Browsing by author "Depas, Michel"
Now showing items 1-20 of 47
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A consistent model for the thickness dependence of intrinsic breakdown in ultra-thin oxides
Degraeve, Robin; Groeseneken, Guido; Bellens, Rudi; Depas, Michel; Maes, Herman (1995) -
Breakdown and defect generation in ultra-thin gate oxide
Depas, Michel; Vermeire, Bert; Heyns, Marc (1996) -
Breakdown and instability of 3 nm Gate Oxide
Depas, Michel; Vermeire, Bert; Heyns, Marc (1995) -
Correlation between grown-in silicon substrate defects and silicon gate oxide breakdown characteristics
Vanhellemont, Jan; Kissinger, G.; Kenis, Karine; Depas, Michel; Gräf, D.; Lambert, U.; Wagner, P. (1996) -
Critical processes for ultra-thin gate oxide integrity
Depas, Michel; Heyns, Marc; Nigam, Tanya; Kenis, Karine; Sprey, Hessel; Wilhelm, H.; Wilhelm, Rudi; Crossley, A.; Sofield, C. J.; Gräf, D. (1996) -
Defect density of ultra-thin gate oxides grown by conventional oxidation processes
Depas, Michel; Vermeire, Bert; Mertens, Paul; Schaekers, Marc; Meuris, Marc; Heyns, Marc (1994) -
Definition of dielectric breakdown for ultra thin (<2nm) gate oxides
Depas, Michel; Nigam, Tanya; Heyns, Marc (1997) -
Determination of tunnelling parameters in ultra-thin oxide poly-Si/SiO2/Si structures
Depas, Michel; Vermeire, Bert; Mertens, Paul; Van Meirhaeghe, R. L.; Heyns, Marc (1995) -
Effect of Cl in gate oxidation
Mertens, Paul; McGeary, M. J.; Schaekers, Marc; Sprey, Hessel; Vermeire, Bert; Depas, Michel; Meuris, Marc; Heyns, Marc (1997) -
Effect of Cl in gate oxidation
Mertens, Paul; McGeary, M. J.; Schaekers, Marc; Sprey, Hessel; Vermeire, Bert; Depas, Michel; Meuris, Marc; Heyns, Marc (1997) -
Effect of Fe contamination on quality of poly silicon gate structures
Mertens, Paul; De Gendt, Stefan; Depas, Michel; Kenis, Karine; Opdebeeck, Ann; Snee, Peter; Gräf, D.; Brown, G.; Heyns, Marc (1996) -
Environmentally-friendly chlorine during oxidation
Mertens, Paul; Vermeire, Bert; McGeary, M. J.; Meuris, Marc; Heyns, Marc; Depas, Michel; Sees, J.; O'Brien, S. C.; Gräf, D. (1995) -
Evaluation of different chlorine sources for gate oxidation
Mertens, Paul; Vermeire, Bert; Depas, Michel; Schaekers, Marc; Heyns, Marc (1995) -
Gate voltage dependence of reliability for ultra-thin oxides
Nigam, Tanya; Depas, Michel; Degraeve, Robin; Heyns, Marc; Groeseneken, Guido (1997) -
Growth and reliability of 3nm N2O gate oxide
Nigam, Tanya; Depas, Michel; Heyns, Marc (1996) -
Growth kinetics and electrical characteristics of ultra-thin pyrogenetic silicon oxide
Depas, Michel; Vermeire, Bert; Mertens, Paul; Heyns, Marc (1995) -
Impact of organic contamination on gate oxide integrity
De Gendt, Stefan; Knotter, Martin; Kenis, Karine; Depas, Michel; Meuris, Marc; Mertens, Paul; Heyns, Marc (1998) -
Impact of organic contamination on thin gate oxide quality
De Gendt, Stefan; Knotter, D. M.; Kenis, Karine; Depas, Michel; Meuris, Marc; Mertens, Paul; Heyns, Marc (1998) -
Influence of boron diffusion on ultra-thin oxides
Nigam, Tanya; Depas, Michel; Heyns, Marc; Sofield, C. F.; Mapeldoram, L. (1997) -
Interpretation of spectroscopic ellipsometry measurements of ultrathin dielectric layers on silicon: impact of accuracy of the silicon optical constants
Tonova, Diana; Depas, Michel; Vanhellemont, Jan (1996)