Browsing imec Publications by author "Zambrano, R."
Now showing items 1-20 of 22
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A highly reliable 3-dimensional integrated SBT ferroelectric capacitor enabling FeRAM scaling
Goux, Ludovic; Russo, G.; Menou, N.; Lisoni, Judit; Schwitters, M.; Paraschiv, Vasile; Maes, David; Artoni, C.; Corallo, G.; Haspeslagh, Luc; Wouters, Dirk; Zambrano, R.; Muller, Ch. (2005-04) -
Composition control and ferroelectric properties of sidewall Sr0.8Bi2.2Ta2O9 in integrated 3-Dimensional ferroelectric capacitors
Goux, Ludovic; Lisoni, Judit; Schwitters, Michael; Paraschiv, Vasile; Maes, D.; Haspeslagh, Luc; Wouters, Dirk; Menou, M.; Turquat, Ch.; Madigou, V.; Muller, Ch.; Zambrano, R. (2005) -
Composition control and ferrolectric properties of sidewalls in three-dimensional SrBi2Ta2O9-based ferroelectric capacitors
Goux, Ludovic; Lisoni, Judit; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Menou, N.; Turquat, Ch.; Madigou, V.; Muller, Ch.; Zambrano, R. (2005-09) -
Development of an SBT MOCVD production process for FERAM applications
Everaert, Jean-Luc; Bartic, Andrei; Kaczer, Ben; Wouters, Dirk; Monchoix, Hervé; Mitaut, Christian; Van Autryve, Luc; Pavano, Rita; Casella, Patrizia; Zambrano, R. (2001) -
Enhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structures
Lisoni, Judit; Johnson, Jo; Goux, Ludovic; Paraschiv, Vasile; Maes, David; Vander Meeren, Hans; Willegems, Myriam; Haspeslagh, Luc; Wouters, Dirk; Caputa, C.; Zambrano, R.; Turquat, Ch.; Muller, Ch. (2007-01) -
Excellent reliability properties of 0.81mm2 integrated SBT fecap's with 3-D structure
Goux, Ludovic; Russo, G.; Lisoni, Judit; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Zambrano, R. (2005) -
Ferroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs
Goux, Ludovic; Menou, N.; Lisoni, Judit; Schwitters, M.; Paraschiv, Vasile; Maes, David; Zhen, X.; Kaczer, Ben; Haspeslagh, Luc; Wouters, Dirk; Muller, C.; Caputa, C.; Zambrano, R. (2004) -
Influence of dry-etch patterning of top electrode and SrBi2Ta2O9 on the properties of ferroelectric capacitors
Goux, Ludovic; Paraschiv, Vasile; Lisoni, Judit; Schwitters, Michael; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Casella, P.; Zambrano, R. (2005) -
Influence of metal and SBT dry-etch on FeCAP properties and role of recovery anneals
Goux, Ludovic; Paraschiv, Vasile; Boullart, Werner; Lisoni, Judit; Schwitters, M.; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, G.; Monchoix, H. (2004) -
Influence of top electrode deposition conditions on the reliability of integrated SBT ferroelectric capacitors
Goux, Ludovic; Xu, Zhen; Paraschiv, Vasile; Schwitters, M.; Lisoni, Judit; Maes, David; Haspeslagh, Luc; Groeseneken, Guido; Zambrano, R.; Wouters, Dirk (2004) -
Integration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technology
Johnson, J.; Goux, Ludovic; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, C.; Zambrano, R.; Vecchio, Emma; Monchoix, Hervé; Van Autryve, Luc; Lisoni, Judit (2003) -
Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology
Lisoni, Judit; Johnson, Jo; Goux, Ludovic; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, G.; Monchoix, H.; Van Autryve, Luc; Wouters, Dirk (2004) -
Integration of MOCVD SBT stacked ferroelectric capacitors in a 0.35 μm CMOS technology
Maes, David; Everaert, Jean-Luc; Goux, Ludovic; Lisoni, Judit; Paraschiv, Vasile; Schwitters, M.; Haspeslagh, Luc; Wouters, Dirk; Artoni, C.; Caputa, Concetta; Casella, P.; Corallo, G.; Russo, G.; Zambrano, R.; Monchoix, H.; Van Autryve, Luc (2004) -
Integration of MOCVD SBT stacked ferroelectric capacitors in A 0.35um CMOS technology
Maes, David; Everaert, Jean-Luc; Goux, Ludovic; Lisoni, Judit; Paraschiv, Vasile; Schuster, Thomas; Haspeslagh, Luc; Wouters, Dirk; Artoni, C.; Caputa, Concetta; Casella, P.; Corallo, G.; Russo, G.; Zambrano, R.; Monchoix, H.; Van Autryve, Luc (2004) -
Integration of SrBi2Ta2O9 (SBT) based FRAM capacitors: plasma etch issues and solutions
Paraschiv, Vasile; Boullart, Werner; Vanhaelemeersch, Serge; Lisoni, Judit; Schwitters, Michael; Maes, David; Wouters, Dirk; Casella, P.; Zambrano, R.; Vecchio, G.; Van Autryve, Luc (2004) -
MOCVD-SBT thin films for advanced FeRAM: deposition and film formation processes
Wouters, Dirk; Everaert, Jean-Luc; Schwitters, Michael; Johnson, Jo; Vander Meeren, Hans; Monchoix, H.; Mitaut, C.; Van Autryve, L.; Caputa, C.; Zambrano, R. (2003) -
Oxygen barrier for stacked SBT-FeCAP on W-plug
Lisoni, Judit; Maes, David; Everaert, Jean-Luc; Johnson, Jo; Paraschiv, Vasile; Haspeslagh, Luc; Wouters, Dirk; Casella, Patrizia; Corvasce, C.; Zambrano, R.; Monchoix, H.; Van Autryve, L. (2002) -
Oxygen barrier for stacked SBT-FeCAP on W-plugs
Zambrano, R.; Casella, Patrizia; Corvasce, C.; Monchoix, Hervé; Van Autryve, Luc; Lisoni, Judit; Maes, David; Everaert, Jean-Luc; Johnson, Jo; Paraschiv, Vasile; Haspeslagh, Luc; Wouters, Dirk (2002) -
Process and substrate effects on the properties of MOCVD-deposited SrBi2Ta2O9 films
Schwitters, M.; Everaert, Jean-Luc; Lisoni, Judit; Paraschiv, Vasile; Goux, Ludovic; Wouters, Dirk; Monchoix, H.; Caputa, Concetta; Zambrano, R. (2004) -
Spacers alternatives for integration of 3D stacked SBT FeCAPs
Lisoni, Judit; Johnson, J.; Everaert, Jean-Luc; Paraschiv, Vasile; Boullart, Werner; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, Emma; Monchoix, Hervé; Van Autryve, Luc (2003)