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Browsing by Author "Akheyar, Amal"

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    1/f noise study on strained Si0.8Ge0.2 p-channel MOSFETs with high-k/poly Si gate stack

    Yan, L.
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    Simoen, Eddy  
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    Olsen, S.H.
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    Akheyar, Amal
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    Claeys, Cor
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    O'Neill, A.G.
    Journal article
    2009, Solid-State Electronics, (53) 11, p.1177-1182
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    A Dy2O3-capped HfO2 dielectric and TaCx-based metals enabling low-Vt single-metal-single-dielectric gate stack

    Chang, Vincent
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    Ragnarsson, Lars-Ake  
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    Pourtois, Geoffrey  
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    O'Connor, Robert
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    Adelmann, Christoph  
    Proceedings paper
    2007, Technical Digest International Electron Devices Meeting - IEDM, 10/12/2007, p.535-538
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    Analysis of silicide / diffusion contact resistance making use of transmission line stuctures

    Akheyar, Amal
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    Lauwers, Anne  
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    Lindsay, Richard
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    de Potter de ten Broeck, Muriel  
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    Tempel, Georg
    Proceedings paper
    2002, Silicon Materials - Processing, Characterization, and Reliability, 1/04/2002, p.53-58
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    Applications of Ni-based silicides to 45 nm CMOS and beyond

    Kittl, Jorge
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    Lauwers, Anne  
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    Chamirian, Oxana
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    Pawlak, Malgorzata
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    Van Dal, Mark  
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    Akheyar, Amal
    Proceedings paper
    2004, Silicon Front-End Junction Formation - Physics and Technology, 12/04/2004, p.31-42
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    Co-silicide, Co(Ni)-silicide and Ni-silicide to source/drain contact resistance

    Akheyar, Amal
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    Lauwers, Anne  
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    Kittl, Jorge
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    de Potter de ten Broeck, Muriel  
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    Chamirian, Oxana
    Proceedings paper
    2003, Advanced Short-Time Thermal Processing for Si-based CMOS devices, 27/04/2003, p.197-204
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    Edge effects and tilt dependency of heavy ion SEE characterization in pn junctions

    Berger, G.
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    Moreno, L.
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    Martinez, I.
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    Akheyar, Amal
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    Harboe-Sorensen, R.
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    Ryckewaert, G.
    Oral presentation
    2002, RADECS Workshop
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    Effects of alloying on properties of NiSi for CMOS applications

    Van Dal, Mark  
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    Akheyar, Amal
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    Kittl, Jorge
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    Chamirian, Oxana
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    de Potter de ten Broeck, Muriel  
    Proceedings paper
    2004, Silicon Front-End Junction Formation - Physics and technology, 12/04/2004
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    Electrical properties of low-VT metal-gated n-MOSFETs using La2O3/SiOx as interfacial layer between HfLaO high-k dielectrics and Si channel

    Chang, Shou-Zen
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    Yu, Hong-Yu
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    Adelmann, Christoph  
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    Delabie, Annelies  
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    Wang, Xin Peng
    Journal article
    2008-05, IEEE Electron Device Letters, (29) 5, p.430-433
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    Flash memory with high-k tunnel dielectrics: comparative retention study

    Blomme, Pieter  
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    Akheyar, Amal
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    Van Houdt, Jan  
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    De Meyer, Kristin  
    Proceedings paper
    2005, 1st International Conference on Memory Technology and Design, 21/05/2005, p.239-241
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    Flat-band voltage shift of Ruthenium gated stacks and its link with the formation of a thin Ruthenium oxide layer at the Ruthenium/dielectric interface

    Li, Zilan
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    Schram, Tom  
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    Pantisano, Luigi
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    Stesmans, Andre  
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    Conard, Thierry  
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    Shamuilia, Sheron
    Journal article
    2007-02, Journal of Applied Physics, (101) 3, p.34503
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    Forming gas anneal induced flat-band voltage shift of metal-oxide-semiconductor stacks and its link with hydrogen incorporation in metal gates

    Li, Zilan
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    Schram, Tom  
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    Pantisano, Luigi
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    Witters, Thomas  
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    Stesmans, Andre  
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    Akheyar, Amal
    Journal article
    2007, Microelectronic Engineering, (84) 9_10, p.2213-2216
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    High-k materials for tunnel barrier engineering in future memory technologies

    Blomme, Pieter  
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    Govoreanu, Bogdan  
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    Rosmeulen, Maarten  
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    Akheyar, Amal
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    Haspeslagh, Luc  
    Meeting abstract
    2004-10, Extended Abstracts 206th Electrochemical Society Meeting, 3/10/2004, p.868
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    Higk-k materials for tunnel barrier engineering in floating-gate flash memories

    Blomme, Pieter  
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    Govoreanu, Bogdan  
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    Rosmeulen, Maarten  
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    Akheyar, Amal
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    Haspeslagh, Luc  
    Meeting abstract
    2005, Meeting Abstracts 208th Electrochemical Society, 1/10/2005
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    Impact of advanced gate stack engineering on low frequency noise performances of planar bulk CMOS transistors

    Mercha, Abdelkarim  
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    Okawa, H.
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    Akheyar, Amal
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    Simoen, Eddy  
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    Nakabayashi, T.
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    Hoffmann, Thomas Y.
    Proceedings paper
    2009, 20th International Conference on Noise and Fluctuations - ICNF, 14/06/2009, p.277-280
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    Low VT CMOS using doped Hf-based oxides, TaC-based metals and laser-only anneal

    Kubicek, Stefan  
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    Schram, Tom  
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    Paraschiv, Vasile  
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    Vos, Rita  
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    Demand, Marc  
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    Adelmann, Christoph  
    Proceedings paper
    2007, Technical Digest International Electron Devices Meeting - IEDM, 10/12/2007, p.49-52
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    Low-frequency noise analysis of the impact of an LaO cap layer in HfSiON/Ta2C gate stack nMOSFETs

    Simoen, Eddy  
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    Akheyar, Amal
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    Rohr, Erika
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    Mercha, Abdelkarim  
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    Claeys, Cor
    Proceedings paper
    2009, ULSI Process Integration 6, 4/10/2009, p.237-245
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    Low-frequency noise analysis of the impact of an LaO cap layer in HfSiON/Ta2C gate stack nMOSFETs

    Simoen, Eddy  
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    Akheyar, Amal
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    Rohr, Erika
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    Mercha, Abdelkarim  
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    Claeys, Cor
    Meeting abstract
    2009, 216th ECS Meeting, 4/10/2009, p.2370
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    Mechanism of O2-anneal induced Vfb shifts of Ru gated stacks

    Li, Zilan
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    Schram, Tom  
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    Pantisano, Luigi
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    Stesmans, Andre  
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    Conard, Thierry  
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    Shamuilia, Sheron
    Journal article
    2007, Microelectronics Reliability, (47) 4_5, p.518-520
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    Ni- and Co-based silicides for advanced CMOS applications

    Kittl, Jorge
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    Lauwers, Anne  
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    Chamirian, Oxana
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    Van Dal, Mark  
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    Akheyar, Amal
    Journal article
    2003, Microelectronic Engineering, (70) 2_4, p.158-165
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    Ni-based silicides: material issues for advanced CMOS applications

    Kittl, Jorge
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    Lauwers, Anne  
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    Chamirian, Oxana
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    Van Dal, Mark  
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    Akheyar, Amal
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    Richard, Olivier  
    Proceedings paper
    2003, Advanced Short-Time Thermal Processing for Si-based CMOS devices, 27/04/2003, p.177-182
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