocuta, Dan; Horiguchi, Naoto; Collaert, Nadine; De Meyer, Kristin; Jiang, Yu-Long (2017) -
Development of ALD HfZrOx with TDEAH, TDEAZ and H2O
Shi, Xiaoping; Tielens, Hilde; Takeoka, Shinji; Nakabayashi, Takashi; Nyns, Laura; Adelmann, Christoph; Delabie, Annelies; Schram, Tom; Ragnarsson, Lars-Ake; Schaekers, Marc; Date, Lucien; Schreutelkamp, Rob; Van Elshocht, Sven (2010) -
Development of ALD HfZrOx with TDEAH/TDEAZ and H2O
Shi, Xiaoping; Tielens, Hilde; Takeoka, Shinji; Nakabayashi, Takashi; Nyns, Laura; Adelmann, Christoph; Delabie, Annelies; Schram, Tom; Ragnarsson, Lars-Ake; Schaekers, Marc; Date, Lucien; Schreutelkamp, Rob; Van Elshocht, Sven (2011) -
Electrical properties of MOCVD HfO2 dielectric layers with polysilicon gate electrodes for CMOS applications
Date, Lucien; Rittersma, Chris; Massoubre, D.; Ponomarev, Youri; Roozeboom, F.; Pique, Didier; Van Autryve, Luc; Van Elshocht, Sven; Caymax, Matty (2003) -
Further optimization of plasma nitridation of ultra-thin oxides for 65 nm node MOSFETS
Kraus, Philip; Chua, Tai Chen; Rothschild, Aude; Cubaynes, Florence; Veloso, Anabela; Mertens, Sofie; Date, Lucien; Bauer, Thomas; Ahmed, Khaled; Nouri, Faran; Schreutelkamp, Rob; Schaekers, Marc (2004) -
Further optimization of plasma nitridation of ultra-thin oxides for 65-nm node MOSFETS
Kraus, P.A.; Chua, T.C.; Ahmed, K.Z.; Campbell, J.; Nouri, F.; Cruise, J.; Rothschild, Aude; Veloso, Anabela; Mertens, Sofie; Schaekers, Marc; Cubaynes, F.N.; Date, Lucien; Schreutelkamp, Rob; Bauer, T.M. (2004) -
High-k gate stack engineering – towards meeting low standby power and high performance targets
De Gendt, Stefan; Brunco, David; Caymax, Matty; Conard, Thierry; Date, Lucien; Delabie, Annelies; Deweerd, Wim; Groeseneken, Guido; Houssa, Michel; Hyun, Sangjin; Kaushik, Vidya; Kubicek, Stefan; Maes, Jan; Pantisano, Luigi; Ragnarsson, Lars-Ake; Rohr, Erika; Schram, Tom; Shimamoto, Y.; Sleeckx, Erik; Vandervorst, Wilfried; Van Elshocht, Sven; Yamada, Naoki; Witters, Thomas; Zhao, Chao; Zimmerman, Paul; Heyns, Marc (2005) -
Impact of precursor chemistry on atomic layer deposition of lutetium aluminates
Nyns, Laura; Shi, Xiaoping; Tielens, Hilde; Van Elshocht, Sven; Date, Lucien; Schreutelkamp, Rob (2012) -
Impact of top-surface tunnel-oxide nitridation on flash memory performance and reliability
Ganguly, Udayan; Guarini, Theresa; Wellekens, Dirk; Date, Lucien; Cho, Yonah; Rothschild, Aude; Swenberg, Johanes (2010) -
O2 post deposition anneal of Al2O3 blocking dielectric for higher performance and reliability of TANOS flash memory
Rothschild, Aude; Breuil, Laurent; Van den Bosch, Geert; Richard, Olivier; Conard, Thierry; Franquet, Alexis; Cacciato, Antonio; Debusschere, Ingrid; Jurczak, Gosia; Van Houdt, Jan; Kittl, Jorge; Ganguly, Udayan; Date, Lucien; Boelen, Pieter; Schreutelkamp, Rob (2009) -
Optimization of gate stack parameters towards 3D-SONOS application
Breuil, Laurent; Van den Bosch, Geert; Cacciato, Antonio; Date, Lucien; Kar, Gouri Sankar; Tang, Baojun; Arreghini, Antonio; Debusschere, Ingrid; Van Houdt, Jan (2011) -
Optimization of HfSiON using a design of experiment (DOE) approach
Rothschild, Aude; Mitsuhashi, Riichirou; Kerner, Christoph; Shi, Xiaoping; Everaert, Jean-Luc; Date, Lucien; Conard, Thierry; Richard, Olivier; Vrancken, Evi; Verbeeck, Rita; Veloso, Anabela; Lauwers, Anne; de Potter de ten Broeck, Muriel; Debusschere, Ingrid; Jurczak, Gosia; Niwa, Masaaki; Absil, Philippe; Biesemans, Serge (2007) -
Plasma nitridation optimization sub-15A gate dielectrics
Cubaynes, Florence; Schmitz, Jurriaan; van der marel, C.; Snijders, H.; Veloso, Anabela; Rothschild, Aude; Olsen, C.; Date, Lucien (2003) -
Reliability comparison of ISSG oxide and HTO as tunnel dielectric in 3-D–SONOS applications
Qiao, Fengying; Arreghini, Antonio; Blomme, Pieter; Date, Lucien; Van den Bosch, Geert; Liyang, Pan; Jun, Xu; Van Houdt, Jan (2013) -
Scalability of MOCVD-deposited Hafnium oxide
Van Elshocht, Sven; Carter, Richard; Caymax, Matty; Claes, Martine; Conard, Thierry; Date, Lucien; De Gendt, Stefan; Kaushik, Vidya; Kerber, Andreas; Kluth, J.; Lujan, Guilherme; Petry, Jasmine; Pique, Didier; Richard, Olivier; Rohr, Erika; Shimamoto, Yasuhiro; Tsai, Wilman; Heyns, Marc (2003) -
Scaling down of MOCVD HfSiON to 1nm EOT
Shi, Xiaoping; Rothschild, Aude; Everaert, Jean-Luc; Van Elshocht, Sven; Date, Lucien; Schreutelkamp, Rob; Schaekers, Marc (2007-10)