Authors
Mitard, Jerome;
Vincent, Benjamin;
De Jaeger, Brice;
Krom, Raymond;
Loo, Roger;
Eneman, Geert;
De Meyer, Kristin;
Meuris, Marc;
Heyns, Marc;
Vandervorst, Wilfried;
Caymax, Matty;
Hoffmann, Thomas Y.
Conference
Dielectrics for Nanosystems 4: Materials Science, Processing, Reliability, and Manufacturing
Title
Electrical characterization of Ge-pFETs with HfO2/TiN metal gate: review of possible defects impacting the hole mobility
Publication type
Proceedings paper
