Browsing by author "Van Daele, Benny"

Advanced carrier depth profiling on Si and Ge with M4PP

Clarysse, Trudo; Eyben, Pierre; Parmentier, Brigitte; Van Daele, Benny; Satta, Alessandra; Vandervorst, Wilfried; Lin, Rong; Petersen, Dirch; Folmer Nielsen, Peter (2007)

Advanced carrier depth profiling on Si and Ge with micro four-point probe

Clarysse, Trudo; Eyben, Pierre; Parmentier, Brigitte; Van Daele, Benny; Satta, Alessandra; Vandervorst, Wilfried; Lin, Rong; Petersen, Dirch H.; Folmer Nielsen, Peter (2008)

Analysis of As, P diffusion and defect evolution during sub-millisecond non-melt laser annealing based on an atomistic kinetic Monte Carlo approach

Noda, Taiji; Vandervorst, Wilfried; Felch, S.; Parihar, V.; Cuperus, Aldert; Mcintosh, R.; Vrancken, Christa; Rosseel, Erik; Bender, Hugo; Van Daele, Benny; Niwa, Masaaki; Umimoto, H.; Schreutelkamp, Rob; Absil, Philippe; Jurczak, Gosia; De Meyer, Kristin; Biesemans, Serge; Hoffmann, Thomas Y. (2007)

Analysis of the pre-epi bake conditions on the defect creation in recessed Si1-xGex S/D junctions

Bargallo Gonzalez, Mireia; Thomas, Nicole; Simoen, Eddy; Verheyen, Peter; Hikavyy, Andriy; Leys, Frederik; Okuno, Yasutoshi; Vissouvanadin Soubaretty, Bertrand; Van Daele, Benny; Geenen, Luc; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.G.; Lu, J.P.; Weijtmans, J.W.; Wise, R. (2007)

Cesium near-surface concentration in low energy, negative mode dynamic SIMS

Berghmans, Bart; Van Daele, Benny; Geenen, Luc; Conard, Thierry; Franquet, Alexis; Vandervorst, Wilfried (2007-10)

Cesium near-surface concentration in low energy, negative mode dynamic SIMS

Berghmans, Bart; Van Daele, Benny; Geenen, Luc; Conard, Thierry; Franquet, Alexis; Vandervorst, Wilfried (2008)

Correlation of transport and structural properties in AlGaN/GaN HEMT: Strain modification by means of AlN interlayers

Germain, Marianne; Leys, Maarten; Boeykens, Steven; Ruythooren, Wouter; Schreurs, Dominique; Choi, Kang-Hoon; Borghs, Gustaaf; Van Daele, Benny; Van Tendeloo, Gustaaf; Farvacque, Jean-Louis; Carosella, Francesca (2003)

Effective work-function modulation by aluminum-ion implantation for metal-gate technology (poly-Si/TiN/SiO2)

Singanamalla, Raghunath; Yu, HongYu; Van Daele, Benny; Kubicek, Stefan; De Meyer, Kristin (2007)

Formation of germanium shallow junction by flash annealing

Satta, Alessandra; D'Amore, Antonio; Simoen, Eddy; Anwand, W; Skorupa, W; Clarysse, Trudo; Van Daele, Benny; Janssens, Tom (2007)

Impact of repetitive and random surface morphologies on the ripple formation on ion bombarded SiGe-surfaces

Sarkar, Subhendu; Van Daele, Benny; Vandervorst, Wilfried (2008-08)

Impact of the chemical concentration on the solid-phase epitaxial regrowth of phosphorus implanted preamorphized germanium

Simoen, Eddy; Brugere, Antoine; Satta, Alessandra; Firrincieli, Andrea; Van Daele, Benny; Brijs, Bert; Richard, Olivier; Geypen, Jef; Meuris, Marc; Vandervorst, Wilfried (2009)

Improvement of ohmic contacts on AlGaN/GaN HEMT's by using in-situ Si3N4 passivation layer

Derluyn, Joff; Van Daele, Benny; Boeykens, Steven; Cheng, Kai; Ruythooren, Wouter; Leys, Maarten; Germain, Marianne; Van Tendeloo, Gustaaf; Borghs, Gustaaf (2005-06)

In-line characterization of heterojunction bipolar transistor base layers by high-resolution X-ray diffraction

Nguyen, Duy; Loo, Roger; Hikavyy, Andriy; Van Daele, Benny; Ryan, Paul; Wormington, Matthew; Hopkins, John (2007)

In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction

Nguyen, Duy; Loo, Roger; Hikavyy, Andriy; Van Daele, Benny; Ryan, Paul; Wormington, Paul; Hopkins, John (2007)

Junction architecture for planar devices

Pawlak, Bartek; Duffy, R.; Hoffmann, Thomas Y.; Severi, Simone; Felch, S.B.; Eyben, Pierre; Van Daele, Benny; Vandervorst, Wilfried; Lander, Rob (2007)

Junction formation in Ge by ion implantation

Satta, Alessandra; Simoen, Eddy; Van Daele, Benny; Clarysse, Trudo; Nicholas, Gareth; Vandervorst, Wilfried; Anwand, Wolfgang; Skorupa, Wolfgang; Peaker, Tony; Marchevic, Vladimir (2007-05)

Laser annealed junctions: process integration sequence optimization for advanced CMOS technologies

Hoffmann, Thomas Y.; Noda, Taiji; Felch, S.; Severi, Simone; Parihar, V.; Forstner, H.; Vrancken, Christa; de Potter de ten Broeck, Muriel; Van Daele, Benny; Bender, Hugo; Niwa, Masaaki; Schreutelkamp, Rob; Vandervorst, Wilfried; Biesemans, Serge; Absil, Philippe (2007)